CN105144381B - 具有在集成电路的不同层上的读/写端口和访问逻辑单元的三维(3d)存储单元 - Google Patents

具有在集成电路的不同层上的读/写端口和访问逻辑单元的三维(3d)存储单元 Download PDF

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Publication number
CN105144381B
CN105144381B CN201480014060.7A CN201480014060A CN105144381B CN 105144381 B CN105144381 B CN 105144381B CN 201480014060 A CN201480014060 A CN 201480014060A CN 105144381 B CN105144381 B CN 105144381B
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China
Prior art keywords
3dic
read
memory
layer
access port
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Expired - Fee Related
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CN201480014060.7A
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Chinese (zh)
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CN105144381A (zh
Inventor
J·谢
Y·杜
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Qualcomm Inc
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Qualcomm Inc
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/41Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming static cells with positive feedback, i.e. cells not needing refreshing or charge regeneration, e.g. bistable multivibrator or Schmitt trigger
    • G11C11/412Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming static cells with positive feedback, i.e. cells not needing refreshing or charge regeneration, e.g. bistable multivibrator or Schmitt trigger using field-effect transistors only
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/41Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming static cells with positive feedback, i.e. cells not needing refreshing or charge regeneration, e.g. bistable multivibrator or Schmitt trigger
    • G11C11/413Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing, timing or power reduction
    • G11C11/417Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing, timing or power reduction for memory cells of the field-effect type
    • G11C11/419Read-write [R-W] circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C5/00Details of stores covered by group G11C11/00
    • G11C5/02Disposition of storage elements, e.g. in the form of a matrix array
    • G11C5/025Geometric lay-out considerations of storage- and peripheral-blocks in a semiconductor storage device
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B10/00Static random access memory [SRAM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B10/00Static random access memory [SRAM] devices
    • H10B10/12Static random access memory [SRAM] devices comprising a MOSFET load element
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B10/00Static random access memory [SRAM] devices
    • H10B10/12Static random access memory [SRAM] devices comprising a MOSFET load element
    • H10B10/125Static random access memory [SRAM] devices comprising a MOSFET load element the MOSFET being a thin film transistor [TFT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B10/00Static random access memory [SRAM] devices
    • H10B10/18Peripheral circuit regions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00Three-dimensional [3D] integrated devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/20Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/40Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/42Vias, e.g. via plugs

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Static Random-Access Memory (AREA)
