CN1169235C - 电子部件、尤其是利用声表面波工作的电子部件-ofw部件 - Google Patents
电子部件、尤其是利用声表面波工作的电子部件-ofw部件 Download PDFInfo
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Abstract
具有装在基板(3)上并电接触的部件系统(1,2)的OFW部件,其中在部件侧面上提供面向离开部件系统(1,2)和基板(3)连接区方向的保护层(8)以及保护层(8)对部件系统(1,2)形成防止对基板(3)受环境影响的密封层。
Description
技术领域
本发明涉及电子部件,尤其是涉及用声表面波工作的部件-OFW部件。
背景技术
大家知道,电子部件通过保护层防止环境影响如化学物质或许湿度的侵蚀。因而例如US-PS 3 438 873描述通过氧化硅、氮化硅和混合硅化物如或许为硅酸铝保护半导体部件。这时保护层直接涂敷到半导体部件的系统上。这里关于部件系统理解为包含部件的有源电子元件的基板。换言之表示在部件系统情况下涉及除了包含部件的外壳之外的部件。
在确定的电子部件情况下上述类型的保护层涂敷到部件系统本身上可能是不合适的,甚至对部件功能有害。例如在用声表面波工作的部件情况下就是这种情况,因为在这类部件的部件系统上涂敷保护层能影响声表面波的传播。对此的另一例是机械应力的传感器,因为由传感器系统内的保护层引起机械的过大应力能影响对于待测机械应力的检测。
发明内容
基于本发明的任务是:给出一种办法能够防止电子部件受环境影响,而且能够不因涂敷在部件系统上的保护层产生损害。
本任务在本文一开始类型的电子部件情况下根据本发明的技术予以解决。
根据本发明的一个方面,电子部件,包括:
基板;
具有衬底和设于衬底上的导电结构的部件系统,部件系统是用倒装技术装配在基板上的,部件系统的导电结构电连接至基板,以及
作为单个金属层而用来屏蔽部件系统的保护层,该保护层对基板形成保护部件系统免受环境影响的防环境影响密封,
该保护层选自以下组别,该组别包括:蒸发涂层、真空金属喷镀层、电镀法处理而制成的涂层、和叠层,
其中,保护层涂敷在基板以及衬底远离基板的一侧。
根据本发明的另一个方面,电子部件,包括:
基板;
具有衬底和设于衬底上的导电结构的部件系统,部件系统与基板电接触并用倒装技术装配在基板上,以及
由多个涂层构成的保护层,其中所述多个涂层包括屏蔽部件系统的金属层,
金属层对基板形成保护部件系统免受环境影响的防环境影响密封,
其中,金属层固定于基板上,并固定于衬底远离基板的一侧,
该金属层选自以下组别,该组别包括:蒸发涂层、真空金属喷镀层、电镀法处理过的涂层、和叠层。
本发明的改进在后文中进行描述。
附图说明
本发明依靠附图的图所描绘的实施例详细说明如下。这里图1到图3图示给出了由本发明构成的电子部件的各种实施例。其中
图1是根据本发明的关于电子元件的第一实施例的简图。
图2是关于电子元件的第二实施例的简图。
图3是关于电子元件的第三实施例的简图。
具体实施方式
在图1电子部件实施例,一部件系统电接触装配在基板3上。部件系统通过衬底上和包围未图示导电结构的绝缘框架2简略描述。在此导电结构情况下,对于OFW部件它可以涉及到例如叉指式换能器、谐振器或反射器。
在本发明的范围内所谓“基板”理解为在合成物基、玻璃基或陶瓷基上的印刷电路衬底。在基板3上提供印制导线4,该印制导线经缓冲件5与部件系统的衬底1上的(未图示的)导电结构相接触。在这种电接触中涉及本身公知的所谓倒装晶片式安装。
在包围衬底1上导电结构的框架2和印制导线4之间提供例如由环氧树脂或玻璃构成的绝缘层6。最后在部件系统和基板3之间的联接区提供一镶框7,在该镶框可涉及例如粘着剂、热塑合成树脂或塑胶。因此特别提供该镶框以便吸收由部件系统和基板的不同热膨胀引起以及能够通过缓冲件5机械上损害在衬底1上导电结构和基板3的印制导线之间电接触的剪力。
根据本发明在遍及结构部件系统和基板3之间连接区的部件端上,提供一保护层8用于对部件系统形成防止对基板环境影响的密封的封闭层。正如在以下还要详细说明的那样,该保护层可以不同方式构成。
在图2的OFW部件的实施例中OFW的部件系统通过压电衬底10并在该预定的导电结构11和为导电结构的引线面12-焊接点-上形成。在导电结构11的情况下例如又涉及叉指式换能器、谐振器或反射器。导电结构11和焊接点12按照图1的实施例为绝缘框架21所包围。而图2的包括衬底1和结构10、11和12的部件系统的描绘完成是图解性质。OFW部件用的这种部件系统的完整结构本身是大家熟悉的,因此在这里不详细说明。
此外,提供一基板13,在其转向包括衬底1和结构10、11和12的部件系统的侧面上提供在其上具有缓冲件15的印制导线14,经缓冲件15实现部件上在焊接点12的接触。基板13的构成不限于双层性。多于两层也是可以应用的。
