CN103382547A - 电介质薄膜的反应溅射沉积 - Google Patents
电介质薄膜的反应溅射沉积 Download PDFInfo
- Publication number
- CN103382547A CN103382547A CN2013101694320A CN201310169432A CN103382547A CN 103382547 A CN103382547 A CN 103382547A CN 2013101694320 A CN2013101694320 A CN 2013101694320A CN 201310169432 A CN201310169432 A CN 201310169432A CN 103382547 A CN103382547 A CN 103382547A
- Authority
- CN
- China
- Prior art keywords
- gas
- sputter
- water vapour
- deposition
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0063—Reactive sputtering characterised by means for introducing or removing gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3417—Arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3464—Operating strategies
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Plasma Technology (AREA)
Abstract
Description
Claims (20)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810259657.8A CN108359945A (zh) | 2012-05-04 | 2013-05-06 | 电介质薄膜的反应溅射沉积 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261642752P | 2012-05-04 | 2012-05-04 | |
US61/642,752 | 2012-05-04 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810259657.8A Division CN108359945A (zh) | 2012-05-04 | 2013-05-06 | 电介质薄膜的反应溅射沉积 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103382547A true CN103382547A (zh) | 2013-11-06 |
CN103382547B CN103382547B (zh) | 2018-04-27 |
Family
ID=48190414
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810259657.8A Pending CN108359945A (zh) | 2012-05-04 | 2013-05-06 | 电介质薄膜的反应溅射沉积 |
CN201310169432.0A Active CN103382547B (zh) | 2012-05-04 | 2013-05-06 | 电介质薄膜的反应溅射沉积 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810259657.8A Pending CN108359945A (zh) | 2012-05-04 | 2013-05-06 | 电介质薄膜的反应溅射沉积 |
Country Status (4)
Country | Link |
---|---|
US (4) | US9988705B2 (zh) |
EP (1) | EP2660350B1 (zh) |
JP (2) | JP6244103B2 (zh) |
CN (2) | CN108359945A (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104630741A (zh) * | 2013-11-07 | 2015-05-20 | Spts科技有限公司 | 二氧化硅的沉积 |
CN110578127A (zh) * | 2019-10-31 | 2019-12-17 | 浙江工业大学 | 一种提升磁控溅射镀膜沉积速率装置 |
CN110578127B (zh) * | 2019-10-31 | 2024-05-24 | 浙江工业大学 | 一种提升磁控溅射镀膜沉积速率装置 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6244103B2 (ja) | 2012-05-04 | 2017-12-06 | ヴァイアヴィ・ソリューションズ・インコーポレイテッドViavi Solutions Inc. | 反応性スパッタ堆積のための方法および反応性スパッタ堆積システム |
WO2014097388A1 (ja) * | 2012-12-18 | 2014-06-26 | 株式会社アルバック | 成膜方法及び成膜装置 |
DE102014103744A1 (de) * | 2014-01-09 | 2015-02-26 | Von Ardenne Gmbh | Verfahren zum reaktiven Sputtern |
CN107532290B (zh) * | 2015-03-31 | 2022-04-01 | 布勒阿尔策瑙股份有限公司 | 用于生产涂覆的基板的方法 |
US10168459B2 (en) * | 2016-11-30 | 2019-01-01 | Viavi Solutions Inc. | Silicon-germanium based optical filter |
CN107841712B (zh) * | 2017-11-01 | 2018-10-30 | 浙江水晶光电科技股份有限公司 | 高折射率氢化硅薄膜的制备方法、高折射率氢化硅薄膜、滤光叠层和滤光片 |
US11038153B2 (en) * | 2019-01-15 | 2021-06-15 | Applied Materials, Inc. | Methods for HMDSO thermal stability |
CN111850471B (zh) * | 2019-04-25 | 2023-05-12 | 芝浦机械电子装置株式会社 | 成膜装置以及成膜方法 |
KR102385038B1 (ko) * | 2020-03-16 | 2022-04-12 | 티오에스주식회사 | 단결정 금속산화물 반도체 에피 성장 장치 |
CN114229968B (zh) * | 2021-11-22 | 2023-03-14 | 清华大学 | 电芬顿装置和处理污染物的方法 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3830721A (en) * | 1973-08-22 | 1974-08-20 | Atomic Energy Commission | Hollow cathode sputtering device |
US5122251A (en) * | 1989-06-13 | 1992-06-16 | Plasma & Materials Technologies, Inc. | High density plasma deposition and etching apparatus |