  • Semiconductor Memories (AREA)
CN201480014060.7A 2013-03-15 2014-03-11 具有在集成电路的不同层上的读/写端口和访问逻辑单元的三维(3d)存储单元 Expired - Fee Related CN105144381B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361800220P 2013-03-15 2013-03-15
US61/800,220 2013-03-15
US13/939,274 US9171608B2 (en) 2013-03-15 2013-07-11 Three-dimensional (3D) memory cell separation among 3D integrated circuit (IC) tiers, and related 3D integrated circuits (3DICS), 3DIC processor cores, and methods
US13/939,274 2013-07-11
PCT/US2014/022929 WO2014150317A1 (en) 2013-03-15 2014-03-11 Three-dimensional (3d) memory cell with read/write ports and access logic on different tiers of the integrated circuit

Publications (2)

Publication Number Publication Date
CN105144381A CN105144381A (zh) 2015-12-09
CN105144381B true CN105144381B (zh) 2018-01-19

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CN201480014060.7A Expired - Fee Related CN105144381B (zh) 2013-03-15 2014-03-11 具有在集成电路的不同层上的读/写端口和访问逻辑单元的三维(3d)存储单元

Country Status (6)

Country Link
US (2) US9171608B2 (https=)
EP (1) EP2973706B1 (https=)
JP (2) JP6309608B2 (https=)
KR (2) KR20150132371A (https=)
CN (1) CN105144381B (https=)
WO (1) WO2014150317A1 (https=)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9064077B2 (en) 2012-11-28 2015-06-23 Qualcomm Incorporated 3D floorplanning using 2D and 3D blocks
US9098666B2 (en) 2012-11-28 2015-08-04 Qualcomm Incorporated Clock distribution network for 3D integrated circuit
US9536840B2 (en) 2013-02-12 2017-01-03 Qualcomm Incorporated Three-dimensional (3-D) integrated circuits (3DICS) with graphene shield, and related components and methods
US9041448B2 (en) 2013-03-05 2015-05-26 Qualcomm Incorporated Flip-flops in a monolithic three-dimensional (3D) integrated circuit (IC) (3DIC) and related methods
US9177890B2 (en) 2013-03-07 2015-11-03 Qualcomm Incorporated Monolithic three dimensional integration of semiconductor integrated circuits
US9171608B2 (en) 2013-03-15 2015-10-27 Qualcomm Incorporated Three-dimensional (3D) memory cell separation among 3D integrated circuit (IC) tiers, and related 3D integrated circuits (3DICS), 3DIC processor cores, and methods
US9418985B2 (en) 2013-07-16 2016-08-16 Qualcomm Incorporated Complete system-on-chip (SOC) using monolithic three dimensional (3D) integrated circuit (IC) (3DIC) technology
US9524920B2 (en) 2013-11-12 2016-12-20 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus and method of three dimensional conductive lines
US9123721B2 (en) * 2013-11-22 2015-09-01 Qualcomm Incorporated Placement of monolithic inter-tier vias (MIVs) within monolithic three dimensional (3D) integrated circuits (ICs) (3DICs) using clustering to increase usable whitespace
US9256246B1 (en) * 2015-01-29 2016-02-09 Qualcomm Incorporated Clock skew compensation with adaptive body biasing in three-dimensional (3D) integrated circuits (ICs) (3DICs)
US9537471B2 (en) 2015-02-09 2017-01-03 Qualcomm Incorporated Three dimensional logic circuit
US20190148286A1 (en) * 2015-09-21 2019-05-16 Monolithic 3D Inc. Multi-level semiconductor device and structure with memory
US11978731B2 (en) * 2015-09-21 2024-05-07 Monolithic 3D Inc. Method to produce a multi-level semiconductor memory device and structure
US9691695B2 (en) * 2015-08-31 2017-06-27 Taiwan Semiconductor Manufacturing Company, Ltd. Monolithic 3D integration inter-tier vias insertion scheme and associated layout structure
