CN104471693B - 形成导线互连结构的方法 - Google Patents

形成导线互连结构的方法 Download PDF

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Publication number
CN104471693B
CN104471693B CN201380037938.4A CN201380037938A CN104471693B CN 104471693 B CN104471693 B CN 104471693B CN 201380037938 A CN201380037938 A CN 201380037938A CN 104471693 B CN104471693 B CN 104471693B
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wire
length
bond
bonding
forming
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CN104471693A (zh
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T·J·小科洛西莫
J·W.·布伦纳
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Kulicke and Soffa Investments Inc
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Kulicke and Soffa Investments Inc
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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Wire Bonding (AREA)
CN201380037938.4A 2012-07-17 2013-07-01 形成导线互连结构的方法 Active CN104471693B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261672449P 2012-07-17 2012-07-17
US61/672,449 2012-07-17
PCT/US2013/048860 WO2014014643A1 (en) 2012-07-17 2013-07-01 Methods of forming wire interconnect structures

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CN104471693A CN104471693A (zh) 2015-03-25
CN104471693B true CN104471693B (zh) 2018-05-08

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US (3) US9502371B2 (enExample)
JP (1) JP6297553B2 (enExample)
KR (1) KR102094563B1 (enExample)
CN (1) CN104471693B (enExample)
TW (1) TWI531015B (enExample)
WO (1) WO2014014643A1 (enExample)

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US11145620B2 (en) * 2019-03-05 2021-10-12 Asm Technology Singapore Pte Ltd Formation of bonding wire vertical interconnects
US11543362B2 (en) * 2019-05-02 2023-01-03 Asmpt Singapore Pte. Ltd. Method for measuring the heights of wire interconnections
JP2022033633A (ja) 2020-08-17 2022-03-02 キオクシア株式会社 半導体装置
KR20220045684A (ko) 2020-10-06 2022-04-13 에스케이하이닉스 주식회사 지그재그 모양의 와이어를 포함하는 반도체 패키지
JP7471692B2 (ja) * 2020-11-25 2024-04-22 株式会社新川 ワイヤ形成方法及び半導体装置の製造方法
US12057431B2 (en) * 2020-12-18 2024-08-06 Kulicke And Soffa Industries, Inc. Methods of forming wire interconnect structures and related wire bonding tools
JP7441558B2 (ja) 2021-09-16 2024-03-01 株式会社新川 ピンワイヤ形成方法、及びワイヤボンディング装置
JP7741745B2 (ja) 2022-02-15 2025-09-18 キオクシア株式会社 半導体装置およびその製造方法
TW202347637A (zh) 2022-02-15 2023-12-01 美商庫利克和索夫工業公司 確定用於產生與工件相關的複數個導線迴路的順序的方法

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US20170345787A1 (en) 2017-11-30
US10153247B2 (en) 2018-12-11
KR20150036074A (ko) 2015-04-07
US20170040280A1 (en) 2017-02-09
US20150132888A1 (en) 2015-05-14
KR102094563B1 (ko) 2020-03-27
JP2015533258A (ja) 2015-11-19
CN104471693A (zh) 2015-03-25
TW201405683A (zh) 2014-02-01
JP6297553B2 (ja) 2018-03-20
US9502371B2 (en) 2016-11-22
WO2014014643A1 (en) 2014-01-23
TWI531015B (zh) 2016-04-21

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