JPH0817268A (ja) * | 1994-07-01 | 1996-01-19 | Sumitomo Bakelite Co Ltd | 透明導電膜の製造方法 |
US5855745A (en) * | 1997-04-23 | 1999-01-05 | Sierra Applied Sciences, Inc. | Plasma processing system utilizing combined anode/ ion source |
US5989654A (en) * | 1996-07-08 | 1999-11-23 | Matsushita Electric Industrial Co., Ltd. | Method for manufacturing an optical information recording medium |
JP2000187892A (ja) * | 1998-12-21 | 2000-07-04 | Nec Corp | SiO2膜、相変化型光デイスク媒体および製造方法 |
JP2000192237A (ja) * | 1998-12-25 | 2000-07-11 | Teijin Ltd | 高透明ガスバリア性フィルムの製造方法 |
CN101356297A (zh) * | 2006-01-25 | 2009-01-28 | 株式会社爱发科 | 溅镀装置及成膜方法 |
CN102220561A (zh) * | 2010-04-16 | 2011-10-19 | Jds尤尼弗思公司 | 用于磁控溅射装置中的环状阴极 |
Family Cites Families (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4132357A (en) * | 1976-06-23 | 1979-01-02 | Inmont Corporation | Apparatus and method for spray application of solvent-thinned coating compositions |
US4547729A (en) * | 1979-10-10 | 1985-10-15 | Asea Aktiebolag | Optical fiber measuring devices |
JPS57161063A (en) * | 1981-03-31 | 1982-10-04 | Nippon Sheet Glass Co Ltd | Method and device for sticking metallic oxide film on substrate |
US4374867A (en) * | 1981-11-06 | 1983-02-22 | Bell Telephone Laboratories, Incorporated | Method of growing oxide layer on indium gallium arsenide |
JPS5976875A (ja) * | 1982-10-22 | 1984-05-02 | Hitachi Ltd | マグネトロン型スパッタ装置とそれに用いるターゲット |
JPS6436762A (en) * | 1987-07-31 | 1989-02-07 | Hitachi Condenser | Manufacture of transparent conductive film |
JPH01108372A (ja) * | 1987-10-22 | 1989-04-25 | Canon Inc | スパッタリング装置 |
JPH0668152B2 (ja) | 1988-01-27 | 1994-08-31 | 株式会社半導体エネルギー研究所 | 薄膜形成装置 |
US4851095A (en) | 1988-02-08 | 1989-07-25 | Optical Coating Laboratory, Inc. | Magnetron sputtering apparatus and process |
US5317006A (en) | 1989-06-15 | 1994-05-31 | Microelectronics And Computer Technology Corporation | Cylindrical magnetron sputtering system |
DE3920835C2 (de) * | 1989-06-24 | 1997-12-18 | Leybold Ag | Einrichtung zum Beschichten von Substraten |
EP0594568A1 (en) * | 1989-08-07 | 1994-05-04 | The Boc Group, Inc. | Method of depositing optical oxide coatings at enhanced rates |
US5660693A (en) * | 1991-01-18 | 1997-08-26 | Applied Vision Limited | Ion vapour deposition apparatus and method |
US5126318A (en) | 1991-03-13 | 1992-06-30 | Westinghouse Electric Corp. | Sputtering method for forming superconductive films using water vapor addition |
US5262032A (en) | 1991-05-28 | 1993-11-16 | Leybold Aktiengesellschaft | Sputtering apparatus with rotating target and target cooling |
DE4125110C2 (de) | 1991-07-30 | 1999-09-09 | Leybold Ag | Magnetron-Zerstäubungskathode für Vakuumbeschichtungsanlagen |
US5525199A (en) * | 1991-11-13 | 1996-06-11 | Optical Corporation Of America | Low pressure reactive magnetron sputtering apparatus and method |
US5334302A (en) * | 1991-11-15 | 1994-08-02 | Tokyo Electron Limited | Magnetron sputtering apparatus and sputtering gun for use in the same |
US5302493A (en) * | 1992-06-30 | 1994-04-12 | The Dow Chemical Company | Method for the preparation of optical recording media containing uniform partially oxidized metal layer |
JPH06293536A (ja) * | 1993-04-07 | 1994-10-21 | Asahi Glass Co Ltd | 熱線反射物品の製造方法 |
US5403458A (en) | 1993-08-05 | 1995-04-04 | Guardian Industries Corp. | Sputter-coating target and method of use |