US9754660B2 (en) * 2015-11-19 2017-09-05 Samsung Electronics Co., Ltd. Semiconductor device
CN105304123B (zh) * 2015-12-04 2018-06-01 上海兆芯集成电路有限公司 静态随机存取存储器
US10672745B2 (en) * 2016-10-07 2020-06-02 Xcelsis Corporation 3D processor
TWI698871B (zh) * 2017-01-03 2020-07-11 聯華電子股份有限公司 六電晶體靜態隨機存取記憶體單元及其操作方法
US9929733B1 (en) * 2017-02-21 2018-03-27 Qualcomm Incorporated Connection propagation for inter-logical block connections in integrated circuits
US10176147B2 (en) 2017-03-07 2019-01-08 Qualcomm Incorporated Multi-processor core three-dimensional (3D) integrated circuits (ICs) (3DICs), and related methods
US10572344B2 (en) 2017-04-27 2020-02-25 Texas Instruments Incorporated Accessing error statistics from DRAM memories having integrated error correction
CN107240415B (zh) * 2017-06-06 2020-09-15 上海兆芯集成电路有限公司 储存装置
CN107230491B (zh) * 2017-06-06 2020-09-04 上海兆芯集成电路有限公司 储存装置的控制方法
JP2019160930A (ja) * 2018-03-09 2019-09-19 株式会社東芝 コンフィグレーションメモリ回路
US10599806B2 (en) * 2018-03-28 2020-03-24 Arm Limited Multi-tier co-placement for integrated circuitry
JP7426547B2 (ja) * 2018-10-29 2024-02-02 東京エレクトロン株式会社 半導体素子のモノリシック3d集積を行うためのアーキテクチャ
KR102174486B1 (ko) * 2019-02-27 2020-11-04 고려대학교 산학협력단 삼차원 크로스바 네트워크 기반의 그래픽 처리유닛
JP6901515B2 (ja) * 2019-04-04 2021-07-14 ウィンボンド エレクトロニクス コーポレーション 半導体装置
US12513984B2 (en) * 2020-06-18 2025-12-30 Intel Corporation Double-sided integrated circuit transistor structures with depopulated bottom channel regions
US11315628B1 (en) * 2020-10-21 2022-04-26 Arm Limited Techniques for powering memory
US11455454B2 (en) * 2020-11-24 2022-09-27 Arm Limited Methods and apparatuses for concurrent coupling of inter-tier connections
US11532353B2 (en) * 2021-01-29 2022-12-20 Arm Limited Circuitry apportioning of an integrated circuit
TWI912570B (zh) * 2021-12-16 2026-01-21 新加坡商發明與合作實驗室有限公司 高性能運算和高儲存容量的同構/異構積體電路系統
EP4199090A1 (en) 2021-12-20 2023-06-21 Imec VZW Multiport sram in sequential 3d technology
US12484207B2 (en) 2021-12-23 2025-11-25 Intel Corporation SRAM with channel count contrast for greater read stability

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101246740A (zh) * 2008-03-13 2008-08-20 复旦大学 一种超低功耗非挥发静态随机存取存储单元及其操作方法
US20080283995A1 (en) * 2007-05-18 2008-11-20 International Business Machines Corporation Compact multi-port cam cell implemented in 3d vertical integration
US20110222332A1 (en) * 2010-03-10 2011-09-15 Taiwan Semiconductor Manufacturing Company, Ltd. Fully Balanced Dual-Port Memory Cell
US20120195136A1 (en) * 2011-01-28 2012-08-02 Elpida Memory, Inc. Semiconductor device

Family Cites Families (143)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3593348B2 (ja) 1992-12-29 2004-11-24 富士通株式会社 集積回路
JPH07176688A (ja) 1993-12-20 1995-07-14 Mitsubishi Electric Corp 半導体集積回路
US5495419A (en) 1994-04-19 1996-02-27 Lsi Logic Corporation Integrated circuit physical design automation system utilizing optimization process decomposition and parallel processing
JPH097373A (ja) * 1995-06-20 1997-01-10 Oki Electric Ind Co Ltd 半導体記憶装置
US5724557A (en) 1995-07-10 1998-03-03 Motorola, Inc. Method for designing a signal distribution network
JPH09198870A (ja) * 1996-01-24 1997-07-31 Nippon Telegr & Teleph Corp <Ntt> マルチポートメモリ
US5760478A (en) 1996-08-20 1998-06-02 International Business Machines Corporation Clock skew minimization system and method for integrated circuits
US6374200B1 (en) 1997-02-03 2002-04-16 Fujitsu Limited Layout apparatus for laying out objects in space and method thereof
