CN1211287C - 铟锡氧化物的悬浮液和粉末的制备方法及其用途 - Google Patents

铟锡氧化物的悬浮液和粉末的制备方法及其用途 Download PDF

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Publication number
CN1211287C
CN1211287C CNB998100889A CN99810088A CN1211287C CN 1211287 C CN1211287 C CN 1211287C CN B998100889 A CNB998100889 A CN B998100889A CN 99810088 A CN99810088 A CN 99810088A CN 1211287 C CN1211287 C CN 1211287C
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CN
China
Prior art keywords
indium
powder
indium tin
carries out
precipitation
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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CNB998100889A
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English (en)
Chinese (zh)
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CN1314871A (zh
Inventor
拉尔夫·诺宁格
克里斯琴·戈伯特
赫尔穆特·施米特
罗伯特·德拉姆
斯蒂芬·塞普尔
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Leibniz Institut fuer Neue Materialien Gemeinnuetzige GmbH
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Leibniz Institut fuer Neue Materialien Gemeinnuetzige GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Priority claimed from DE1998140527 external-priority patent/DE19840527B4/de
Priority claimed from DE1998149048 external-priority patent/DE19849048A1/de
Application filed by Leibniz Institut fuer Neue Materialien Gemeinnuetzige GmbH filed Critical Leibniz Institut fuer Neue Materialien Gemeinnuetzige GmbH
Publication of CN1314871A publication Critical patent/CN1314871A/zh
Application granted granted Critical
Publication of CN1211287C publication Critical patent/CN1211287C/zh
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G19/00—Compounds of tin
    • C01G19/02—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G19/00—Compounds of tin
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/256—Heavy metal or aluminum or compound thereof

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Catalysts (AREA)
  • Non-Insulated Conductors (AREA)
  • Surface Treatment Of Glass (AREA)
  • Paints Or Removers (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Conductive Materials (AREA)
CNB998100889A 1998-09-06 1999-09-03 铟锡氧化物的悬浮液和粉末的制备方法及其用途 Expired - Lifetime CN1211287C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE1998140527 DE19840527B4 (de) 1998-09-06 1998-09-06 Verfahren zur Herstellung von Suspensionen und Pulvern von Indium-Zinn-Oxid
DE19840527.8 1998-09-06
DE19849048.8 1998-10-23
DE1998149048 DE19849048A1 (de) 1998-10-23 1998-10-23 Verfahren zur Herstellung von Suspensionen und Pulvern von Indium-Zinn-Oxid und deren Verwendung

Publications (2)

Publication Number Publication Date
CN1314871A CN1314871A (zh) 2001-09-26
CN1211287C true CN1211287C (zh) 2005-07-20

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNB998100889A Expired - Lifetime CN1211287C (zh) 1998-09-06 1999-09-03 铟锡氧化物的悬浮液和粉末的制备方法及其用途

Country Status (10)

Country Link
US (1) US6533966B1 (enExample)
EP (1) EP1113992B1 (enExample)
JP (1) JP4488623B2 (enExample)
KR (1) KR100737657B1 (enExample)
CN (1) CN1211287C (enExample)
AT (1) ATE330908T1 (enExample)
DE (1) DE59913605D1 (enExample)
ES (1) ES2268881T3 (enExample)
PT (1) PT1113992E (enExample)
WO (1) WO2000014017A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103101966A (zh) * 2011-11-10 2013-05-15 财团法人工业技术研究院 氧化铟锡的回收方法

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Also Published As

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KR100737657B1 (ko) 2007-07-09
JP2002524374A (ja) 2002-08-06
WO2000014017A1 (de) 2000-03-16
EP1113992A1 (de) 2001-07-11
KR20010074957A (ko) 2001-08-09
CN1314871A (zh) 2001-09-26
ES2268881T3 (es) 2007-03-16
US6533966B1 (en) 2003-03-18
ATE330908T1 (de) 2006-07-15
PT1113992E (pt) 2006-09-29
EP1113992B1 (de) 2006-06-21
JP4488623B2 (ja) 2010-06-23
DE59913605D1 (de) 2006-08-03

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