JP5135683B2 - 振動型ジャイロセンサ及び振動素子の製造方法 - Google Patents

振動型ジャイロセンサ及び振動素子の製造方法 Download PDF

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Publication number
JP5135683B2
JP5135683B2 JP2005374324A JP2005374324A JP5135683B2 JP 5135683 B2 JP5135683 B2 JP 5135683B2 JP 2005374324 A JP2005374324 A JP 2005374324A JP 2005374324 A JP2005374324 A JP 2005374324A JP 5135683 B2 JP5135683 B2 JP 5135683B2
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JP
Japan
Prior art keywords
vibration
vibrator
layer
gyro sensor
vibration element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005374324A
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English (en)
Japanese (ja)
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JP2007024861A (ja
JP2007024861A5 (enExample
Inventor
輝往 稲熊
浩二 鈴木
和夫 高橋
順一 本多
栄治 中塩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2005374324A priority Critical patent/JP5135683B2/ja
Priority to EP20060003942 priority patent/EP1696206B1/en
Priority to US11/363,395 priority patent/US7723901B2/en
Priority to KR20060019298A priority patent/KR20060095517A/ko
Priority to CN2006100747373A priority patent/CN1831478B/zh
Publication of JP2007024861A publication Critical patent/JP2007024861A/ja
Publication of JP2007024861A5 publication Critical patent/JP2007024861A5/ja
Application granted granted Critical
Publication of JP5135683B2 publication Critical patent/JP5135683B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V15/00—Protecting lighting devices from damage
    • F21V15/01—Housings, e.g. material or assembling of housing parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V1/00—Shades for light sources, i.e. lampshades for table, floor, wall or ceiling lamps
    • F21V1/14—Covers for frames; Frameless shades
    • F21V1/16—Covers for frames; Frameless shades characterised by the material
    • F21V1/22—Covers for frames; Frameless shades characterised by the material the material being plastics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V1/00—Shades for light sources, i.e. lampshades for table, floor, wall or ceiling lamps
    • F21V1/14—Covers for frames; Frameless shades
    • F21V1/16—Covers for frames; Frameless shades characterised by the material
    • F21V1/24—Covers for frames; Frameless shades characterised by the material the material being metal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V17/00—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
    • F21V17/10—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages characterised by specific fastening means or way of fastening
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V19/00—Fastening of light sources or lamp holders
    • F21V19/0075—Fastening of light sources or lamp holders of tubular light sources, e.g. ring-shaped fluorescent light sources
    • F21V19/008—Fastening of light sources or lamp holders of tubular light sources, e.g. ring-shaped fluorescent light sources of straight tubular light sources, e.g. straight fluorescent tubes, soffit lamps
    • F21V19/0085—Fastening of light sources or lamp holders of tubular light sources, e.g. ring-shaped fluorescent light sources of straight tubular light sources, e.g. straight fluorescent tubes, soffit lamps at least one conductive element acting as a support means, e.g. resilient contact blades, piston-like contact
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0285—Vibration sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Gyroscopes (AREA)
JP2005374324A 2005-02-28 2005-12-27 振動型ジャイロセンサ及び振動素子の製造方法 Expired - Fee Related JP5135683B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005374324A JP5135683B2 (ja) 2005-02-28 2005-12-27 振動型ジャイロセンサ及び振動素子の製造方法
EP20060003942 EP1696206B1 (en) 2005-02-28 2006-02-27 Method for manufacturing vibrating gyrosensor
US11/363,395 US7723901B2 (en) 2005-02-28 2006-02-27 Vibrating gyrosensor and vibrating element
KR20060019298A KR20060095517A (ko) 2005-02-28 2006-02-28 진동형 자이로센서 및 진동 소자의 제조 방법
CN2006100747373A CN1831478B (zh) 2005-02-28 2006-02-28 用于制造振动陀螺传感器和振动元件的方法

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP2005054844 2005-02-28
JP2005054844 2005-02-28
JP2005080473 2005-03-18
JP2005080473 2005-03-18
JP2005176869 2005-06-16
JP2005176870 2005-06-16
JP2005176869 2005-06-16
JP2005176870 2005-06-16
JP2005374324A JP5135683B2 (ja) 2005-02-28 2005-12-27 振動型ジャイロセンサ及び振動素子の製造方法

Publications (3)

Publication Number Publication Date
JP2007024861A JP2007024861A (ja) 2007-02-01
JP2007024861A5 JP2007024861A5 (enExample) 2009-02-19
JP5135683B2 true JP5135683B2 (ja) 2013-02-06