DE19740695C2 (de) * 1997-09-16 2002-11-21 Infineon Technologies Ag Datenspeicher mit Mehrebenenhierarchie
US6037822A (en) 1997-09-30 2000-03-14 Intel Corporation Method and apparatus for distributing a clock on the silicon backside of an integrated circuit
US6686623B2 (en) 1997-11-18 2004-02-03 Semiconductor Energy Laboratory Co., Ltd. Nonvolatile memory and electronic apparatus
US6295636B1 (en) 1998-02-20 2001-09-25 Lsi Logic Corporation RTL analysis for improved logic synthesis
JP4085459B2 (ja) 1998-03-02 2008-05-14 セイコーエプソン株式会社 3次元デバイスの製造方法
US6260182B1 (en) 1998-03-27 2001-07-10 Xilinx, Inc. Method for specifying routing in a logic module by direct module communication
US6305001B1 (en) 1998-06-18 2001-10-16 Lsi Logic Corporation Clock distribution network planning and method therefor
US6125217A (en) 1998-06-26 2000-09-26 Intel Corporation Clock distribution network
US7157314B2 (en) 1998-11-16 2007-01-02 Sandisk Corporation Vertically stacked field programmable nonvolatile memory and method of fabrication
FR2797713B1 (fr) 1999-08-20 2002-08-02 Soitec Silicon On Insulator Procede de traitement de substrats pour la microelectronique et substrats obtenus par ce procede
JP2001160612A (ja) 1999-12-01 2001-06-12 Takehide Shirato 半導体装置及びその製造方法
US7483329B2 (en) * 2000-01-06 2009-01-27 Super Talent Electronics, Inc. Flash card and controller with integrated voltage converter for attachment to a bus that can operate at either of two power-supply voltages
TW587252B (en) * 2000-01-18 2004-05-11 Hitachi Ltd Semiconductor memory device and data processing device
KR100549258B1 (ko) 2000-06-02 2006-02-03 주식회사 실트론 에스오아이 웨이퍼 제조 방법
US6834380B2 (en) 2000-08-03 2004-12-21 Qualcomm, Incorporated Automated EMC-driven layout and floor planning of electronic devices and systems
US7700454B2 (en) 2001-07-24 2010-04-20 Samsung Electronics Co., Ltd. Methods of forming integrated circuit electrodes and capacitors by wrinkling a layer that includes a high percentage of impurities
US6627985B2 (en) 2001-12-05 2003-09-30 Arbor Company Llp Reconfigurable processor module comprising hybrid stacked integrated circuit die elements
US6754877B1 (en) 2001-12-14 2004-06-22 Sequence Design, Inc. Method for optimal driver selection
US6670642B2 (en) * 2002-01-22 2003-12-30 Renesas Technology Corporation. Semiconductor memory device using vertical-channel transistors
US6730540B2 (en) 2002-04-18 2004-05-04 Tru-Si Technologies, Inc. Clock distribution networks and conductive lines in semiconductor integrated circuits
DE10226915A1 (de) 2002-06-17 2004-01-08 Infineon Technologies Ag Verfahren zum Verändern von Entwurfsdaten für die Herstellung eines Bauteils sowie zugehörige Einheiten
US6979630B2 (en) 2002-08-08 2005-12-27 Isonics Corporation Method and apparatus for transferring a thin layer of semiconductor material
US7209378B2 (en) 2002-08-08 2007-04-24 Micron Technology, Inc. Columnar 1T-N memory cell structure
US7358121B2 (en) 2002-08-23 2008-04-15 Intel Corporation Tri-gate devices and methods of fabrication
US7508034B2 (en) 2002-09-25 2009-03-24 Sharp Kabushiki Kaisha Single-crystal silicon substrate, SOI substrate, semiconductor device, display device, and manufacturing method of semiconductor device
US7042756B2 (en) 2002-10-18 2006-05-09 Viciciv Technology Configurable storage device
US6965527B2 (en) 2002-11-27 2005-11-15 Matrix Semiconductor, Inc Multibank memory on a die