由部件通过下述方式引出电接通,即,印制导线14围绕基板13建立,正如在图2左侧所示,或者通过基板经引线16-1,16-2,16-3在基板13的外侧与印制导线17相连。电引线16-1,16-2,16-3在垂直方向偏心安排用于阻止影响部件功能的化学物质进入,即:通过引线的偏心构成保证从基板13的外侧来的气密性。当印制导线14围绕基板13建立并经缓冲件15与焊接点12相连,则在印制导线14和下述保护层19之间必须一绝缘层20。
包括衬底1和结构10、11和12的部件系统通过塑料涂层18覆盖在基板13上。该覆盖层18通过热塑合成树脂、塑胶或热塑形成。
根据本发明在塑料涂层18上面向离开包括衬底1和结构10、11和12的部件系统和基板13之间的连接区方向提供根据本发明的保护层19,该保护层形成防止对基板13环境影响的密封层。
正如以上说明,图1的保护层8和图2的保护层19可以不同方式构成。根据实施例它可以是包含金属的层或完全金属层。此外,它也可以通过多个分层形成(在图1和2内并未特别表示),其中至少有一层是金属层。此外分层之一可以是玻璃层,此时涉及分层系列的下分层。例如,铜、镍或金可考虑作为金属区。金属层可以通过蒸发、真空金属喷涂、电镀或叠层胶合涂敷。在必要时在金属层上提供未特别说明的抗腐蚀层。此外,在金属层下也可以提供未特别描绘的粘附层。
正如依靠图2的实施例描绘的那样,保护层19,即:尤其是其金属部分是导电的,以致保护层19不仅是对环境影响起保护的层,而且同时也形成对包括衬底1和结构10、11和12的部件系统的高频屏蔽。但是为此目的,保护层19与基板13上的印制导线14相连,正如在图2通过焊接22所描绘的那样。
在图1和图2的相同部分提供同一参考符号的图3给出一实施例,其中部件系统是导线连接的。这时衬底1借助一合适的连接,例如粘接30固定在基板3上。在转向固定区的一侧,经接触线31引线连接到印制导线4上。
在本实施例,按照图2的实施例塑料涂层18提供一本发明的保护层19。
Claims (10)
1.电子部件,包括:
基板(3、13);
具有衬底(1)和设于衬底(1)上的导电结构(11)的部件系统,部件系统是用倒装技术装配在基板(3、13)上的,部件系统的导电结构(11)电连接至基板(3、13),以及
作为单个金属层而用来屏蔽部件系统的保护层(8、19),该保护层(8、19)对基板(3、13)形成保护部件系统免受环境影响的防环境影响密封,
该保护层(8、19)选自以下组别,该组别包括:蒸发涂层、真空金属喷镀层、电镀法处理而制成的涂层、和叠层,
其中,保护层(8、19)涂敷在基板(3、13)以及衬底远离基板(3、13)的一侧。
2.按照权利要求1所述的电子部件,包括一个设于保护层(8、19)上的防腐层。
3.按照权利要求1所述的电子部件,其中,所述保护层(8、19)是导电的。
4.按照权利要求1至3之一所述的电子部件,其中,所述保护层(8、19)包括铜、镍或金。
5.电子部件,包括:
基板(3、13);
具有衬底(1)和设于衬底(1)上的导电结构(11)的部件系统,部件系统与基板(3、13)电接触并用倒装技术装配在基板(3、13)上,以及
由多个涂层构成的保护层(8、19),其中所述多个涂层包括屏蔽部件系统的金属层,
金属层对基板(3、13)形成保护部件系统免受环境影响的防环境影响密封,
其中,金属层固定于基板(3、13)上,并固定于衬底远离基板(3、13)的一侧,
该金属层选自以下组别,该组别包括:蒸发涂层、真空金属喷镀层、电镀法处理过的涂层、和叠层。
6.按照权利要求5所述的电子部件,
其中,诸涂层中至少有一涂层为玻璃层。
7.按照权利要求6所述的电子部件,
其中,所述玻璃层属于多个涂层中最下的涂层。
8.按照权利要求5至7之一所述的电子部件,
包括设于金属层之下的粘附层。
9.按照权利要求5至7之一所述的电子部件,
其中,金属层包括铜、镍或金。
10.按照权利要求5至7之一所述的电子部件,
其中,所述部件系统为一种声表面波部件系统。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19621127.1 | 1996-05-24 | ||
DE19621127 | 1996-05-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1220057A CN1220057A (zh) | 1999-06-16 |
CN1169235C true CN1169235C (zh) | 2004-09-29 |
Family
ID=7795328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB971949360A Expired - Lifetime CN1169235C (zh) | 1996-05-24 | 1997-05-23 | 电子部件、尤其是利用声表面波工作的电子部件-ofw部件 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6528924B1 (zh) |
EP (1) | EP0900477B1 (zh) |