Family

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JP2005374324A Expired - Fee Related JP5135683B2 (ja) 2005-02-28 2005-12-27 振動型ジャイロセンサ及び振動素子の製造方法

Country Status (5)

Country Link
US (1) US7723901B2 (enExample)
EP (1) EP1696206B1 (enExample)
JP (1) JP5135683B2 (enExample)
KR (1) KR20060095517A (enExample)
CN (1) CN1831478B (enExample)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006284551A (ja) * 2005-02-23 2006-10-19 Sony Corp 振動型ジャイロセンサ
JP2006250583A (ja) * 2005-03-08 2006-09-21 Sony Corp 振動型ジャイロセンサ
GB2439606B (en) * 2006-06-29 2011-08-17 C Mac Quartz Crystals Ltd An oscillator
JP2008224628A (ja) * 2007-03-15 2008-09-25 Sony Corp 角速度センサ及び電子機器
JP5328007B2 (ja) * 2007-03-30 2013-10-30 パナソニック株式会社 圧電体素子及びその製造方法
JP4640459B2 (ja) * 2008-07-04 2011-03-02 ソニー株式会社 角速度センサ
US20100100083A1 (en) * 2008-10-22 2010-04-22 Scott Lundahl Method of treatment for dermatologic disorders
JP4778548B2 (ja) * 2008-12-17 2011-09-21 日本電波工業株式会社 圧電フレーム、圧電デバイス及び圧電フレームの製造方法
JP5206709B2 (ja) * 2009-03-18 2013-06-12 株式会社豊田中央研究所 可動体を備えている装置
US20110001394A1 (en) * 2009-07-02 2011-01-06 Eta Sa Piezoelectric thin-film tuning fork resonator
EP2519084A4 (en) * 2009-12-24 2014-01-22 Furukawa Electric Co Ltd ASSEMBLY STRUCTURE FOR INJECTION MOLDED SUBSTRATE AND MOUNTING COMPONENT
JP5506035B2 (ja) * 2010-02-23 2014-05-28 富士フイルム株式会社 アクチュエータの製造方法
JP4905574B2 (ja) * 2010-03-25 2012-03-28 株式会社豊田中央研究所 可動部分を備えている積層構造体
US8931505B2 (en) 2010-06-16 2015-01-13 Gregory E. HYLAND Infrastructure monitoring devices, systems, and methods
JP5765087B2 (ja) * 2011-06-27 2015-08-19 セイコーエプソン株式会社 屈曲振動片、その製造方法及び電子機器
US9291520B2 (en) 2011-08-12 2016-03-22 Mueller International, Llc Fire hydrant leak detector
JP5982896B2 (ja) * 2012-03-13 2016-08-31 セイコーエプソン株式会社 センサー素子、センサーデバイスおよび電子機器
CN103369423A (zh) * 2013-07-25 2013-10-23 瑞声科技（南京）有限公司 入耳式耳机
DE102014101372B4 (de) * 2014-02-04 2015-10-08 Vega Grieshaber Kg Vibrationssensor mit geklebtem Antrieb
JP6519995B2 (ja) * 2014-06-30 2019-05-29 セイコーエプソン株式会社 振動素子、振動素子の製造方法、振動子、ジャイロセンサー、電子機器および移動体
JP6507565B2 (ja) * 2014-10-28 2019-05-08 セイコーエプソン株式会社 電子デバイス、電子機器および移動体
US10283857B2 (en) 2016-02-12 2019-05-07 Mueller International, Llc Nozzle cap multi-band antenna assembly
US10305178B2 (en) 2016-02-12 2019-05-28 Mueller International, Llc Nozzle cap multi-band antenna assembly
JP6759696B2 (ja) * 2016-05-13 2020-09-23 Tdk株式会社 レンズ駆動装置
JP6819216B2 (ja) * 2016-10-26 2021-01-27 セイコーエプソン株式会社 ジャイロセンサー、ジャイロセンサーの製造方法、電子機器および移動体
DE102017206388A1 (de) * 2017-04-13 2018-10-18 Robert Bosch Gmbh Verfahren zum Schutz einer MEMS-Einheit vor Infrarot-Untersuchungen sowie MEMS-Einheit
US10859462B2 (en) * 2018-09-04 2020-12-08 Mueller International, Llc Hydrant cap leak detector with oriented sensor
US11342656B2 (en) 2018-12-28 2022-05-24 Mueller International, Llc Nozzle cap encapsulated antenna system
US11473993B2 (en) 2019-05-31 2022-10-18 Mueller International, Llc Hydrant nozzle cap
US11542690B2 (en) 2020-05-14 2023-01-03 Mueller International, Llc Hydrant nozzle cap adapter
CN114743935B (zh) * 2022-04-11 2024-08-30 中国工程物理研究院电子工程研究所 一种改善大功率器件封装互连层缺陷的方法
DE102023202097A1 (de) * 2023-03-09 2024-09-12 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren und Vorrichtung zum Herstellen eines MEMS-Bauelementes

