CN1831478B - 用于制造振动陀螺传感器和振动元件的方法 - Google Patents

用于制造振动陀螺传感器和振动元件的方法 Download PDF

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Publication number
CN1831478B
CN1831478B CN2006100747373A CN200610074737A CN1831478B CN 1831478 B CN1831478 B CN 1831478B CN 2006100747373 A CN2006100747373 A CN 2006100747373A CN 200610074737 A CN200610074737 A CN 200610074737A CN 1831478 B CN1831478 B CN 1831478B
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China
Prior art keywords
layer
vibrator
forming
vibrating
substrate
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Expired - Fee Related
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CN2006100747373A
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Chinese (zh)
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CN1831478A (zh
Inventor
稻熊辉往
本多顺一
铃木浩二
高桥和夫
中盐荣治
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Sony Corp
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Sony Corp
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V15/00—Protecting lighting devices from damage
    • F21V15/01—Housings, e.g. material or assembling of housing parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V1/00—Shades for light sources, i.e. lampshades for table, floor, wall or ceiling lamps
    • F21V1/14—Covers for frames; Frameless shades
    • F21V1/16—Covers for frames; Frameless shades characterised by the material
    • F21V1/22—Covers for frames; Frameless shades characterised by the material the material being plastics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V1/00—Shades for light sources, i.e. lampshades for table, floor, wall or ceiling lamps
    • F21V1/14—Covers for frames; Frameless shades
    • F21V1/16—Covers for frames; Frameless shades characterised by the material
    • F21V1/24—Covers for frames; Frameless shades characterised by the material the material being metal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V17/00—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
    • F21V17/10—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages characterised by specific fastening means or way of fastening
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V19/00—Fastening of light sources or lamp holders
    • F21V19/0075—Fastening of light sources or lamp holders of tubular light sources, e.g. ring-shaped fluorescent light sources
    • F21V19/008—Fastening of light sources or lamp holders of tubular light sources, e.g. ring-shaped fluorescent light sources of straight tubular light sources, e.g. straight fluorescent tubes, soffit lamps
    • F21V19/0085—Fastening of light sources or lamp holders of tubular light sources, e.g. ring-shaped fluorescent light sources of straight tubular light sources, e.g. straight fluorescent tubes, soffit lamps at least one conductive element acting as a support means, e.g. resilient contact blades, piston-like contact
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0285—Vibration sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Gyroscopes (AREA)
CN2006100747373A 2005-02-28 2006-02-28 用于制造振动陀螺传感器和振动元件的方法 Expired - Fee Related CN1831478B (zh)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP2005054844 2005-02-28
JP054844/05 2005-02-28
JP2005080473 2005-03-18
JP080473/05 2005-03-18
JP2005176870 2005-06-16
JP2005176869 2005-06-16
JP176870/05 2005-06-16
JP176869/05 2005-06-16
JP374324/05 2005-12-27
JP2005374324A JP5135683B2 (ja) 2005-02-28 2005-12-27 振動型ジャイロセンサ及び振動素子の製造方法

Publications (2)

Publication Number Publication Date
CN1831478A CN1831478A (zh) 2006-09-13
CN1831478B true CN1831478B (zh) 2013-06-12

Family

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Family Applications (1)

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CN2006100747373A Expired - Fee Related CN1831478B (zh) 2005-02-28 2006-02-28 用于制造振动陀螺传感器和振动元件的方法

Country Status (5)

Country Link
US (1) US7723901B2 (enExample)
EP (1) EP1696206B1 (enExample)
JP (1) JP5135683B2 (enExample)
KR (1) KR20060095517A (enExample)
CN (1) CN1831478B (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
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WO2020050946A1 (en) * 2018-09-04 2020-03-12 Mueller International, Llc Hydrant cap leak detector with oriented sensor
US11590376B2 (en) 2010-06-16 2023-02-28 Mueller International, Llc Infrastructure monitoring devices, systems, and methods
US12084844B2 (en) 2020-05-14 2024-09-10 Mueller International, Llc Hydrant nozzle cap adapter

