JPS5665975A - Surface treatment of metal - Google Patents
Surface treatment of metalInfo
- Publication number
- JPS5665975A JPS5665975A JP14263379A JP14263379A JPS5665975A JP S5665975 A JPS5665975 A JP S5665975A JP 14263379 A JP14263379 A JP 14263379A JP 14263379 A JP14263379 A JP 14263379A JP S5665975 A JPS5665975 A JP S5665975A
- Authority
- JP
- Japan
- Prior art keywords
- base material
- arc
- frequency wave
- pipe
- material pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- ing And Chemical Polishing (AREA)
Abstract
PURPOSE:To clean the surface of metal efficiently, by making uniform cationic stream collide against the whole surface and by making various ion infiltrate into the whole surface by arc discharge without melting base material. CONSTITUTION:Base material pipe 1 made of nonmagnetic material is connected to a cathode, and water-cooled electrode 2 is connected to the anode of an arc source 3 and is inserted into the base material pipe 1. A magnetic coil 4 generates a magnetic field 6 around the pipe 1 by a DC power source 5. High frequency wave of about 10 kHz and low frequency wave of about 10Hz are superimposed on the power source 3. When arc is generated in Ar atmosphere, arc column rotates at a high speed, so that oxide film on the surface is broken. The arc column becomes rigid and constant by the component of high frequency pulse current, and treat the base material surface uniformly by the strong treating power of high peak current. Becauses low frequency wave is applied simultaneously, the speed of the arc column is controlled, arc interruption is prevented, and rise in temp. of base material 1 is also controlled. The whole internal surface is cleaned by moving the base material pipe 1 in the direction of an arrow 7.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14263379A JPS5665975A (en) | 1979-11-02 | 1979-11-02 | Surface treatment of metal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14263379A JPS5665975A (en) | 1979-11-02 | 1979-11-02 | Surface treatment of metal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5665975A true JPS5665975A (en) | 1981-06-04 |
Family
ID=15319878
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14263379A Pending JPS5665975A (en) | 1979-11-02 | 1979-11-02 | Surface treatment of metal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5665975A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62294160A (en) * | 1986-06-13 | 1987-12-21 | バルツエルス アクチエンゲゼルシヤフト | Thermochemical surface treatment of material in reactive gaseous plasma |
-
1979
- 1979-11-02 JP JP14263379A patent/JPS5665975A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62294160A (en) * | 1986-06-13 | 1987-12-21 | バルツエルス アクチエンゲゼルシヤフト | Thermochemical surface treatment of material in reactive gaseous plasma |
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