CN106104779B - 功率用半导体装置 - Google Patents
功率用半导体装置 Download PDFInfo
- Publication number
- CN106104779B CN106104779B CN201580013957.2A CN201580013957A CN106104779B CN 106104779 B CN106104779 B CN 106104779B CN 201580013957 A CN201580013957 A CN 201580013957A CN 106104779 B CN106104779 B CN 106104779B
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- power semiconductor
- lead terminal
- semiconductor device
- electrode
- inclined surface
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- H—ELECTRICITY
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- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/40—Leadframes
- H10W70/479—Leadframes on or in insulating or insulated package substrates, interposers, or redistribution layers
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- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
- H10W70/65—Shapes or dispositions of interconnections
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- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
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- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
- H10W70/69—Insulating materials thereof
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- H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
- H10W74/114—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
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- H10W40/25—Arrangements for cooling characterised by their materials
- H10W40/255—Arrangements for cooling characterised by their materials having a laminate or multilayered structure, e.g. direct bond copper [DBC] ceramic substrates
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- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07351—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting
- H10W72/07354—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting changes in dispositions
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- H10W72/076—Connecting or disconnecting of strap connectors
- H10W72/07631—Techniques
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- H10W72/341—Dispositions of die-attach connectors, e.g. layouts
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- H10W72/521—Structures or relative sizes of bond wires
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- H10W72/551—Materials of bond wires
- H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
- H10W72/5522—Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
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- H10W72/00—Interconnections or connectors in packages
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- H10W72/551—Materials of bond wires
- H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
- H10W72/5524—Materials of bond wires comprising metals or metalloids, e.g. silver comprising aluminium [Al]
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- H10W72/5525—Materials of bond wires comprising metals or metalloids, e.g. silver comprising copper [Cu]
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- H10W72/00—Interconnections or connectors in packages
- H10W72/60—Strap connectors, e.g. thick copper clips for grounding of power devices
- H10W72/651—Materials of strap connectors
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- H10W72/00—Interconnections or connectors in packages
- H10W72/60—Strap connectors, e.g. thick copper clips for grounding of power devices
- H10W72/651—Materials of strap connectors
- H10W72/655—Materials of strap connectors of outermost layers of multilayered strap connectors, e.g. material of a coating
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- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/853—On the same surface
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- H10W72/853—On the same surface
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- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/884—Die-attach connectors and bond wires
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- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/921—Structures or relative sizes of bond pads
- H10W72/926—Multiple bond pads having different sizes
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- H10W72/931—Shapes of bond pads
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- H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
- H10W76/10—Containers or parts thereof
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- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
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- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/736—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
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- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/755—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a laterally-adjacent insulating package substrate, interpose or RDL
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- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/761—Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors
- H10W90/763—Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors between laterally-adjacent chips
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910381937.0A CN110120375A (zh) | 2014-05-20 | 2015-05-15 | 功率用半导体装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014103985 | 2014-05-20 | ||
| JP2014-103985 | 2014-05-20 | ||
