CN1176567C - 制造多层布线板的方法 - Google Patents
制造多层布线板的方法 Download PDFInfo
- Publication number
- CN1176567C CN1176567C CNB008045410A CN00804541A CN1176567C CN 1176567 C CN1176567 C CN 1176567C CN B008045410 A CNB008045410 A CN B008045410A CN 00804541 A CN00804541 A CN 00804541A CN 1176567 C CN1176567 C CN 1176567C
- Authority
- CN
- China
- Prior art keywords
- layer
- wiring layer
- conductor
- metal
- cylindrical metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 50
- 229910052751 metal Inorganic materials 0.000 claims abstract description 334
- 239000002184 metal Substances 0.000 claims abstract description 334
- 238000005530 etching Methods 0.000 claims abstract description 78
- 238000007747 plating Methods 0.000 claims abstract description 22
- 239000010410 layer Substances 0.000 claims description 356
- 239000004020 conductor Substances 0.000 claims description 218
- 238000000034 method Methods 0.000 claims description 137
- 238000000576 coating method Methods 0.000 claims description 80
- 239000011248 coating agent Substances 0.000 claims description 79
- 239000011347 resin Substances 0.000 claims description 36
- 229920005989 resin Polymers 0.000 claims description 36
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 33
- 230000004888 barrier function Effects 0.000 claims description 32
- 229910052802 copper Inorganic materials 0.000 claims description 30
- 239000010949 copper Substances 0.000 claims description 30
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 28
- 230000015572 biosynthetic process Effects 0.000 claims description 28
- 238000007772 electroless plating Methods 0.000 claims description 25
- 230000007797 corrosion Effects 0.000 claims description 24
- 238000005260 corrosion Methods 0.000 claims description 24
- 239000011241 protective layer Substances 0.000 claims description 18
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 16
- 229910052759 nickel Inorganic materials 0.000 claims description 14
- 238000011161 development Methods 0.000 claims description 12
- 229910045601 alloy Inorganic materials 0.000 claims description 11
- 239000000956 alloy Substances 0.000 claims description 11
- 229910052763 palladium Inorganic materials 0.000 claims description 8
- 229910052703 rhodium Inorganic materials 0.000 claims description 8
- 239000010948 rhodium Substances 0.000 claims description 8
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 8
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 7
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 239000010931 gold Substances 0.000 claims description 7
- 239000012212 insulator Substances 0.000 claims description 7
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 claims description 7
- 229910052707 ruthenium Inorganic materials 0.000 claims description 7
- 229910052709 silver Inorganic materials 0.000 claims description 7
- 239000004332 silver Substances 0.000 claims description 7
- 238000005476 soldering Methods 0.000 claims description 7
- 229910052725 zinc Inorganic materials 0.000 claims description 7
- 239000011701 zinc Substances 0.000 claims description 7
- 239000003054 catalyst Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 description 34
- 239000010408 film Substances 0.000 description 21
- 238000000227 grinding Methods 0.000 description 16
- 239000011810 insulating material Substances 0.000 description 16
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 15
- 239000007788 liquid Substances 0.000 description 15
- 239000000243 solution Substances 0.000 description 15
- 238000010586 diagram Methods 0.000 description 13
- 238000007731 hot pressing Methods 0.000 description 11
- 238000003475 lamination Methods 0.000 description 11
- 238000007650 screen-printing Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 238000007639 printing Methods 0.000 description 7
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 229920001721 polyimide Polymers 0.000 description 6
