GB2030180B - Vapour deposition of metal in plasma discharge - Google Patents

Vapour deposition of metal in plasma discharge

Info

Publication number
GB2030180B
GB2030180B GB7925486A GB7925486A GB2030180B GB 2030180 B GB2030180 B GB 2030180B GB 7925486 A GB7925486 A GB 7925486A GB 7925486 A GB7925486 A GB 7925486A GB 2030180 B GB2030180 B GB 2030180B
Authority
GB
United Kingdom
Prior art keywords
metal
vapour deposition
plasma discharge
plasma
vapour
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7925486A
Other versions
GB2030180A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Priority to GB7925486A priority Critical patent/GB2030180B/en
Publication of GB2030180A publication Critical patent/GB2030180A/en
Application granted granted Critical
Publication of GB2030180B publication Critical patent/GB2030180B/en
Expired legal-status Critical Current

Links

Classifications

    • A—HUMAN NECESSITIES
    • A63—SPORTS; GAMES; AMUSEMENTS
    • A63H—TOYS, e.g. TOPS, DOLLS, HOOPS OR BUILDING BLOCKS
    • A63H7/00—Toy figures led or propelled by the user
GB7925486A 1978-01-26 1979-07-20 Vapour deposition of metal in plasma discharge Expired GB2030180B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB7925486A GB2030180B (en) 1978-01-26 1979-07-20 Vapour deposition of metal in plasma discharge

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB3120478 1978-01-26
GB7925486A GB2030180B (en) 1978-01-26 1979-07-20 Vapour deposition of metal in plasma discharge

Publications (2)

Publication Number Publication Date
GB2030180A GB2030180A (en) 1980-04-02
GB2030180B true GB2030180B (en) 1983-05-25

Family

ID=26260788

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7925486A Expired GB2030180B (en) 1978-01-26 1979-07-20 Vapour deposition of metal in plasma discharge

Country Status (1)

Country Link
GB (1) GB2030180B (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5779621A (en) * 1980-11-05 1982-05-18 Mitsubishi Electric Corp Plasma processing device
US4359490A (en) * 1981-07-13 1982-11-16 Fairchild Camera & Instrument Corp. Method for LPCVD co-deposition of metal and silicon to form metal silicide
DE3300449A1 (en) * 1983-01-08 1984-07-12 Philips Patentverwaltung Gmbh, 2000 Hamburg METHOD FOR PRODUCING AN ELECTRODE FOR A HIGH PRESSURE GAS DISCHARGE LAMP
DE3330910A1 (en) * 1983-08-27 1985-03-07 Philips Patentverwaltung Gmbh, 2000 Hamburg METHOD FOR PRODUCING A REACTION TUBE FOR CRYSTAL GROWING PURPOSES
DE3347036C2 (en) * 1983-12-24 1986-04-24 Fr. Kammerer GmbH, 7530 Pforzheim Process for coating substrates with metals
DE3516078A1 (en) * 1985-05-04 1986-11-06 Philips Patentverwaltung Gmbh, 2000 Hamburg METHOD FOR THE GLIMMENT-CHARGE-ACTIVATED REACTIVE DEPOSITION OF ELECTRICALLY CONDUCTIVE MATERIAL FROM A GAS PHASE
CH671407A5 (en) * 1986-06-13 1989-08-31 Balzers Hochvakuum
DE3622614A1 (en) * 1986-07-05 1988-01-14 Philips Patentverwaltung METHOD FOR PRODUCING ELECTRICALLY CONDUCTIVE MOLDED BODIES BY PLASMA-ACTIVATED CHEMICAL DEPOSITION FROM THE GAS PHASE
DE3717955A1 (en) * 1987-05-25 1988-12-08 Schering Ag METHOD FOR PRODUCING THIN MOLYBDAEN FILMS BY DEPOSIT IN GLIMATE CHARGING ZONES
DE3905417C2 (en) * 1989-02-22 1997-07-10 Sueddeutsche Kalkstickstoff Process for the production of thin niobium and / or niobium oxide films
JP4168676B2 (en) * 2002-02-15 2008-10-22 コニカミノルタホールディングス株式会社 Film forming method
US7608151B2 (en) * 2005-03-07 2009-10-27 Sub-One Technology, Inc. Method and system for coating sections of internal surfaces
KR101514479B1 (en) 2008-03-12 2015-04-22 알리투스 코포레이션 에스.에이. Plasma system
EP2286001A4 (en) 2008-05-13 2011-10-19 Sub One Technology Inc Method of coating inner and outer surfaces of pipes for thermal solar and other applications
US8715789B2 (en) 2009-12-18 2014-05-06 Sub-One Technology, Inc. Chemical vapor deposition for an interior of a hollow article with high aspect ratio
US9765726B2 (en) * 2013-03-13 2017-09-19 Federal-Mogul Cylinder liners with adhesive metallic layers and methods of forming the cylinder liners

Also Published As

Publication number Publication date
GB2030180A (en) 1980-04-02

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19940720