PT1113992E - Processo para o fabrico de suspensoes e de pos a base de oxido de indio-estanho e a sua utilizacao - Google Patents

Processo para o fabrico de suspensoes e de pos a base de oxido de indio-estanho e a sua utilizacao

Info

Publication number
PT1113992E
PT1113992E PT99944597T PT99944597T PT1113992E PT 1113992 E PT1113992 E PT 1113992E PT 99944597 T PT99944597 T PT 99944597T PT 99944597 T PT99944597 T PT 99944597T PT 1113992 E PT1113992 E PT 1113992E
Authority
PT
Portugal
Prior art keywords
tin oxide
suspensions
indo
bas
pos
Prior art date
Application number
PT99944597T
Other languages
English (en)
Inventor
Nonninger Ralph
Goebbert Christian
Helmut Schmidt
Drumm Robert
Stefan Sepeur
Original Assignee
Leibniz Inst Neue Materialien
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE1998140527 external-priority patent/DE19840527B4/de
Priority claimed from DE1998149048 external-priority patent/DE19849048A1/de
Application filed by Leibniz Inst Neue Materialien filed Critical Leibniz Inst Neue Materialien
Publication of PT1113992E publication Critical patent/PT1113992E/pt

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01GCOMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G19/00Compounds of tin
    • C01G19/02Oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/086Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01GCOMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G19/00Compounds of tin
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3407Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/25Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/256Heavy metal or aluminum or compound thereof
PT99944597T 1998-09-06 1999-09-03 Processo para o fabrico de suspensoes e de pos a base de oxido de indio-estanho e a sua utilizacao PT1113992E (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1998140527 DE19840527B4 (de) 1998-09-06 1998-09-06 Verfahren zur Herstellung von Suspensionen und Pulvern von Indium-Zinn-Oxid
DE1998149048 DE19849048A1 (de) 1998-10-23 1998-10-23 Verfahren zur Herstellung von Suspensionen und Pulvern von Indium-Zinn-Oxid und deren Verwendung

Publications (1)

Publication Number Publication Date
PT1113992E true PT1113992E (pt) 2006-09-29

Family

ID=26048642

Family Applications (1)

Application Number Title Priority Date Filing Date
PT99944597T PT1113992E (pt) 1998-09-06 1999-09-03 Processo para o fabrico de suspensoes e de pos a base de oxido de indio-estanho e a sua utilizacao

Country Status (10)

Country Link
US (1) US6533966B1 (pt)
EP (1) EP1113992B1 (pt)
JP (1) JP4488623B2 (pt)
KR (1) KR100737657B1 (pt)
CN (1) CN1211287C (pt)
AT (1) ATE330908T1 (pt)
DE (1) DE59913605D1 (pt)
ES (1) ES2268881T3 (pt)
PT (1) PT1113992E (pt)
WO (1) WO2000014017A1 (pt)

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CN106676579B (zh) * 2017-01-05 2018-10-23 京东方科技集团股份有限公司 处理氧化锡铟刻蚀废液的方法
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Also Published As

Publication number Publication date
CN1211287C (zh) 2005-07-20
EP1113992B1 (de) 2006-06-21
ATE330908T1 (de) 2006-07-15
JP4488623B2 (ja) 2010-06-23
KR20010074957A (ko) 2001-08-09
US6533966B1 (en) 2003-03-18
EP1113992A1 (de) 2001-07-11
CN1314871A (zh) 2001-09-26
JP2002524374A (ja) 2002-08-06
WO2000014017A1 (de) 2000-03-16
KR100737657B1 (ko) 2007-07-09
DE59913605D1 (de) 2006-08-03
ES2268881T3 (es) 2007-03-16

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