DK0509342T3 - Fremgangsmåde til fremstilling af kileformede strukturer - Google Patents
Fremgangsmåde til fremstilling af kileformede strukturerInfo
- Publication number
- DK0509342T3 DK0509342T3 DK92105756T DK92105756T DK0509342T3 DK 0509342 T3 DK0509342 T3 DK 0509342T3 DK 92105756 T DK92105756 T DK 92105756T DK 92105756 T DK92105756 T DK 92105756T DK 0509342 T3 DK0509342 T3 DK 0509342T3
- Authority
- DK
- Denmark
- Prior art keywords
- shaped structures
- manufacturing wedge
- wedge
- manufacturing
- structures
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
- G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12195—Tapering
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Measurement Of Radiation (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19914111783 DE4111783C1 (da) | 1991-04-11 | 1991-04-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
DK0509342T3 true DK0509342T3 (da) | 1996-07-15 |
Family
ID=6429332
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK92105756T DK0509342T3 (da) | 1991-04-11 | 1992-04-03 | Fremgangsmåde til fremstilling af kileformede strukturer |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0509342B1 (da) |
DE (2) | DE4111783C1 (da) |
DK (1) | DK0509342T3 (da) |
ES (1) | ES2083014T3 (da) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994015231A1 (de) * | 1992-12-29 | 1994-07-07 | Tomas Brenner | Verfahren zur herstellung optischer modenformadapter |
JPH07333450A (ja) * | 1994-06-08 | 1995-12-22 | Hoechst Japan Ltd | 光結合用導波路の形成方法及び光結合用導波路を有する光導波路素子 |
DE19518185C2 (de) * | 1995-05-21 | 2000-02-17 | Juergen Gspann | Verfahren zur Agglomeratstrahl-Mikrostrukturierung |
DE19607671B4 (de) * | 1996-02-29 | 2004-08-26 | INSTITUT FüR MIKROTECHNIK MAINZ GMBH | Verfahren zur Herstellung optischer Bauelemente mit angekoppelten Lichtwellenleitern und nach diesem Verfahren hergestellte Bauelemente |
DE19613745B4 (de) * | 1996-04-01 | 2004-02-26 | Forschungsverbund Berlin E.V. | Verfahren zur Herstellung anamorphotischer mikrooptischer Arrays und damit ausgestattete Faserlinse |
DE19833756A1 (de) * | 1998-07-16 | 2000-01-27 | Hertz Inst Heinrich | Anordnung zur Herstellung vertikaler Strukturen in Halbleitermaterialien |
US6922287B2 (en) * | 2001-10-12 | 2005-07-26 | Unaxis Balzers Aktiengesellschaft | Light coupling element |
JP4219668B2 (ja) | 2001-12-13 | 2009-02-04 | パナソニック株式会社 | フォトニック結晶の作製方法及び光デバイス作製方法 |
DE10351034A1 (de) * | 2003-10-31 | 2005-06-09 | Infineon Technologies Ag | Verfahren zum Ausbilden eines keilförmigen Werkstücks |
CN104597550B (zh) * | 2015-02-02 | 2017-05-31 | 上海理工大学 | 一种线性渐变滤光片中间楔形谐振腔层的制备方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2416029A1 (de) * | 1974-04-02 | 1975-10-23 | Siemens Ag | Verfahren zur herstellung keilfoermiger vertiefungen oder flaechen mit kleinem neigungswinkel in einer festkoerperoberflaeche |
US4092166A (en) * | 1976-12-27 | 1978-05-30 | International Business Machines Corporation | Double exposure and double etch technique for producing precision parts from crystallizable photosensitive glass |
JPS53106151A (en) * | 1977-02-28 | 1978-09-14 | Nec Corp | Preparation of optical conjunction device of integrated taper type |
EP0059304B1 (en) * | 1978-07-18 | 1985-10-23 | Nippon Telegraph And Telephone Corporation | A method of manufacturing a curved diffraction grating structure |
DD251212A1 (de) * | 1981-12-01 | 1987-11-04 | Peter Voigt | Verfahren zur herstellung von wellenleitern fuer stirnflaecheneinkopplung |
US4970600A (en) * | 1989-04-04 | 1990-11-13 | Melco Industries, Inc. | Laser engraver with X-Y assembly and cut control |
US4940881A (en) * | 1989-09-28 | 1990-07-10 | Tamarack Scientific Co., Inc. | Method and apparatus for effecting selective ablation of a coating from a substrate, and controlling the wall angle of coating edge portions |
-
1991
- 1991-04-11 DE DE19914111783 patent/DE4111783C1/de not_active Expired - Lifetime
-
1992
- 1992-04-03 EP EP92105756A patent/EP0509342B1/de not_active Expired - Lifetime
- 1992-04-03 DK DK92105756T patent/DK0509342T3/da active
- 1992-04-03 ES ES92105756T patent/ES2083014T3/es not_active Expired - Lifetime
- 1992-04-03 DE DE59205061T patent/DE59205061D1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0509342A3 (en) | 1993-09-15 |
EP0509342B1 (de) | 1996-01-17 |
DE59205061D1 (de) | 1996-02-29 |
EP0509342A2 (de) | 1992-10-21 |
DE4111783C1 (da) | 1992-05-27 |
ES2083014T3 (es) | 1996-04-01 |
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