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4494409A (en) * 1981-05-29 1985-01-22 Kabushiki Kaisha Toyota Chuo Kenkyusho Engine vibration sensor
JPS638565A (ja) 1986-06-27 1988-01-14 Mitsubishi Electric Corp 半導体加速度検出装置
JPH0623782B2 (ja) 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
JPH04315056A (ja) * 1991-04-12 1992-11-06 Tokai Rika Co Ltd 加速度センサ
JP3218813B2 (ja) * 1993-02-03 2001-10-15 松下電器産業株式会社 角速度センサおよびその製造方法
JPH07113643A (ja) 1993-10-15 1995-05-02 Nikon Corp 圧電振動角速度計
US5802684A (en) * 1993-09-14 1998-09-08 Nikon Corporation Process for producing a vibration angular-velocity sensor
US5539270A (en) * 1993-11-19 1996-07-23 Matsushita Electric Works, Ltd. Acceleration detector
JPH07299905A (ja) * 1994-05-09 1995-11-14 Fujitsu Ltd インクジェットヘッド及びその製造方法
US5765046A (en) * 1994-08-31 1998-06-09 Nikon Corporation Piezoelectric vibration angular velocity meter and camera using the same
SE9500729L (sv) * 1995-02-27 1996-08-28 Gert Andersson Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan
JP3682664B2 (ja) * 1995-10-27 2005-08-10 Ｎｅｃトーキン株式会社 圧電振動ジャイロ
JP3599880B2 (ja) * 1996-03-12 2004-12-08 オリンパス株式会社 カンチレバーチップ
JPH1019574A (ja) * 1996-06-27 1998-01-23 Nikon Corp 圧電振動角速度計の製造方法
JPH10339638A (ja) * 1997-06-06 1998-12-22 Murata Mfg Co Ltd 角速度センサ
JP2000055666A (ja) * 1998-08-03 2000-02-25 Nippon Soken Inc 角速度センサ及びその製造方法
JP3796991B2 (ja) * 1998-12-10 2006-07-12 株式会社デンソー 角速度センサ
JP3119255B2 (ja) 1998-12-22 2000-12-18 日本電気株式会社 マイクロマシンスイッチおよびその製造方法
JP2000292175A (ja) * 1999-04-12 2000-10-20 Denso Corp 角速度センサおよびその製造方法
EP1083404B1 (en) * 1999-09-08 2008-01-30 Alps Electric Co., Ltd. Gyroscope and input apparatus using the same
JP3771100B2 (ja) 2000-01-19 2006-04-26 アルプス電気株式会社 静電容量検出型センサおよびジャイロスコープならびに入力装置
JP2003028649A (ja) * 2001-05-11 2003-01-29 Murata Mfg Co Ltd センサ回路モジュールおよびそれを用いた電子装置
JP2003207338A (ja) * 2002-01-15 2003-07-25 Ngk Insulators Ltd 振動型ジャイロスコープ用振動子および振動型ジャイロスコープ
JP3687619B2 (ja) * 2002-03-25 2005-08-24 株式会社村田製作所 振動ジャイロおよびそれを用いた電子装置
JP2004132792A (ja) * 2002-10-09 2004-04-30 Toyota Motor Corp センサユニットの構造
JP2004361115A (ja) * 2003-06-02 2004-12-24 Denso Corp 半導体力学量センサ
JP4281451B2 (ja) * 2003-07-17 2009-06-17 株式会社大真空 圧電振動片および圧電振動子
JP4478495B2 (ja) * 2004-03-31 2010-06-09 ソニー株式会社 振動型ジャイロセンサ素子及びその製造方法
EP1626283B1 (en) * 2004-08-13 2011-03-23 STMicroelectronics Srl Micro-electromechanical structure, in particular accelerometer, with improved insensitivity to thermomechanical stresses
JP5037819B2 (ja) * 2005-03-04 2012-10-03 ソニー株式会社 電子機器

Also Published As

Publication number Publication date
EP1696206A1 (en) 2006-08-30
US7723901B2 (en) 2010-05-25
CN1831478B (zh) 2013-06-12
JP2007024861A (ja) 2007-02-01
CN1831478A (zh) 2006-09-13
EP1696206B1 (en) 2011-10-26
KR20060095517A (ko) 2006-08-31
US20060202591A1 (en) 2006-09-14

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