US7138685B2 (en) 2002-12-11 2006-11-21 International Business Machines Corporation Vertical MOSFET SRAM cell
JP4554152B2 (ja) 2002-12-19 2010-09-29 株式会社半導体エネルギー研究所 半導体チップの作製方法
US6727530B1 (en) 2003-03-04 2004-04-27 Xindium Technologies, Inc. Integrated photodetector and heterojunction bipolar transistors
US6911375B2 (en) 2003-06-02 2005-06-28 International Business Machines Corporation Method of fabricating silicon devices on sapphire with wafer bonding at low temperature
US8071438B2 (en) 2003-06-24 2011-12-06 Besang Inc. Semiconductor circuit
JP4019021B2 (ja) * 2003-07-14 2007-12-05 日本テキサス・インスツルメンツ株式会社 半導体メモリセル
US7107200B1 (en) 2003-10-03 2006-09-12 Sun Microsystems, Inc. Method and apparatus for predicting clock skew for incomplete integrated circuit design
US7378702B2 (en) 2004-06-21 2008-05-27 Sang-Yun Lee Vertical memory device structures
JP4534132B2 (ja) * 2004-06-29 2010-09-01 エルピーダメモリ株式会社 積層型半導体メモリ装置
JP4421957B2 (ja) * 2004-06-29 2010-02-24 日本電気株式会社 3次元半導体装置
US7546571B2 (en) 2004-09-08 2009-06-09 Mentor Graphics Corporation Distributed electronic design automation environment
US20060190889A1 (en) 2005-01-14 2006-08-24 Cong Jingsheng J Circuit floorplanning and placement by look-ahead enabled recursive partitioning
WO2006135780A1 (en) 2005-06-10 2006-12-21 The Regents Of The University Of California Fast dual-vdd buffer insertion and buffered tree construction for power minimization
EP1907957A4 (en) 2005-06-29 2013-03-20 Otrsotech Ltd Liability Company INVESTMENT METHODS AND SYSTEMS
US7280397B2 (en) 2005-07-11 2007-10-09 Sandisk 3D Llc Three-dimensional non-volatile SRAM incorporating thin-film device layer
DE102005039365B4 (de) 2005-08-19 2022-02-10 Infineon Technologies Ag Gate-gesteuertes Fin-Widerstandselement, welches als pinch - resistor arbeitet, zur Verwendung als ESD-Schutzelement in einem elektrischen Schaltkreis und Einrichtung zum Schutz vor elektrostatischen Entladungen in einem elektrischen Schaltkreis
US7663620B2 (en) 2005-12-05 2010-02-16 Microsoft Corporation Accessing 2D graphic content using axonometric layer views
CA2580998A1 (en) 2006-03-03 2007-09-03 Queen's University At Kingston Adaptive analysis methods
US7579654B2 (en) 2006-05-31 2009-08-25 Corning Incorporated Semiconductor on insulator structure made using radiation annealing
KR20080038535A (ko) 2006-10-30 2008-05-07 삼성전자주식회사 스택형 반도체 장치의 제조 방법
US7859117B2 (en) 2007-02-27 2010-12-28 Taiwan Semiconductor Manufacturing Company, Ltd. Clocking architecture in stacked and bonded dice
US7669152B1 (en) 2007-03-13 2010-02-23 Silicon Frontline Technology Inc. Three-dimensional hierarchical coupling extraction
US7739642B2 (en) 2007-05-02 2010-06-15 Cadence Design Systems, Inc. Optimizing integrated circuit design through balanced combinational slack plus sequential slack
US7624364B2 (en) 2007-05-02 2009-11-24 Cadence Design Systems, Inc. Data path and placement optimization in an integrated circuit through use of sequential timing information
US20080291767A1 (en) 2007-05-21 2008-11-27 International Business Machines Corporation Multiple wafer level multiple port register file cell
US7796092B2 (en) 2007-05-24 2010-09-14 The Boeing Company Broadband composite dipole antenna arrays for optical wave mixing
US7459716B2 (en) 2007-06-11 2008-12-02 Kabushiki Kaisha Toshiba Resistance change memory device
KR100896883B1 (ko) 2007-08-16 2009-05-14 주식회사 동부하이텍 반도체칩, 이의 제조방법 및 이를 가지는 적층 패키지
US8136071B2 (en) 2007-09-12 2012-03-13 Neal Solomon Three dimensional integrated circuits and methods of fabrication
