CN1098022C - 电路底板激光加工法及其加工装置和二氧化碳激光振荡器 - Google Patents

电路底板激光加工法及其加工装置和二氧化碳激光振荡器 Download PDF

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Publication number
CN1098022C
CN1098022C CN96111476A CN96111476A CN1098022C CN 1098022 C CN1098022 C CN 1098022C CN 96111476 A CN96111476 A CN 96111476A CN 96111476 A CN96111476 A CN 96111476A CN 1098022 C CN1098022 C CN 1098022C
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CN
China
Prior art keywords
laser
laser beam
processing
microseconds
circuit board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN96111476A
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English (en)
Chinese (zh)
Other versions
CN1142743A (zh
Inventor
黑泽满树
福岛司
水野正纪
竹野祥瑞
森安雅治
金子雅之
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Publication date
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Publication of CN1142743A publication Critical patent/CN1142743A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
    • H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0548—Masks
    • H05K2203/0554—Metal used as mask for etching vias, e.g. by laser ablation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/08—Treatments involving gases
    • H05K2203/081—Blowing of gas, e.g. for cooling or for providing heat during solder reflowing

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Laser Beam Processing (AREA)
CN96111476A 1995-08-07 1996-08-07 电路底板激光加工法及其加工装置和二氧化碳激光振荡器 Expired - Lifetime CN1098022C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP201194/95 1995-08-07
JP20119495 1995-08-07
JP059862/96 1996-03-15
JP8059862A JPH09107168A (ja) 1995-08-07 1996-03-15 配線基板のレーザ加工方法、配線基板のレーザ加工装置及び配線基板加工用の炭酸ガスレーザ発振器

Publications (2)

Publication Number Publication Date
CN1142743A CN1142743A (zh) 1997-02-12
CN1098022C true CN1098022C (zh) 2003-01-01

Family

ID=26400942

Family Applications (1)

Application Number Title Priority Date Filing Date
CN96111476A Expired - Lifetime CN1098022C (zh) 1995-08-07 1996-08-07 电路底板激光加工法及其加工装置和二氧化碳激光振荡器

Country Status (5)

Country Link
US (1) US20030146196A1 (https=)
JP (1) JPH09107168A (https=)
KR (1) KR100199955B1 (https=)
CN (1) CN1098022C (https=)
TW (1) TW312082B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103857207A (zh) * 2012-11-30 2014-06-11 宏启胜精密电子(秦皇岛)有限公司 电路板及其制作方法