- 239000012670 alkaline solution Substances 0.000 description 5
- 238000009713 electroplating Methods 0.000 description 5
- 239000009719 polyimide resin Substances 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 230000004927 fusion Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 229910052718 tin Inorganic materials 0.000 description 4
- 239000011135 tin Substances 0.000 description 4
- 239000011889 copper foil Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000003365 glass fiber Substances 0.000 description 3
- 239000003292 glue Substances 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 229910021645 metal ion Inorganic materials 0.000 description 3
- 125000001434 methanylylidene group Chemical group [H]C#[*] 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical class CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 2
- 239000002738 chelating agent Substances 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000012774 insulation material Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 238000006303 photolysis reaction Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000015843 photosynthesis, light reaction Effects 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical compound C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 description 1
- 229910001573 adamantine Inorganic materials 0.000 description 1
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000003490 calendering Methods 0.000 description 1
- -1 can adopt method Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000013532 laser treatment Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- VQTGUFBGYOIUFS-UHFFFAOYSA-N nitrosylsulfuric acid Chemical compound OS(=O)(=O)ON=O VQTGUFBGYOIUFS-UHFFFAOYSA-N 0.000 description 1
- JMANVNJQNLATNU-UHFFFAOYSA-N oxalonitrile Chemical class N#CC#N JMANVNJQNLATNU-UHFFFAOYSA-N 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011536 re-plating Methods 0.000 description 1
- 230000036647 reaction Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4647—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits by applying an insulating layer around previously made via studs
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0384—Etch stop layer, i.e. a buried barrier layer for preventing etching of layers under the etch stop layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0502—Patterning and lithography
- H05K2203/0542—Continuous temporary metal layer over metal pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0703—Plating
- H05K2203/0733—Method for plating stud vias, i.e. massive vias formed by plating the bottom of a hole without plating on the walls
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
Abstract
Description
Claims (15)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55731/99 | 1999-03-03 | ||
JP5573199 | 1999-03-03 | ||
JP55731/1999 | 1999-03-03 | ||
JP114538/1999 | 1999-04-22 | ||
JP114538/99 | 1999-04-22 | ||
JP11453899 | 1999-04-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1342391A CN1342391A (zh) | 2002-03-27 |
CN1176567C true CN1176567C (zh) | 2004-11-17 |
Family
ID=26396634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB008045410A Expired - Lifetime CN1176567C (zh) | 1999-03-03 | 2000-03-01 | 制造多层布线板的方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6555209B1 (zh) |
EP (1) | EP1168900A1 (zh) |
KR (1) | KR100427794B1 (zh) |
CN (1) | CN1176567C (zh) |
IL (1) | IL145202A0 (zh) |
TW (1) | TW493366B (zh) |
WO (1) | WO2000052977A1 (zh) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4798858B2 (ja) * | 2001-03-12 | 2011-10-19 | 電気化学工業株式会社 | 柱状金属体の形成方法及び多層配線基板の製造方法 |
CN100553410C (zh) * | 2001-03-28 | 2009-10-21 | 德塞拉互连材料股份有限公司 | 多层布线基板、多层布线基板制造方法、多层布线基板研磨机及制造布线基板的金属板 |
JP4582277B2 (ja) * | 2001-05-24 | 2010-11-17 | デンカAgsp株式会社 | 柱状金属体の形成方法及び多層配線基板の製造方法 |
TW544824B (en) * | 2002-02-01 | 2003-08-01 | Toppoly Optoelectronics Corp | Method of manufacturing conduction wire in touch panel |