US8046727B2 (en) 2007-09-12 2011-10-25 Neal Solomon IP cores in reconfigurable three dimensional integrated circuits
US8059443B2 (en) 2007-10-23 2011-11-15 Hewlett-Packard Development Company, L.P. Three-dimensional memory module architectures
JP2009164480A (ja) 2008-01-09 2009-07-23 Toshiba Corp 抵抗変化メモリ装置
US7622955B2 (en) 2008-04-17 2009-11-24 Texas Instruments Incorporated Power savings with a level-shifting boundary isolation flip-flop (LSIFF) and a clock controlled data retention scheme
US8218377B2 (en) 2008-05-19 2012-07-10 Stmicroelectronics Pvt. Ltd. Fail-safe high speed level shifter for wide supply voltage range
US8716805B2 (en) 2008-06-10 2014-05-06 Toshiba America Research, Inc. CMOS integrated circuits with bonded layers containing functional electronic devices
US8060843B2 (en) 2008-06-18 2011-11-15 Taiwan Semiconductor Manufacturing Company, Ltd. Verification of 3D integrated circuits
US8006212B2 (en) 2008-07-30 2011-08-23 Synopsys, Inc. Method and system for facilitating floorplanning for 3D IC
EP2161755A1 (en) 2008-09-05 2010-03-10 University College Cork-National University of Ireland, Cork Junctionless Metal-Oxide-Semiconductor Transistor
US8230375B2 (en) 2008-09-14 2012-07-24 Raminda Udaya Madurawe Automated metal pattern generation for integrated circuits
WO2010062644A2 (en) 2008-10-28 2010-06-03 The Regents Of The University Of California Vertical group iii-v nanowires on si, heterostructures, flexible arrays and fabrication
KR20100048610A (ko) * 2008-10-31 2010-05-11 삼성전자주식회사 반도체 패키지 및 그 형성 방법
WO2010055462A1 (en) 2008-11-13 2010-05-20 Nxp B.V. Testable integrated circuit and test method therefor
US20100140790A1 (en) 2008-12-05 2010-06-10 Seagate Technology Llc Chip having thermal vias and spreaders of cvd diamond
US8146032B2 (en) 2009-01-30 2012-03-27 Synopsys, Inc. Method and apparatus for performing RLC modeling and extraction for three-dimensional integrated circuit (3D-IC) designs
US7884004B2 (en) 2009-02-04 2011-02-08 International Business Machines Corporation Maskless process for suspending and thinning nanowires
US8536629B2 (en) 2009-02-24 2013-09-17 Nec Corporation Semiconductor device and method for manufacturing the same
US8214790B2 (en) 2009-03-04 2012-07-03 Oracle America Low RC global clock distribution
US7964916B2 (en) 2009-04-14 2011-06-21 Monolithic 3D Inc. Method for fabrication of a semiconductor device and structure
US8362482B2 (en) 2009-04-14 2013-01-29 Monolithic 3D Inc. Semiconductor device and structure
US8115511B2 (en) 2009-04-14 2012-02-14 Monolithic 3D Inc. Method for fabrication of a semiconductor device and structure
US8258810B2 (en) 2010-09-30 2012-09-04 Monolithic 3D Inc. 3D semiconductor device
US9509313B2 (en) 2009-04-14 2016-11-29 Monolithic 3D Inc. 3D semiconductor device
US8395191B2 (en) 2009-10-12 2013-03-12 Monolithic 3D Inc. Semiconductor device and structure
WO2010134019A2 (en) 2009-05-19 2010-11-25 Ramot At Tel Aviv University Ltd. Vertical junction pv cells
US8422273B2 (en) 2009-05-21 2013-04-16 International Business Machines Corporation Nanowire mesh FET with multiple threshold voltages
CN102471664A (zh) 2009-06-30 2012-05-23 日立化成工业株式会社 感光性粘接剂、以及使用该粘接剂的膜状粘接剂、粘接片、粘接剂图形、带有粘接剂层的半导体晶片和半导体装置
JP4883203B2 (ja) 2009-07-01 2012-02-22 株式会社テラミクロス 半導体装置の製造方法
US7955940B2 (en) 2009-09-01 2011-06-07 International Business Machines Corporation Silicon-on-insulator substrate with built-in substrate junction
