DK0613765T3 - Fremgangsmåde til fremstilling af opdelelige plader af et sprødt materiale med stor nøjagtighed - Google Patents
Fremgangsmåde til fremstilling af opdelelige plader af et sprødt materiale med stor nøjagtighedInfo
- Publication number
- DK0613765T3 DK0613765T3 DK94102776T DK94102776T DK0613765T3 DK 0613765 T3 DK0613765 T3 DK 0613765T3 DK 94102776 T DK94102776 T DK 94102776T DK 94102776 T DK94102776 T DK 94102776T DK 0613765 T3 DK0613765 T3 DK 0613765T3
- Authority
- DK
- Denmark
- Prior art keywords
- sheets
- high accuracy
- crisp material
- divisible
- producing
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
- B23Q1/52—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism a single rotating pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0097—Processing two or more printed circuits simultaneously, e.g. made from a common substrate, or temporarily stacked circuit boards
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T225/00—Severing by tearing or breaking
- Y10T225/10—Methods
- Y10T225/12—With preliminary weakening
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4306296 | 1993-03-02 | ||
DE4344383 | 1993-12-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
DK0613765T3 true DK0613765T3 (da) | 2000-04-03 |
Family
ID=25923538
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK94102776T DK0613765T3 (da) | 1993-03-02 | 1994-02-24 | Fremgangsmåde til fremstilling af opdelelige plader af et sprødt materiale med stor nøjagtighed |
Country Status (4)
Country | Link |
---|---|
US (1) | US5626777A (da) |
EP (1) | EP0613765B1 (da) |
DE (1) | DE59408996D1 (da) |
DK (1) | DK0613765T3 (da) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997022430A1 (de) * | 1995-12-19 | 1997-06-26 | Bayerische Motoren Werke Aktiengesellschaft | Verfahren zur ausbildung einer anrissstelle zum bruchtrennen eines bauteils, insbesondere pleuel für brennkraftmaschinen |
TW353202B (en) * | 1997-02-28 | 1999-02-21 | Hewlett Packard Co | Scribe and break of hard-to-scribe materials |
DE19729922C1 (de) * | 1997-07-04 | 1999-01-21 | Fraunhofer Ges Forschung | Verfahren zur Herstellung metallisierter Diamant-Wärmespreizer |
US20060050109A1 (en) * | 2000-01-31 | 2006-03-09 | Le Hue P | Low bonding temperature and pressure ultrasonic bonding process for making a microfluid device |
US6464324B1 (en) | 2000-01-31 | 2002-10-15 | Picojet, Inc. | Microfluid device and ultrasonic bonding process |
DE10017691A1 (de) * | 2000-04-08 | 2001-10-11 | Bayerische Motoren Werke Ag | Verfahren zur Ausbildung einer Schwächungslinie in einem bruchtrennbaren Bauteil, insbesondere mit einer Lageranordnung |
US20020006765A1 (en) * | 2000-05-11 | 2002-01-17 | Thomas Michel | System for cutting brittle materials |
JP2003151920A (ja) * | 2001-11-09 | 2003-05-23 | Disco Abrasive Syst Ltd | 切削機における被加工物位置合わせ方法 |
US6960813B2 (en) * | 2002-06-10 | 2005-11-01 | New Wave Research | Method and apparatus for cutting devices from substrates |
US6806544B2 (en) | 2002-11-05 | 2004-10-19 | New Wave Research | Method and apparatus for cutting devices from conductive substrates secured during cutting by vacuum pressure |
US6580054B1 (en) * | 2002-06-10 | 2003-06-17 | New Wave Research | Scribing sapphire substrates with a solid state UV laser |
TWI248244B (en) * | 2003-02-19 | 2006-01-21 | J P Sercel Associates Inc | System and method for cutting using a variable astigmatic focal beam spot |
DE10327360B4 (de) * | 2003-06-16 | 2012-05-24 | Curamik Electronics Gmbh | Verfahren zum Herstellen eines Keramik-Metall-Substrates |
US20090293537A1 (en) * | 2008-05-27 | 2009-12-03 | Ameringer Greg E | NGL Extraction From Natural Gas |
KR20120098869A (ko) * | 2009-12-07 | 2012-09-05 | 제이피 서셀 어소시에트, 인코퍼레이티드 | 레이저 가공과 스크라이빙 시스템 및 방법 |
US20130256286A1 (en) * | 2009-12-07 | 2013-10-03 | Ipg Microsystems Llc | Laser processing using an astigmatic elongated beam spot and using ultrashort pulses and/or longer wavelengths |
BE1024350B1 (nl) * | 2016-06-29 | 2018-02-05 | C-Mac Electromag Bvba | Geautomatiseerd systeem voor het singuleren van schakelingen uit DBC-substraten, en werkwijze daarvoor |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2978804A (en) * | 1958-08-13 | 1961-04-11 | Sylvania Electric Prod | Method of classifying non-magnetic elements |
NL299821A (da) * | 1962-10-31 | 1900-01-01 | ||
US3556366A (en) * | 1969-05-01 | 1971-01-19 | Teletype Corp | Methods of severing materials employing a thermal shock |
US3687345A (en) * | 1970-11-23 | 1972-08-29 | Signetics Corp | Method and apparatus for aligning and breaking wafers |
US3814895A (en) * | 1971-12-27 | 1974-06-04 | Electroglas Inc | Laser scriber control system |
NL7609815A (nl) * | 1976-09-03 | 1978-03-07 | Philips Nv | Werkwijze voor het vervaardigen van een half- geleiderinrichting en halfgeleiderinrichting vervaardigd met behulp van de werkwijze. |
US4352446A (en) * | 1978-09-11 | 1982-10-05 | Mti Systems Corporation | Substrate separating machine and method |
DE3404128C1 (de) * | 1984-02-07 | 1985-09-05 | Maschinen- und Stahlbau Julius Lippert GmbH & Co, 8487 Pressath | Numerisch gesteuerte Maschine zum Bearbeiten des Randes eines Keramikgegenstandes |
US4629378A (en) * | 1984-08-27 | 1986-12-16 | Parsons John T | Meltable matrix chucking machining center and process using |
JP2633309B2 (ja) * | 1988-07-07 | 1997-07-23 | ローム 株式会社 | チップ部品用セラミック製基板 |
US4918284A (en) * | 1988-10-14 | 1990-04-17 | Teradyne Laser Systems, Inc. | Calibrating laser trimming apparatus |
US5063280A (en) * | 1989-07-24 | 1991-11-05 | Canon Kabushiki Kaisha | Method and apparatus for forming holes into printed circuit board |
US5214261A (en) * | 1990-09-10 | 1993-05-25 | Rockwell International Corporation | Method and apparatus for dicing semiconductor substrates using an excimer laser beam |
-
1994
- 1994-02-24 DE DE59408996T patent/DE59408996D1/de not_active Expired - Lifetime
- 1994-02-24 DK DK94102776T patent/DK0613765T3/da active
- 1994-02-24 EP EP94102776A patent/EP0613765B1/de not_active Expired - Lifetime
- 1994-03-01 US US08/203,417 patent/US5626777A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0613765A1 (de) | 1994-09-07 |
DE59408996D1 (de) | 2000-01-20 |
EP0613765B1 (de) | 1999-12-15 |
US5626777A (en) | 1997-05-06 |
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