JPS54134396A - Transparent conductive film and its manufacturing process - Google Patents

Transparent conductive film and its manufacturing process

Info

Publication number
JPS54134396A
JPS54134396A JP4145478A JP4145478A JPS54134396A JP S54134396 A JPS54134396 A JP S54134396A JP 4145478 A JP4145478 A JP 4145478A JP 4145478 A JP4145478 A JP 4145478A JP S54134396 A JPS54134396 A JP S54134396A
Authority
JP
Japan
Prior art keywords
oxide film
transparent conductive
tin oxide
indium oxide
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4145478A
Other languages
Japanese (ja)
Inventor
Shizuko Katsube
Takayuki Katsube
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP4145478A priority Critical patent/JPS54134396A/en
Publication of JPS54134396A publication Critical patent/JPS54134396A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To form transparent conductive film having chemically stable heat resistance by coating tin oxide film on indium oxide film and compensating for the respective losses.
CONSTITUTION: Indium oxide film is produced on a heated glass plate by vacuum deposition or sputtering and tin oxide film also on it by the same method. It is heat-treated in the air. Since this transparent conductive film consists of the lower layer low resistance indium oxide and the upper layer higher resistance tin oxide film, its conductivity is mainly controlled by the lower layer low resistance indium oxide. Accordingly, this low resistance value is overcoated by the upper layer tin oxide film and its high thermal stability is kept. The low contact resistance with the joint on the surface is also kept by this upper layer film.
COPYRIGHT: (C)1979,JPO&Japio
JP4145478A 1978-04-08 1978-04-08 Transparent conductive film and its manufacturing process Pending JPS54134396A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4145478A JPS54134396A (en) 1978-04-08 1978-04-08 Transparent conductive film and its manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4145478A JPS54134396A (en) 1978-04-08 1978-04-08 Transparent conductive film and its manufacturing process

Publications (1)

Publication Number Publication Date
JPS54134396A true JPS54134396A (en) 1979-10-18

Family

ID=12608812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4145478A Pending JPS54134396A (en) 1978-04-08 1978-04-08 Transparent conductive film and its manufacturing process

Country Status (1)

Country Link
JP (1) JPS54134396A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58218705A (en) * 1982-06-14 1983-12-20 株式会社半導体エネルギ−研究所 Method of producing low resistance transparent conductive film
JPS58218704A (en) * 1982-06-14 1983-12-20 株式会社　半導体エネルギ−研究所 Low resistance transparent conductive film and method of producing same
EP0534425A3 (en) * 1991-09-25 1993-12-29 Canon Kk Photovoltaic device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5222789A (en) * 1975-08-13 1977-02-21 Toppan Printing Co Ltd Transparent conductive film
JPS5249489A (en) * 1975-10-17 1977-04-20 Matsushita Electric Ind Co Ltd Transparent multi-layer conductive film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5222789A (en) * 1975-08-13 1977-02-21 Toppan Printing Co Ltd Transparent conductive film
JPS5249489A (en) * 1975-10-17 1977-04-20 Matsushita Electric Ind Co Ltd Transparent multi-layer conductive film

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58218705A (en) * 1982-06-14 1983-12-20 株式会社半導体エネルギ−研究所 Method of producing low resistance transparent conductive film
JPS58218704A (en) * 1982-06-14 1983-12-20 株式会社　半導体エネルギ−研究所 Low resistance transparent conductive film and method of producing same
JPH0370329B2 (en) * 1982-06-14 1991-11-07 Handotai Energy Kenkyusho
EP0534425A3 (en) * 1991-09-25 1993-12-29 Canon Kk Photovoltaic device
US5342452A (en) * 1991-09-25 1994-08-30 Canon Kabushiki Kaisha Photovoltaic device

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