US8426309B2 (en) 2009-09-10 2013-04-23 Lockheed Martin Corporation Graphene nanoelectric device fabrication
KR101703207B1 (ko) * 2009-09-30 2017-02-06 알테라 코포레이션 압축 및 압축해제를 이용한 향상된 멀티 프로세서 파형 데이터 교환
US8164089B2 (en) 2009-10-08 2012-04-24 Xerox Corporation Electronic device
US8450804B2 (en) 2011-03-06 2013-05-28 Monolithic 3D Inc. Semiconductor device and structure for heat removal
US8247895B2 (en) 2010-01-08 2012-08-21 International Business Machines Corporation 4D device process and structure
US8026521B1 (en) 2010-10-11 2011-09-27 Monolithic 3D Inc. Semiconductor device and structure
US8298875B1 (en) 2011-03-06 2012-10-30 Monolithic 3D Inc. Method for fabrication of a semiconductor device and structure
US20120305893A1 (en) 2010-02-19 2012-12-06 University College Cork-National University of Ireland ,Cork Transistor device
US8450779B2 (en) 2010-03-08 2013-05-28 International Business Machines Corporation Graphene based three-dimensional integrated circuit device
JP5629309B2 (ja) 2010-03-15 2014-11-19 株式会社日立製作所 半導体装置およびそのテスト方法
US20110272788A1 (en) 2010-05-10 2011-11-10 International Business Machines Corporation Computer system wafer integrating different dies in stacked master-slave structures
US8395942B2 (en) 2010-05-17 2013-03-12 Sandisk Technologies Inc. Junctionless TFT NAND flash memory
US8332803B1 (en) 2010-06-28 2012-12-11 Xilinx, Inc. Method and apparatus for integrated circuit package thermo-mechanical reliability analysis
US7969193B1 (en) 2010-07-06 2011-06-28 National Tsing Hua University Differential sensing and TSV timing control scheme for 3D-IC
TWI562313B (en) 2010-09-06 2016-12-11 shu lu Chen Electrical switch using a recessed channel gated resistor structure and method for three dimensional integration of semiconductor device
US8273610B2 (en) * 2010-11-18 2012-09-25 Monolithic 3D Inc. Method of constructing a semiconductor device and structure
US8114757B1 (en) 2010-10-11 2012-02-14 Monolithic 3D Inc. Semiconductor device and structure
CN102754102B (zh) 2010-12-09 2016-02-03 松下电器产业株式会社 三维集成电路的设计支持装置及设计支持方法
US8691179B2 (en) 2011-01-04 2014-04-08 Korea Institute Of Science And Technology Method for fabricating graphene sheets or graphene particles using supercritical fluid
TWI405325B (zh) * 2011-01-19 2013-08-11 Global Unichip Corp 靜電放電保護電路
US8409957B2 (en) 2011-01-19 2013-04-02 International Business Machines Corporation Graphene devices and silicon field effect transistors in 3D hybrid integrated circuits
US8487378B2 (en) 2011-01-21 2013-07-16 Taiwan Semiconductor Manufacturing Company, Ltd. Non-uniform channel junction-less transistor
FR2972077B1 (fr) 2011-02-24 2013-08-30 Thales Sa Composant electronique, procede de fabrication et utilisation de graphene dans un composant electronique
WO2012119053A1 (en) 2011-03-02 2012-09-07 King Abdullah University Of Science And Technology Cylindrical-shaped nanotube field effect transistor
US8975670B2 (en) 2011-03-06 2015-03-10 Monolithic 3D Inc. Semiconductor device and structure for heat removal
FR2973938A1 (fr) 2011-04-08 2012-10-12 Soitec Silicon On Insulator Procédés de formation de structures semi-conductrices collées, et structures semi-conductrices formées par ces procédés
US8685825B2 (en) 2011-07-27 2014-04-01 Advanced Ion Beam Technology, Inc. Replacement source/drain finFET fabrication
FR2978604B1 (fr) 2011-07-28 2018-09-14 Soitec Procede de guerison de defauts dans une couche semi-conductrice
