CN1231334C - 在切割机上找正工件的方法 - Google Patents

在切割机上找正工件的方法 Download PDF

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Publication number
CN1231334C
CN1231334C CNB021584346A CN02158434A CN1231334C CN 1231334 C CN1231334 C CN 1231334C CN B021584346 A CNB021584346 A CN B021584346A CN 02158434 A CN02158434 A CN 02158434A CN 1231334 C CN1231334 C CN 1231334C
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CN
China
Prior art keywords
along
axis
cutter sweep
pair
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB021584346A
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English (en)
Chinese (zh)
Other versions
CN1417008A (zh
Inventor
上野刚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Corp
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Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of CN1417008A publication Critical patent/CN1417008A/zh
Application granted granted Critical
Publication of CN1231334C publication Critical patent/CN1231334C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/029—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a plurality of cutting blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0088—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being angularly adjustable
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/04—Processes
    • Y10T83/05—With reorientation of tool between cuts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Dicing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CNB021584346A 2001-11-09 2002-11-09 在切割机上找正工件的方法 Expired - Lifetime CN1231334C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP344118/2001 2001-11-09
JP2001344118A JP2003151920A (ja) 2001-11-09 2001-11-09 切削機における被加工物位置合わせ方法
JP344118/01 2001-11-09

Publications (2)

Publication Number Publication Date
CN1417008A CN1417008A (zh) 2003-05-14
CN1231334C true CN1231334C (zh) 2005-12-14

Family

ID=19157687

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB021584346A Expired - Lifetime CN1231334C (zh) 2001-11-09 2002-11-09 在切割机上找正工件的方法

Country Status (4)

Country Link
US (1) US20030089206A1 (enExample)
JP (1) JP2003151920A (enExample)
CN (1) CN1231334C (enExample)
TW (1) TWI296827B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4456421B2 (ja) * 2004-06-22 2010-04-28 株式会社ディスコ 加工装置
JP2006272862A (ja) * 2005-03-30 2006-10-12 Tdk Corp セラミックグリーンシートの切断装置及び切断方法
JP2008091476A (ja) * 2006-09-29 2008-04-17 Olympus Corp 外観検査装置
JP5249651B2 (ja) * 2008-07-02 2013-07-31 株式会社フジクラ 基板材料切断装置及びその方法
JP2011114070A (ja) * 2009-11-25 2011-06-09 Disco Abrasive Syst Ltd 加工装置
JP5724697B2 (ja) * 2011-07-08 2015-05-27 住友電装株式会社 コルゲートチューブの切断装置、および、切断されたコルゲートチューブの製造方法
JP6177075B2 (ja) * 2013-09-26 2017-08-09 株式会社ディスコ 加工方法
JP7045841B2 (ja) * 2017-12-08 2022-04-01 株式会社ディスコ 切削装置
JP6912745B1 (ja) * 2019-09-27 2021-08-04 株式会社東京精密 ダイシング装置及び方法
CN114941783A (zh) * 2022-05-07 2022-08-26 广东骏亚电子科技股份有限公司 一种复杂外形尺寸的检测方法

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4328553A (en) * 1976-12-07 1982-05-04 Computervision Corporation Method and apparatus for targetless wafer alignment
CH635769A5 (fr) * 1980-03-10 1983-04-29 Far Fab Assortiments Reunies Installation pour le sciage de plaques et dispositif de manutention pour une telle installation.
US4557599A (en) * 1984-03-06 1985-12-10 General Signal Corporation Calibration and alignment target plate
KR900001232B1 (ko) * 1984-12-27 1990-03-05 가부시끼 가이샤 디스코 반도체 웨이퍼 방형절단기
US4794736A (en) * 1985-12-27 1989-01-03 Citizen Watch Co., Ltd. Arrangement for mechanically and accurately processing a workpiece with a position detecting pattern or patterns
DK0613765T3 (da) * 1993-03-02 2000-04-03 Ceramtec Ag Fremgangsmåde til fremstilling af opdelelige plader af et sprødt materiale med stor nøjagtighed
JP2991593B2 (ja) * 1993-08-19 1999-12-20 株式会社東京精密 ダイシング装置の半導体ウェハ形状認識装置
US6152803A (en) * 1995-10-20 2000-11-28 Boucher; John N. Substrate dicing method
JP3223421B2 (ja) * 1996-08-13 2001-10-29 株式会社東京精密 ダイシング装置
US6006739A (en) * 1996-11-12 1999-12-28 Micron Technology, Inc. Method for sawing wafers employing multiple indexing techniques for multiple die dimensions
US6250192B1 (en) * 1996-11-12 2001-06-26 Micron Technology, Inc. Method for sawing wafers employing multiple indexing techniques for multiple die dimensions
US5803797A (en) * 1996-11-26 1998-09-08 Micron Technology, Inc. Method and apparatus to hold intergrated circuit chips onto a chuck and to simultaneously remove multiple intergrated circuit chips from a cutting chuck
US6102023A (en) * 1997-07-02 2000-08-15 Disco Corporation Precision cutting apparatus and cutting method using the same
JP3203364B2 (ja) * 1997-12-01 2001-08-27 株式会社東京精密 アライメント方法及びその装置
JP3203365B2 (ja) * 1997-12-02 2001-08-27 株式会社東京精密 ダイシング装置におけるワーク切断方法
JP3894526B2 (ja) * 1998-07-06 2007-03-22 株式会社ディスコ 切削装置
JP2000091285A (ja) * 1998-09-08 2000-03-31 Disco Abrasive Syst Ltd 半導体物品の研削方法
JP3485816B2 (ja) * 1998-12-09 2004-01-13 太陽誘電株式会社 ダイシング装置
JP4509243B2 (ja) * 1999-03-04 2010-07-21 株式会社ディスコ 積層被加工物の切削方法
US6413150B1 (en) * 1999-05-27 2002-07-02 Texas Instruments Incorporated Dual dicing saw blade assembly and process for separating devices arrayed a substrate
JP4447074B2 (ja) * 1999-06-21 2010-04-07 株式会社ディスコ 切削装置
JP3646781B2 (ja) * 1999-11-08 2005-05-11 株式会社東京精密 ダイシング方法及びダイシング装置のカーフチェック方法並びにカーフチェックシステム
JP2001308034A (ja) * 2000-04-19 2001-11-02 Disco Abrasive Syst Ltd 切削装置
JP4462717B2 (ja) * 2000-05-22 2010-05-12 株式会社ディスコ 回転ブレードの位置検出装置
JP2002237472A (ja) * 2001-02-07 2002-08-23 Disco Abrasive Syst Ltd 被加工物の切削方法

Also Published As

Publication number Publication date
TWI296827B (en) 2008-05-11
US20030089206A1 (en) 2003-05-15
JP2003151920A (ja) 2003-05-23
CN1417008A (zh) 2003-05-14
TW200300273A (en) 2003-05-16
HK1053623A1 (en) 2003-10-31

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Granted publication date: 20051214