JPS6436762A - Manufacture of transparent conductive film - Google Patents
Manufacture of transparent conductive filmInfo
- Publication number
- JPS6436762A JPS6436762A JP19212187A JP19212187A JPS6436762A JP S6436762 A JPS6436762 A JP S6436762A JP 19212187 A JP19212187 A JP 19212187A JP 19212187 A JP19212187 A JP 19212187A JP S6436762 A JPS6436762 A JP S6436762A
- Authority
- JP
- Japan
- Prior art keywords
- transparent conductive
- film
- conductive film
- gas
- above substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To stabilize a film without deteriorating electric conductivity, by forming a transparent conductive film and then exposing the film to an oxygen or steam atmosphere. CONSTITUTION:An insulating substrate 1, such as high polymer film, is allowed to travel on the peripheral surface of a can 4, and, right under the can 4, a transparent conductive film of indium oxide, etc., is vapor-deposited on the above substrate 1 by means of sputtering. Subsequently, at the time of passing the above substrate 1 on a heating roller 5 prior to winding or at the time of winding, an oxygen gas or a steam gas is blown through a gas-introducing pipe 6 against the above substrate 1. By this method, the rate of change in film resistance can be reduced and the general-purpose transparent conductive film can be obtained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19212187A JPS6436762A (en) | 1987-07-31 | 1987-07-31 | Manufacture of transparent conductive film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19212187A JPS6436762A (en) | 1987-07-31 | 1987-07-31 | Manufacture of transparent conductive film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6436762A true JPS6436762A (en) | 1989-02-07 |
Family
ID=16286022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19212187A Pending JPS6436762A (en) | 1987-07-31 | 1987-07-31 | Manufacture of transparent conductive film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6436762A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130292244A1 (en) * | 2012-05-04 | 2013-11-07 | Georg J. Ockenfuss | Reactive sputter deposition of dielectric films |
-
1987
- 1987-07-31 JP JP19212187A patent/JPS6436762A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130292244A1 (en) * | 2012-05-04 | 2013-11-07 | Georg J. Ockenfuss | Reactive sputter deposition of dielectric films |
| US9988705B2 (en) * | 2012-05-04 | 2018-06-05 | Viavi Solutions Inc. | Reactive sputter deposition of silicon films |
| US10920310B2 (en) | 2012-05-04 | 2021-02-16 | Viavi Solutions Inc. | Reactive sputter deposition of dielectric films |
| US11584982B2 (en) | 2012-05-04 | 2023-02-21 | Viavi Solutions Inc. | Reactive sputter deposition of dielectric films |
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