US8683416B1 (en) 2011-07-28 2014-03-25 Juniper Networks, Inc. Integrated circuit optimization
FR2978605B1 (fr) 2011-07-28 2015-10-16 Soitec Silicon On Insulator Procede de fabrication d'une structure semi-conductrice comprenant une couche fonctionnalisee sur un substrat support
US8576000B2 (en) 2011-08-25 2013-11-05 International Business Machines Corporation 3D chip stack skew reduction with resonant clock and inductive coupling
US8803233B2 (en) 2011-09-23 2014-08-12 International Business Machines Corporation Junctionless transistor
TWI573198B (zh) 2011-09-27 2017-03-01 索泰克公司 在三度空間集積製程中轉移材料層之方法及其相關結構與元件
US8580624B2 (en) 2011-11-01 2013-11-12 International Business Machines Corporation Nanowire FET and finFET hybrid technology
TWI456739B (zh) 2011-12-13 2014-10-11 Nat Univ Tsing Hua 三維記憶體晶片之控制結構
KR101786453B1 (ko) * 2011-12-28 2017-10-18 인텔 코포레이션 집적 회로 디바이스의 트랜지스터들을 적층한 장치 및 제조방법
JP5456090B2 (ja) 2012-03-13 2014-03-26 株式会社東芝 半導体装置およびその製造方法
KR20130126036A (ko) 2012-05-10 2013-11-20 삼성전자주식회사 트랜지스터를 구비한 반도체 소자
US8796829B2 (en) 2012-09-21 2014-08-05 Taiwan Semiconductor Manufacturing Company, Ltd. Thermal dissipation through seal rings in 3DIC structure
US8737108B2 (en) 2012-09-25 2014-05-27 Intel Corporation 3D memory configurable for performance and power
US8701073B1 (en) 2012-09-28 2014-04-15 Taiwan Semiconductor Manufacturing Co., Ltd. System and method for across-chip thermal and power management in stacked IC designs
US9490811B2 (en) 2012-10-04 2016-11-08 Efinix, Inc. Fine grain programmable gate architecture with hybrid logic/routing element and direct-drive routing
US9064077B2 (en) 2012-11-28 2015-06-23 Qualcomm Incorporated 3D floorplanning using 2D and 3D blocks
US9098666B2 (en) 2012-11-28 2015-08-04 Qualcomm Incorporated Clock distribution network for 3D integrated circuit
US9385058B1 (en) 2012-12-29 2016-07-05 Monolithic 3D Inc. Semiconductor device and structure
US20140225218A1 (en) 2013-02-12 2014-08-14 Qualcomm Incorporated Ion reduced, ion cut-formed three-dimensional (3d) integrated circuits (ic) (3dics), and related methods and systems
US9536840B2 (en) 2013-02-12 2017-01-03 Qualcomm Incorporated Three-dimensional (3-D) integrated circuits (3DICS) with graphene shield, and related components and methods
US9041448B2 (en) 2013-03-05 2015-05-26 Qualcomm Incorporated Flip-flops in a monolithic three-dimensional (3D) integrated circuit (IC) (3DIC) and related methods
US9177890B2 (en) 2013-03-07 2015-11-03 Qualcomm Incorporated Monolithic three dimensional integration of semiconductor integrated circuits
US9171608B2 (en) 2013-03-15 2015-10-27 Qualcomm Incorporated Three-dimensional (3D) memory cell separation among 3D integrated circuit (IC) tiers, and related 3D integrated circuits (3DICS), 3DIC processor cores, and methods

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080283995A1 (en) * 2007-05-18 2008-11-20 International Business Machines Corporation Compact multi-port cam cell implemented in 3d vertical integration
CN101246740A (zh) * 2008-03-13 2008-08-20 复旦大学 一种超低功耗非挥发静态随机存取存储单元及其操作方法
US20110222332A1 (en) * 2010-03-10 2011-09-15 Taiwan Semiconductor Manufacturing Company, Ltd. Fully Balanced Dual-Port Memory Cell
US20120195136A1 (en) * 2011-01-28 2012-08-02 Elpida Memory, Inc. Semiconductor device

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US20150302919A1 (en) 2015-10-22
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