US7320173B2 (en) * | 2003-02-06 | 2008-01-22 | Lg Electronics Inc. | Method for interconnecting multi-layer printed circuit board |
KR100652132B1 (ko) * | 2004-07-12 | 2006-11-29 | 곽경숙 | 인쇄 회로 기판 및 이의 제작 방법 |
JP3841096B2 (ja) * | 2004-09-28 | 2006-11-01 | セイコーエプソン株式会社 | 配線パターンの形成方法、多層配線基板の製造方法、電子機器 |
JP2006108211A (ja) * | 2004-10-01 | 2006-04-20 | North:Kk | 配線板と、その配線板を用いた多層配線基板と、その多層配線基板の製造方法 |
KR100645625B1 (ko) * | 2004-12-01 | 2006-11-15 | 삼성전기주식회사 | 커패시터 내장형 인쇄회로기판 및 그 제조방법 |
JP2008016653A (ja) * | 2006-07-06 | 2008-01-24 | Fujitsu Ltd | 半導体パッケージ、その製造方法、プリント基板及び電子機器 |
KR100789533B1 (ko) * | 2006-09-29 | 2007-12-28 | 삼성전기주식회사 | 반도체 패키지용 인쇄회로기판 및 그 제조방법 |
WO2008069055A1 (ja) * | 2006-11-28 | 2008-06-12 | Kyocera Corporation | 配線基板およびそれを用いた半導体素子の実装構造体 |
CN101286454B (zh) * | 2007-04-10 | 2011-03-30 | 上海美维科技有限公司 | 印制电路板的制作方法 |
US8309864B2 (en) * | 2008-01-31 | 2012-11-13 | Sanyo Electric Co., Ltd. | Device mounting board and manufacturing method therefor, and semiconductor module |
JP5474316B2 (ja) * | 2008-05-30 | 2014-04-16 | 三井金属鉱業株式会社 | 銅張積層板、その銅張積層板製造に用いる表面処理銅箔及びその銅張積層板を用いて得られるプリント配線板 |
CN102197498A (zh) | 2008-10-31 | 2011-09-21 | 电气化学工业株式会社 | 发光元件封装用基板及发光元件封装体 |
CN102224604A (zh) | 2008-11-25 | 2011-10-19 | 电气化学工业株式会社 | 发光元件封装用基板的制造方法及发光元件封装体 |
CN102224605A (zh) | 2008-11-25 | 2011-10-19 | 电气化学工业株式会社 | 发光元件封装用基板的制造方法及发光元件封装体 |
KR100909265B1 (ko) * | 2009-02-23 | 2009-07-27 | (주)이엔에이치테크 | 정전용량 방식의 터치스크린 패널의 제조방법 |
CN102498462B (zh) | 2009-09-11 | 2014-11-19 | 日本写真印刷株式会社 | 窄边框触摸输入薄片及其制造方法 |
US8519516B1 (en) * | 2012-03-12 | 2013-08-27 | Micron Technology, Inc. | Semiconductor constructions |
EP3028276A1 (en) * | 2013-07-31 | 2016-06-08 | Hewlett Packard Enterprise Development LP | Coating magnetic tape heads |
US10568212B2 (en) | 2014-11-28 | 2020-02-18 | Intel Corporation | Manufacturing method for multi-layer printed circuit board |
JP6555907B2 (ja) | 2015-03-16 | 2019-08-07 | アルパッド株式会社 | 半導体発光装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58213451A (ja) | 1982-06-07 | 1983-12-12 | Hitachi Ltd | 多層配線の形成法 |
JPH0710030B2 (ja) | 1990-05-18 | 1995-02-01 | インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン | 多層配線基板の製造方法 |
JPH05291744A (ja) | 1992-04-10 | 1993-11-05 | Hitachi Chem Co Ltd | 多層配線板の製造法および多層金属層付絶縁基板 |
JPH06216527A (ja) | 1993-01-20 | 1994-08-05 | Hitachi Ltd | 薄膜多層回路の製造方法 |
JPH06310857A (ja) | 1993-04-26 | 1994-11-04 | Hitachi Ltd | 薄膜多層回路とその製造方法 |
JPH06314878A (ja) | 1993-04-30 | 1994-11-08 | Toppan Printing Co Ltd | プリント配線板の製造方法 |
JP3112059B2 (ja) | 1995-07-05 | 2000-11-27 | 株式会社日立製作所 | 薄膜多層配線基板及びその製法 |
DE69634597T2 (de) * | 1995-11-17 | 2006-02-09 | Kabushiki Kaisha Toshiba, Kawasaki | Mehrschichtige leiterplatte, vorgefertigtes material für diese leiterplatte, verfahren zur herstellung einer mehrschichtigen leiterplatte, packung elektronischer bauelemente und verfahren zur herstellung vertikaler, elektrisch leitender verbindungen |
JPH10135639A (ja) | 1996-10-25 | 1998-05-22 | Oki Electric Ind Co Ltd | 多層プリント配線板の製造方法、層間接続方法および多層プリント配線板 |
-
2000
- 2000-03-01 CN CNB008045410A patent/CN1176567C/zh not_active Expired - Lifetime
- 2000-03-01 US US09/914,819 patent/US6555209B1/en not_active Expired - Lifetime
- 2000-03-01 EP EP00906588A patent/EP1168900A1/en not_active Withdrawn
- 2000-03-01 IL IL14520200A patent/IL145202A0/xx unknown
- 2000-03-01 WO PCT/JP2000/001186 patent/WO2000052977A1/ja not_active Application Discontinuation
- 2000-03-01 KR KR10-2001-7011128A patent/KR100427794B1/ko active IP Right Grant
- 2000-03-02 TW TW089103711A patent/TW493366B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR20010105366A (ko) | 2001-11-28 |
CN1342391A (zh) | 2002-03-27 |
IL145202A0 (en) | 2002-06-30 |
WO2000052977A1 (fr) | 2000-09-08 |
EP1168900A1 (en) | 2002-01-02 |
KR100427794B1 (ko) | 2004-04-28 |
TW493366B (en) | 2002-07-01 |
US6555209B1 (en) | 2003-04-29 |
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