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JP2006284551A (ja) * 2005-02-23 2006-10-19 Sony Corp 振動型ジャイロセンサ
JP2006250583A (ja) * 2005-03-08 2006-09-21 Sony Corp 振動型ジャイロセンサ
GB2439606B (en) * 2006-06-29 2011-08-17 C Mac Quartz Crystals Ltd An oscillator
JP2008224628A (ja) * 2007-03-15 2008-09-25 Sony Corp 角速度センサ及び電子機器
JP5328007B2 (ja) * 2007-03-30 2013-10-30 パナソニック株式会社 圧電体素子及びその製造方法
JP4640459B2 (ja) * 2008-07-04 2011-03-02 ソニー株式会社 角速度センサ
US20100100083A1 (en) * 2008-10-22 2010-04-22 Scott Lundahl Method of treatment for dermatologic disorders
JP4778548B2 (ja) * 2008-12-17 2011-09-21 日本電波工業株式会社 圧電フレーム、圧電デバイス及び圧電フレームの製造方法
JP5206709B2 (ja) * 2009-03-18 2013-06-12 株式会社豊田中央研究所 可動体を備えている装置
US20110001394A1 (en) * 2009-07-02 2011-01-06 Eta Sa Piezoelectric thin-film tuning fork resonator
EP2519084A4 (en) * 2009-12-24 2014-01-22 Furukawa Electric Co Ltd MOUNTING STRUCTURE FOR AN INJECTION MOLDED SUBSTRATE AND FOR A FITTING COMPONENT
JP5506035B2 (ja) * 2010-02-23 2014-05-28 富士フイルム株式会社 アクチュエータの製造方法
JP4905574B2 (ja) * 2010-03-25 2012-03-28 株式会社豊田中央研究所 可動部分を備えている積層構造体
JP5765087B2 (ja) * 2011-06-27 2015-08-19 セイコーエプソン株式会社 屈曲振動片、その製造方法及び電子機器
US9291520B2 (en) 2011-08-12 2016-03-22 Mueller International, Llc Fire hydrant leak detector
JP5982896B2 (ja) * 2012-03-13 2016-08-31 セイコーエプソン株式会社 センサー素子、センサーデバイスおよび電子機器
CN103369423A (zh) * 2013-07-25 2013-10-23 瑞声科技（南京）有限公司 入耳式耳机
DE102014101372B4 (de) * 2014-02-04 2015-10-08 Vega Grieshaber Kg Vibrationssensor mit geklebtem Antrieb
JP6519995B2 (ja) * 2014-06-30 2019-05-29 セイコーエプソン株式会社 振動素子、振動素子の製造方法、振動子、ジャイロセンサー、電子機器および移動体
JP6507565B2 (ja) * 2014-10-28 2019-05-08 セイコーエプソン株式会社 電子デバイス、電子機器および移動体
US10305178B2 (en) 2016-02-12 2019-05-28 Mueller International, Llc Nozzle cap multi-band antenna assembly
US10283857B2 (en) 2016-02-12 2019-05-07 Mueller International, Llc Nozzle cap multi-band antenna assembly
JP6759696B2 (ja) * 2016-05-13 2020-09-23 Tdk株式会社 レンズ駆動装置
JP6819216B2 (ja) * 2016-10-26 2021-01-27 セイコーエプソン株式会社 ジャイロセンサー、ジャイロセンサーの製造方法、電子機器および移動体
DE102017206388A1 (de) * 2017-04-13 2018-10-18 Robert Bosch Gmbh Verfahren zum Schutz einer MEMS-Einheit vor Infrarot-Untersuchungen sowie MEMS-Einheit
US11342656B2 (en) 2018-12-28 2022-05-24 Mueller International, Llc Nozzle cap encapsulated antenna system
US11473993B2 (en) 2019-05-31 2022-10-18 Mueller International, Llc Hydrant nozzle cap
CN114743935B (zh) * 2022-04-11 2024-08-30 中国工程物理研究院电子工程研究所 一种改善大功率器件封装互连层缺陷的方法
DE102023202097A1 (de) * 2023-03-09 2024-09-12 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren und Vorrichtung zum Herstellen eines MEMS-Bauelementes

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CN1447094A (zh) * 2002-03-25 2003-10-08 株式会社村田制作所 振动陀螺及使用该陀螺的电子装置

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US5765046A (en) * 1994-08-31 1998-06-09 Nikon Corporation Piezoelectric vibration angular velocity meter and camera using the same
EP1146533A1 (en) * 1998-12-22 2001-10-17 NEC Corporation Micromachine switch and its production method
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11590376B2 (en) 2010-06-16 2023-02-28 Mueller International, Llc Infrastructure monitoring devices, systems, and methods
WO2020050946A1 (en) * 2018-09-04 2020-03-12 Mueller International, Llc Hydrant cap leak detector with oriented sensor
US12084844B2 (en) 2020-05-14 2024-09-10 Mueller International, Llc Hydrant nozzle cap adapter

Also Published As

Publication number Publication date
US7723901B2 (en) 2010-05-25
EP1696206B1 (en) 2011-10-26
US20060202591A1 (en) 2006-09-14
JP5135683B2 (ja) 2013-02-06
EP1696206A1 (en) 2006-08-30
KR20060095517A (ko) 2006-08-31
CN1831478A (zh) 2006-09-13
JP2007024861A (ja) 2007-02-01

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Granted publication date: 20130612