JPH0770749A (ja) * | 1993-09-03 | 1995-03-14 | Canon Inc | 薄膜形成方法および装置 |
US5527439A (en) | 1995-01-23 | 1996-06-18 | The Boc Group, Inc. | Cylindrical magnetron shield structure |
US5591314A (en) | 1995-10-27 | 1997-01-07 | Morgan; Steven V. | Apparatus for affixing a rotating cylindrical magnetron target to a spindle |
JPH1079145A (ja) * | 1996-07-08 | 1998-03-24 | Matsushita Electric Ind Co Ltd | 光学的情報記録媒体の製造方法及びこれに用いる成膜装置 |
WO1998042890A1 (en) | 1997-03-21 | 1998-10-01 | Applied Films Corporation | Magnesium oxide sputtering apparatus |
JP2000226652A (ja) * | 1998-12-04 | 2000-08-15 | Sanyo Shinku Kogyo Kk | 薄膜の製造方法とその装置 |
JP2000297367A (ja) * | 1999-04-12 | 2000-10-24 | Canon Inc | 金属酸化物薄膜の成膜方法 |
US8900366B2 (en) | 2002-04-15 | 2014-12-02 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
JP2004296597A (ja) * | 2003-03-26 | 2004-10-21 | Canon Inc | 積層型光起電力素子の製造方法 |
US20050029091A1 (en) * | 2003-07-21 | 2005-02-10 | Chan Park | Apparatus and method for reactive sputtering deposition |
JP2005048260A (ja) * | 2003-07-31 | 2005-02-24 | Canon Inc | 反応性スパッタリング方法 |
US7879209B2 (en) * | 2004-08-20 | 2011-02-01 | Jds Uniphase Corporation | Cathode for sputter coating |
DK1630260T3 (da) * | 2004-08-20 | 2011-10-31 | Jds Uniphase Inc | Magnetisk holdemekanisme til et dampudfældningssystem |
GB0421389D0 (en) | 2004-09-25 | 2004-10-27 | Applied Multilayers Ltd | Material deposition apparatus and method |
JP4981282B2 (ja) * | 2005-09-06 | 2012-07-18 | キヤノン株式会社 | 薄膜トランジスタの製造方法 |
CA2626073A1 (en) | 2005-11-01 | 2007-05-10 | Cardinal Cg Company | Reactive sputter deposition processes and equipment |
JP2008192237A (ja) * | 2007-02-05 | 2008-08-21 | Canon Inc | 透明スタンパー及び透明スタンパーの製造方法 |
US20080308411A1 (en) | 2007-05-25 | 2008-12-18 | Energy Photovoltaics, Inc. | Method and process for deposition of textured zinc oxide thin films |
JP5123785B2 (ja) * | 2008-08-15 | 2013-01-23 | 株式会社アルバック | 反射防止膜の成膜方法及び反射防止膜 |
US20100200395A1 (en) | 2009-02-06 | 2010-08-12 | Anton Dietrich | Techniques for depositing transparent conductive oxide coatings using dual C-MAG sputter apparatuses |
US20120000768A1 (en) | 2010-07-02 | 2012-01-05 | Primestar Solar, Inc. | Methods for sputtering a resistive transparent buffer thin film for use in cadmium telluride based photovoltaic devices |
JP6244103B2 (ja) | 2012-05-04 | 2017-12-06 | ヴァイアヴィ・ソリューションズ・インコーポレイテッドViavi Solutions Inc. | 反応性スパッタ堆積のための方法および反応性スパッタ堆積システム |
-
2013
- 2013-05-02 JP JP2013096735A patent/JP6244103B2/ja active Active
- 2013-05-03 EP EP13166446.8A patent/EP2660350B1/en active Active
- 2013-05-03 US US13/887,013 patent/US9988705B2/en active Active
- 2013-05-06 CN CN201810259657.8A patent/CN108359945A/zh active Pending
- 2013-05-06 CN CN201310169432.0A patent/CN103382547B/zh active Active
-
2017
- 2017-11-13 JP JP2017218652A patent/JP6458118B2/ja active Active
-
2018
- 2018-06-04 US US15/997,079 patent/US10920310B2/en active Active
-
2021
- 2021-02-05 US US17/248,738 patent/US11584982B2/en active Active
-
2023
- 2023-02-17 US US18/171,058 patent/US20230203636A1/en active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3830721A (en) * | 1973-08-22 | 1974-08-20 | Atomic Energy Commission | Hollow cathode sputtering device |
US5122251A (en) * | 1989-06-13 | 1992-06-16 | Plasma & Materials Technologies, Inc. | High density plasma deposition and etching apparatus |
