CN117109549A - 振动器件、角速度传感器、电子设备和移动体 - Google Patents

振动器件、角速度传感器、电子设备和移动体 Download PDF

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Publication number
CN117109549A
CN117109549A CN202311069620.6A CN202311069620A CN117109549A CN 117109549 A CN117109549 A CN 117109549A CN 202311069620 A CN202311069620 A CN 202311069620A CN 117109549 A CN117109549 A CN 117109549A
Authority
CN
China
Prior art keywords
vibration
relay substrate
vibration device
wiring
mounting portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311069620.6A
Other languages
English (en)
Chinese (zh)
Inventor
西泽龙太
村上资郎
山口启一
中川启史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN117109549A publication Critical patent/CN117109549A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G17/00—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load
    • B60G17/015—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements
    • B60G17/019—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements characterised by the type of sensor or the arrangement thereof
    • B60G17/01933—Velocity, e.g. relative velocity-displacement sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5628—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G17/00—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load
    • B60G17/015—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements
    • B60G17/019—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements characterised by the type of sensor or the arrangement thereof
    • B60G17/01941—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements characterised by the type of sensor or the arrangement thereof characterised by the use of piezoelectric elements, e.g. sensors or actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G2401/00—Indexing codes relating to the type of sensors based on the principle of their operation
    • B60G2401/10—Piezoelectric elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Gyroscopes (AREA)
CN202311069620.6A 2017-03-23 2018-03-05 振动器件、角速度传感器、电子设备和移动体 Pending CN117109549A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017058170A JP6957921B2 (ja) 2017-03-23 2017-03-23 振動デバイス、角速度センサー、電子機器および移動体
JP2017-058170 2017-03-23
CN201810178563.8A CN108627149B (zh) 2017-03-23 2018-03-05 振动器件、角速度传感器、电子设备和移动体

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201810178563.8A Division CN108627149B (zh) 2017-03-23 2018-03-05 振动器件、角速度传感器、电子设备和移动体

Publications (1)

Publication Number Publication Date
CN117109549A true CN117109549A (zh) 2023-11-24

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CN202311069620.6A Pending CN117109549A (zh) 2017-03-23 2018-03-05 振动器件、角速度传感器、电子设备和移动体
CN201810178563.8A Active CN108627149B (zh) 2017-03-23 2018-03-05 振动器件、角速度传感器、电子设备和移动体

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201810178563.8A Active CN108627149B (zh) 2017-03-23 2018-03-05 振动器件、角速度传感器、电子设备和移动体

Country Status (3)

Country Link
US (1) US10760908B2 (enExample)
JP (4) JP6957921B2 (enExample)
CN (2) CN117109549A (enExample)

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JP6906618B2 (ja) * 2017-08-29 2021-07-21 京セラ株式会社 センサ素子および角速度センサ
JP6720959B2 (ja) * 2017-12-27 2020-07-08 Tdk株式会社 振動デバイス
JP2019118073A (ja) * 2017-12-27 2019-07-18 セイコーエプソン株式会社 振動デバイス、振動デバイスの製造方法、電子機器および移動体
JP7191118B2 (ja) * 2018-11-30 2022-12-16 京セラ株式会社 多軸角速度センサ
JP2020101484A (ja) * 2018-12-25 2020-07-02 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
JP2020144062A (ja) * 2019-03-08 2020-09-10 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7283140B2 (ja) * 2019-03-11 2023-05-30 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7183902B2 (ja) 2019-03-25 2022-12-06 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7251383B2 (ja) 2019-07-29 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7251385B2 (ja) 2019-07-30 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP2021032831A (ja) 2019-08-29 2021-03-01 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7276008B2 (ja) * 2019-08-29 2023-05-18 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7415444B2 (ja) 2019-10-30 2024-01-17 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7424065B2 (ja) 2020-01-20 2024-01-30 セイコーエプソン株式会社 振動デバイス、電子機器、及び移動体
JP2021117070A (ja) 2020-01-24 2021-08-10 セイコーエプソン株式会社 振動デバイス、電子機器、及び移動体
JP2023080593A (ja) * 2021-11-30 2023-06-09 セイコーエプソン株式会社 発振器
CN119309558B (zh) * 2024-12-10 2025-03-25 北京晨晶电子有限公司 一种角速度传感器

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Also Published As

Publication number Publication date
JP2018159674A (ja) 2018-10-11
JP7501607B2 (ja) 2024-06-18
JP7205570B2 (ja) 2023-01-17
US10760908B2 (en) 2020-09-01
JP2023040031A (ja) 2023-03-22
JP2021152546A (ja) 2021-09-30
JP6957921B2 (ja) 2021-11-02
CN108627149A (zh) 2018-10-09
CN108627149B (zh) 2023-09-08
JP2024107114A (ja) 2024-08-08
JP7786499B2 (ja) 2025-12-16
US20180274922A1 (en) 2018-09-27

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