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SG86451A1 (en) * 1999-11-30 2002-02-19 Canon Kk Laser etching method and apparatus therefor
US6281471B1 (en) * 1999-12-28 2001-08-28 Gsi Lumonics, Inc. Energy-efficient, laser-based method and system for processing target material
US7671295B2 (en) 2000-01-10 2010-03-02 Electro Scientific Industries, Inc. Processing a memory link with a set of at least two laser pulses
US6705914B2 (en) 2000-04-18 2004-03-16 Matsushita Electric Industrial Co., Ltd. Method of forming spherical electrode surface for high intensity discharge lamp
JP4659300B2 (ja) * 2000-09-13 2011-03-30 浜松ホトニクス株式会社 レーザ加工方法及び半導体チップの製造方法
TW525240B (en) * 2001-01-31 2003-03-21 Electro Scient Ind Inc Ultraviolet laser ablative patterning of microstructures in semiconductors
KR100512807B1 (ko) 2001-04-05 2005-09-06 미쓰비시덴키 가부시키가이샤 적층재료의 탄산가스 레이저 가공방법
JP5028722B2 (ja) * 2001-07-31 2012-09-19 三菱電機株式会社 レーザ加工方法及びレーザ加工機
DE10145184B4 (de) * 2001-09-13 2005-03-10 Siemens Ag Verfahren zum Laserbohren, insbesondere unter Verwendung einer Lochmaske
US20030155328A1 (en) * 2002-02-15 2003-08-21 Huth Mark C. Laser micromachining and methods and systems of same
ES2639733T3 (es) 2002-03-12 2017-10-30 Hamamatsu Photonics K.K. Método de división de sustrato
TWI221791B (en) * 2002-04-02 2004-10-11 Mitsubishi Electric Corp Laser processing system and laser processing method
DE102004014277A1 (de) * 2004-03-22 2005-10-20 Fraunhofer Ges Forschung Verfahren zum laserthermischen Trennen von Flachgläsern
TW200617794A (en) * 2004-09-14 2006-06-01 Oji Paper Co Tape with built-in IC chip, production method thereof, and sheet with built-in IC chip
US8029501B2 (en) * 2004-12-30 2011-10-04 Attodyne Inc. Laser selective cutting by impulsive heat deposition in the IR wavelength range for direct-drive ablation
CN1939644B (zh) * 2005-09-30 2012-10-17 日立比亚机械股份有限公司 激光加工方法以及激光加工装置
JP5030512B2 (ja) 2005-09-30 2012-09-19 日立ビアメカニクス株式会社 レーザ加工方法
JP2008212999A (ja) 2007-03-06 2008-09-18 Disco Abrasive Syst Ltd レーザー加工装置
JP5553397B2 (ja) * 2007-07-19 2014-07-16 日東電工株式会社 レーザー加工方法
BRPI1007356B1 (pt) * 2009-01-28 2020-11-03 Albany International Corp. tecidos industriais para produção de não tecidos
EP2396138A4 (en) * 2009-02-13 2013-12-04 Videojet Technologies Inc ADJUSTING LASER PARAMETERS
US8529991B2 (en) * 2009-07-31 2013-09-10 Raytheon Canada Limited Method and apparatus for cutting a part without damaging a coating thereon
CN101969746B (zh) * 2010-11-04 2012-05-09 沪士电子股份有限公司 印刷电路板镂空区局部除电镀铜的方法
EP2662177A1 (en) * 2011-01-05 2013-11-13 Kiyoyuki Kondo Beam processing device
JP5839876B2 (ja) * 2011-07-27 2016-01-06 古河電気工業株式会社 レーザ加工用銅板および該レーザ加工用銅板を用いたプリント基板、並びに銅板のレーザ加工方法
JP2014120568A (ja) * 2012-12-14 2014-06-30 Showa Denko Packaging Co Ltd 配線基板の表裏導通方法
CN103909351A (zh) * 2013-01-04 2014-07-09 欣兴电子股份有限公司 线路板以及此线路板的激光钻孔方法
CN103286456B (zh) * 2013-05-07 2015-07-01 大族激光科技产业集团股份有限公司 激光切割装置及切割方法
JP6110225B2 (ja) * 2013-06-25 2017-04-05 ビアメカニクス株式会社 レーザ穴明け加工方法
CN103747636A (zh) * 2013-12-24 2014-04-23 广州兴森快捷电路科技有限公司 镀金线路板引线回蚀的方法
JP6134914B2 (ja) * 2014-09-08 2017-05-31 パナソニックＩｐマネジメント株式会社 コンフォーマルマスク材料のレーザ加工方法
CN106199830A (zh) * 2015-05-08 2016-12-07 中兴通讯股份有限公司 光波导的制备方法及装置
CN105578771A (zh) * 2015-12-31 2016-05-11 广州兴森快捷电路科技有限公司 电路板内槽的加工方法
JP2020109820A (ja) * 2019-01-01 2020-07-16 大船企業日本株式会社 プリント基板のレーザ加工方法およびプリント基板のレーザ加工機
CN112444162B (zh) * 2019-09-02 2023-10-13 西安尚道电子科技有限公司 一种导电布精度靶板制造方法
WO2021049624A1 (ja) * 2019-09-13 2021-03-18 株式会社ゼファー 回路成型部品及び電子機器
CN113099615B (zh) * 2021-04-01 2022-09-06 深圳市祺利电子有限公司 一种大尺寸线路板钻孔定位方法
CN112992880B (zh) * 2021-04-25 2023-08-15 江西沃格光电股份有限公司 一种Mini-LED背光板通孔的形成方法及电子设备
CN114152614A (zh) * 2021-12-24 2022-03-08 深圳技师学院（深圳高级技工学校） 一种覆盖膜激光切割碳化程度的测量方法
CN117464170B (zh) * 2023-12-27 2024-04-02 武汉铱科赛科技有限公司 一种层间电连激光加工方法、设备、装置及系统
CN119511056B (zh) * 2024-10-18 2025-08-05 武汉铱科赛科技有限公司 一种盲孔可靠性测试方法、设备、装置及系统
CN119589111A (zh) * 2024-10-30 2025-03-11 杭州银湖激光科技有限公司 一种金刚石的激光切割装置及切割方法
CN120404231B (zh) * 2025-07-02 2025-09-05 乐捷家居股份有限公司 一种家具材料检测取样装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103857207A (zh) * 2012-11-30 2014-06-11 宏启胜精密电子(秦皇岛)有限公司 电路板及其制作方法
CN103857207B (zh) * 2012-11-30 2017-03-01 碁鼎科技秦皇岛有限公司 电路板及其制作方法

Also Published As

Publication number Publication date
US20030146196A1 (en) 2003-08-07
JPH09107168A (ja) 1997-04-22
KR100199955B1 (ko) 1999-06-15
CN1142743A (zh) 1997-02-12
TW312082B (https=) 1997-08-01
KR970013540A (ko) 1997-03-29

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