| PCT/JP2015/063993 WO2015178296A1 (ja) | 2014-05-20 | 2015-05-15 | 電力用半導体装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910381937.0A Division CN110120375A (zh) | 2014-05-20 | 2015-05-15 | 功率用半导体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106104779A CN106104779A (zh) | 2016-11-09 |
| CN106104779B true CN106104779B (zh) | 2019-05-10 |
Family
ID=54553968
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580013957.2A Active CN106104779B (zh) | 2014-05-20 | 2015-05-15 | 功率用半导体装置 |
| CN201910381937.0A Withdrawn CN110120375A (zh) | 2014-05-20 | 2015-05-15 | 功率用半导体装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910381937.0A Withdrawn CN110120375A (zh) | 2014-05-20 | 2015-05-15 | 功率用半导体装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10658284B2 (https=) |
| JP (2) | JP6316412B2 (https=) |
| CN (2) | CN106104779B (https=) |
| DE (1) | DE112015002348T5 (https=) |
| WO (1) | WO2015178296A1 (https=) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015178296A1 (ja) * | 2014-05-20 | 2015-11-26 | 三菱電機株式会社 | 電力用半導体装置 |
| DE202016101688U1 (de) * | 2016-03-30 | 2016-04-21 | Semikron Elektronik Gmbh & Co. Kg | Leistungshalbleitermodul mit einem Schaltungsträger |
| JP6759784B2 (ja) * | 2016-07-12 | 2020-09-23 | 三菱電機株式会社 | 半導体モジュール |
| JP6717103B2 (ja) * | 2016-08-03 | 2020-07-01 | 株式会社豊田自動織機 | 半導体モジュール |
| JP6907670B2 (ja) * | 2017-04-17 | 2021-07-21 | 三菱電機株式会社 | 半導体装置および半導体装置の製造方法 |
| DE112017008277B4 (de) | 2017-12-13 | 2025-03-13 | Mitsubishi Electric Corporation | Halbleitervorrichtung und leistungsumwandlungsvorrichtung |
| US10600725B2 (en) | 2018-05-29 | 2020-03-24 | Shindengen Electric Manufacturing Co., Ltd. | Semiconductor module having a grooved clip frame |
| CN110914981B (zh) * | 2018-05-29 | 2023-06-16 | 新电元工业株式会社 | 半导体模块 |
| JP7091878B2 (ja) * | 2018-06-22 | 2022-06-28 | 三菱電機株式会社 | パワーモジュール、電力変換装置、及びパワーモジュールの製造方法 |
| JP6457144B1 (ja) * | 2018-09-19 | 2019-01-23 | 株式会社加藤電器製作所 | 半導体モジュール |
| JP7108567B2 (ja) | 2019-03-20 | 2022-07-28 | 株式会社東芝 | パワーモジュール |
| CN111627864B (zh) * | 2020-06-03 | 2022-06-07 | 西安卫光科技有限公司 | 一种高结温SiC陶瓷封装硅堆外壳结构 |
| JP7489933B2 (ja) | 2021-02-24 | 2024-05-24 | 三菱電機株式会社 | 半導体装置及びその製造方法 |
| CN117836928A (zh) * | 2021-08-18 | 2024-04-05 | 三菱电机株式会社 | 半导体装置 |
| JP7811033B2 (ja) * | 2024-07-11 | 2026-02-04 | 大分デバイステクノロジー株式会社 | パワー半導体デバイスの製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013051295A (ja) * | 2011-08-31 | 2013-03-14 | Panasonic Corp | 半導体装置及びその製造方法 |
| WO2013111276A1 (ja) * | 2012-01-25 | 2013-08-01 | 三菱電機株式会社 | 電力用半導体装置 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6149432A (ja) * | 1984-08-18 | 1986-03-11 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
| US5110761A (en) * | 1988-09-09 | 1992-05-05 | Motorola, Inc. | Formed top contact for non-flat semiconductor devices |
| US5798566A (en) * | 1996-01-11 | 1998-08-25 | Ngk Spark Plug Co., Ltd. | Ceramic IC package base and ceramic cover |
| JPH11233671A (ja) * | 1998-02-09 | 1999-08-27 | Fuji Electric Co Ltd | 半導体装置 |
| JP2004095965A (ja) * | 2002-09-02 | 2004-03-25 | Sanken Electric Co Ltd | 樹脂封止形半導体装置 |
| JP2004111745A (ja) * | 2002-09-19 | 2004-04-08 | Toshiba Corp | 半導体装置 |
| US7239016B2 (en) | 2003-10-09 | 2007-07-03 | Denso Corporation | Semiconductor device having heat radiation plate and bonding member |
| JP4339660B2 (ja) | 2003-10-09 | 2009-10-07 | 株式会社デンソー | 半導体装置 |
| JP4334335B2 (ja) * | 2003-12-24 | 2009-09-30 | 三洋電機株式会社 | 混成集積回路装置の製造方法 |
| JP4492448B2 (ja) | 2005-06-15 | 2010-06-30 | 株式会社日立製作所 | 半導体パワーモジュール |
| DE102005039940B4 (de) | 2005-08-24 | 2009-07-02 | Semikron Elektronik Gmbh & Co. Kg | Leistungshalbleitermodul mit Bondverbindung der Leistungshalbleiterbauelemente |
| JP2007184525A (ja) | 2005-12-07 | 2007-07-19 | Mitsubishi Electric Corp | 電子機器装置 |
| JP4829690B2 (ja) | 2006-06-09 | 2011-12-07 | 本田技研工業株式会社 | 半導体装置 |
| CN101819965B (zh) | 2006-06-09 | 2013-01-16 | 本田技研工业株式会社 | 半导体装置 |
| JP2010050364A (ja) | 2008-08-25 | 2010-03-04 | Hitachi Ltd | 半導体装置 |
| JP5542567B2 (ja) * | 2010-07-27 | 2014-07-09 | 三菱電機株式会社 | 半導体装置 |
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| JP2012084588A (ja) * | 2010-10-07 | 2012-04-26 | Toyota Industries Corp | 電子部品における電極の接続構造 |
| CN103348467B (zh) * | 2011-04-22 | 2016-03-30 | 三菱电机株式会社 | 半导体装置 |
| KR20130026683A (ko) * | 2011-09-06 | 2013-03-14 | 에스케이하이닉스 주식회사 | 반도체 소자 및 그 제조 방법 |
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| WO2015178296A1 (ja) * | 2014-05-20 | 2015-11-26 | 三菱電機株式会社 | 電力用半導体装置 |
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2015
- 2015-05-15 WO PCT/JP2015/063993 patent/WO2015178296A1/ja not_active Ceased
- 2015-05-15 DE DE112015002348.8T patent/DE112015002348T5/de active Pending
- 2015-05-15 US US15/124,489 patent/US10658284B2/en active Active
- 2015-05-15 CN CN201580013957.2A patent/CN106104779B/zh active Active
- 2015-05-15 JP JP2016521067A patent/JP6316412B2/ja active Active
- 2015-05-15 CN CN201910381937.0A patent/CN110120375A/zh not_active Withdrawn
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2018
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| JP2013051295A (ja) * | 2011-08-31 | 2013-03-14 | Panasonic Corp | 半導体装置及びその製造方法 |
| WO2013111276A1 (ja) * | 2012-01-25 | 2013-08-01 | 三菱電機株式会社 | 電力用半導体装置 |
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|---|---|
| CN106104779A (zh) | 2016-11-09 |
| WO2015178296A1 (ja) | 2015-11-26 |
| US10658284B2 (en) | 2020-05-19 |
| US20170018495A1 (en) | 2017-01-19 |
| CN110120375A (zh) | 2019-08-13 |
| JPWO2015178296A1 (ja) | 2017-04-20 |
| JP6316412B2 (ja) | 2018-04-25 |
| DE112015002348T5 (de) | 2017-02-16 |
| JP2018093244A (ja) | 2018-06-14 |
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