JP (1) | JPH11510666A (zh) |
CN (1) | CN1169235C (zh) |
CA (1) | CA2255961A1 (zh) |
DE (1) | DE59704079D1 (zh) |
WO (1) | WO1997045955A1 (zh) |
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DE19822794C1 (de) * | 1998-05-20 | 2000-03-09 | Siemens Matsushita Components | Mehrfachnutzen für elektronische Bauelemente, insbesondere akustische Oberflächenwellen-Bauelemente |
DE19933548C2 (de) * | 1999-07-16 | 2001-07-26 | Epcos Ag | Passiviertes elektronisches Bauelement und Verfahren zur Herstellung einer Passivierung eines elektronischen Bauelements |
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DE10007178A1 (de) * | 2000-02-17 | 2001-08-23 | Epcos Ag | Oberflächenwellenfilter mit Reaktanzelementen |
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DE10238523B4 (de) * | 2002-08-22 | 2014-10-02 | Epcos Ag | Verkapseltes elektronisches Bauelement und Verfahren zur Herstellung |
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JP4177182B2 (ja) * | 2003-06-13 | 2008-11-05 | 富士通メディアデバイス株式会社 | 弾性表面波デバイス、そのパッケージ及びその製造方法 |
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JP4180985B2 (ja) * | 2003-07-07 | 2008-11-12 | 富士通メディアデバイス株式会社 | 弾性表面波デバイス及びその製造方法 |
DE10336171B3 (de) | 2003-08-07 | 2005-02-10 | Technische Universität Braunschweig Carolo-Wilhelmina | Multichip-Schaltungsmodul und Verfahren zur Herstellung hierzu |
DE10351428A1 (de) * | 2003-11-04 | 2005-06-16 | Epcos Ag | Elektrisches Bauelement mit Verkapselung und Verfahren zur Herstellung |
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JP4576849B2 (ja) * | 2004-03-01 | 2010-11-10 | パナソニック株式会社 | 集積回路装置 |
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US7298231B2 (en) | 2004-05-27 | 2007-11-20 | Kyocera Corporation | Surface acoustic wave device and communication apparatus |
US7608789B2 (en) * | 2004-08-12 | 2009-10-27 | Epcos Ag | Component arrangement provided with a carrier substrate |
US7259499B2 (en) * | 2004-12-23 | 2007-08-21 | Askew Andy R | Piezoelectric bimorph actuator and method of manufacturing thereof |
US7477118B2 (en) | 2005-01-20 | 2009-01-13 | Kyocera Corporation | High frequency device mounting substrate and communications apparatus |