JPH0817268A (ja) * | 1994-07-01 | 1996-01-19 | Sumitomo Bakelite Co Ltd | 透明導電膜の製造方法 |
US5989654A (en) * | 1996-07-08 | 1999-11-23 | Matsushita Electric Industrial Co., Ltd. | Method for manufacturing an optical information recording medium |
US5855745A (en) * | 1997-04-23 | 1999-01-05 | Sierra Applied Sciences, Inc. | Plasma processing system utilizing combined anode/ ion source |
JP2000187892A (ja) * | 1998-12-21 | 2000-07-04 | Nec Corp | SiO2膜、相変化型光デイスク媒体および製造方法 |
JP2000192237A (ja) * | 1998-12-25 | 2000-07-11 | Teijin Ltd | 高透明ガスバリア性フィルムの製造方法 |
CN101356297A (zh) * | 2006-01-25 | 2009-01-28 | 株式会社爱发科 | 溅镀装置及成膜方法 |
CN102220561A (zh) * | 2010-04-16 | 2011-10-19 | Jds尤尼弗思公司 | 用于磁控溅射装置中的环状阴极 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104630741A (zh) * | 2013-11-07 | 2015-05-20 | Spts科技有限公司 | 二氧化硅的沉积 |
CN110578127A (zh) * | 2019-10-31 | 2019-12-17 | 浙江工业大学 | 一种提升磁控溅射镀膜沉积速率装置 |
CN110578127B (zh) * | 2019-10-31 | 2024-05-24 | 浙江工业大学 | 一种提升磁控溅射镀膜沉积速率装置 |
Also Published As
Publication number | Publication date |
---|---|
US10920310B2 (en) | 2021-02-16 |
JP6244103B2 (ja) | 2017-12-06 |
US20130292244A1 (en) | 2013-11-07 |
US20210156019A1 (en) | 2021-05-27 |
EP2660350A1 (en) | 2013-11-06 |
CN108359945A (zh) | 2018-08-03 |
US11584982B2 (en) | 2023-02-21 |
EP2660350B1 (en) | 2015-07-15 |
CN103382547B (zh) | 2018-04-27 |
JP2018048408A (ja) | 2018-03-29 |
JP2013241677A (ja) | 2013-12-05 |
JP6458118B2 (ja) | 2019-01-23 |
US20180282855A1 (en) | 2018-10-04 |
US20230203636A1 (en) | 2023-06-29 |
US9988705B2 (en) | 2018-06-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103382547A (zh) | 电介质薄膜的反应溅射沉积 | |
EP2799589B1 (en) | Vapor deposition method having pretreatment that uses plasma | |
JP5414772B2 (ja) | 光学薄膜を形成する成膜装置および成膜方法 | |
US8758580B2 (en) | Deposition system with a rotating drum | |
JP2010247369A (ja) | ガスバリア積層体の製造方法およびガスバリア積層体 | |
WO2013178288A1 (en) | Method for sputtering for processes with a pre-stabilized plasma | |
JP4708364B2 (ja) | ウルトラバリア膜の製造方法 | |
JP2005048260A (ja) | 反応性スパッタリング方法 | |
WO2016194559A1 (ja) | ガスバリア性フィルム | |
JP2020117787A (ja) | マグネトロンスパッタ法による成膜装置および成膜方法 | |
TW201540858A (zh) | 用以產生金屬氧化物塗層的系統和方法 | |
JP4026349B2 (ja) | 光学薄膜の作製方法 | |
JP2009275281A (ja) | スパッタリング方法及び装置 | |
JP3738154B2 (ja) | 複合金属化合物の薄膜形成方法及びその薄膜形成装置 | |
JP5312138B2 (ja) | スパッタリング方法 | |
JP4359674B2 (ja) | 光触媒酸化チタン膜の高速成膜方法 | |
JP2018012234A (ja) | ガスバリアー性フィルム及び電子デバイス | |
JP5234773B2 (ja) | 酸化チタン膜の形成方法 | |
JPWO2018034179A1 (ja) | ガスバリアー性膜、その製造方法及びそれを具備した電子デバイス | |
JP2023156156A (ja) | 成膜方法及び成膜装置 | |
JP2006328437A (ja) | 成膜装置および成膜方法 | |
JP2014084487A (ja) | 薄膜積層シートの形成方法、及び、薄膜積層シートの形成装置 | |
JPWO2018021021A1 (ja) | ガスバリア性膜、これを用いたガスバリア性フィルム、およびこれらを用いた電子デバイス、ならびにガスバリア性膜の製造方法 | |
KR20060077548A (ko) | 고분자 아이티오 복합층, 동 제조방법 및 동 제조장치 | |
JPH0757313B2 (ja) | 反応性プラズマビ−ム製膜装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: No. 430 Mccarthy Boulevard in California, Milpitas, America Applicant after: VIAVI Technology Co., Ltd. Address before: The United States of California, Milpitas Applicant before: Flex Products Inc. A. JDS Unipha |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: No. 430 Mccarthy Boulevard in California, Milpitas, America Patentee after: Only Yahweh Communication Technology Co Ltd Address before: No. 430 Mccarthy Boulevard in California, Milpitas, America Patentee before: VIAVI SOLUTIONS INC. |