DE102005008514B4 (de) * | 2005-02-24 | 2019-05-16 | Tdk Corporation | Mikrofonmembran und Mikrofon mit der Mikrofonmembran |
DE102005008511B4 (de) * | 2005-02-24 | 2019-09-12 | Tdk Corporation | MEMS-Mikrofon |
DE102005008512B4 (de) | 2005-02-24 | 2016-06-23 | Epcos Ag | Elektrisches Modul mit einem MEMS-Mikrofon |
DE102005053765B4 (de) * | 2005-11-10 | 2016-04-14 | Epcos Ag | MEMS-Package und Verfahren zur Herstellung |
DE102005053767B4 (de) * | 2005-11-10 | 2014-10-30 | Epcos Ag | MEMS-Mikrofon, Verfahren zur Herstellung und Verfahren zum Einbau |
CN101868915B (zh) | 2007-11-28 | 2013-11-06 | 株式会社村田制作所 | 弹性波装置 |
US7647688B1 (en) * | 2008-08-11 | 2010-01-19 | Hrl Laboratories, Llc | Method of fabricating a low frequency quartz resonator |
DE102010056431B4 (de) * | 2010-12-28 | 2012-09-27 | Epcos Ag | Bauelement und Verfahren zum Herstellen eines Bauelements |
DE102013106353B4 (de) * | 2013-06-18 | 2018-06-28 | Tdk Corporation | Verfahren zum Aufbringen einer strukturierten Beschichtung auf ein Bauelement |
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US6262513B1 (en) * | 1995-06-30 | 2001-07-17 | Kabushiki Kaisha Toshiba | Electronic component and method of production thereof |
-
1997
- 1997-05-23 DE DE59704079T patent/DE59704079D1/de not_active Expired - Lifetime
- 1997-05-23 JP JP9541398A patent/JPH11510666A/ja active Pending
- 1997-05-23 CN CNB971949360A patent/CN1169235C/zh not_active Expired - Lifetime
- 1997-05-23 CA CA002255961A patent/CA2255961A1/en not_active Abandoned
- 1997-05-23 WO PCT/DE1997/001055 patent/WO1997045955A1/de not_active Application Discontinuation
- 1997-05-23 EP EP97925867A patent/EP0900477B1/de not_active Expired - Lifetime
-
1998
- 1998-11-24 US US09/198,887 patent/US6528924B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0900477A1 (de) | 1999-03-10 |
WO1997045955A1 (de) | 1997-12-04 |
JPH11510666A (ja) | 1999-09-14 |
DE59704079D1 (de) | 2001-08-23 |
CN1220057A (zh) | 1999-06-16 |
CA2255961A1 (en) | 1997-12-04 |
EP0900477B1 (de) | 2001-07-18 |
US6528924B1 (en) | 2003-03-04 |
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