JPS6438907A - Transparent conductive membrane and its manufacture - Google Patents

Transparent conductive membrane and its manufacture

Info

Publication number
JPS6438907A
JPS6438907A JP62203916A JP20391687A JPS6438907A JP S6438907 A JPS6438907 A JP S6438907A JP 62203916 A JP62203916 A JP 62203916A JP 20391687 A JP20391687 A JP 20391687A JP S6438907 A JPS6438907 A JP S6438907A
Authority
JP
Japan
Prior art keywords
transparent conductive
conductive layer
oxygen
amount
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62203916A
Other languages
Japanese (ja)
Inventor
Masateru Nakajima
Minoru Osada
Hiroshi Yamaguchi
Takayuki Yamanaka
Shizuo Kosuge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lincstech Circuit Co Ltd
Original Assignee
Hitachi Condenser Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Condenser Co Ltd filed Critical Hitachi Condenser Co Ltd
Priority to JP62203916A priority Critical patent/JPS6438907A/en
Publication of JPS6438907A publication Critical patent/JPS6438907A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)

Abstract

PURPOSE:To prevent damage of an insulator substrate as well as to improve the mechanical durability and the like by providing the first transparent conductive layer consisting mainly of a metal oxide laminated on the surface of the insulating substrate, and the second transparent conductive layer including a larger amount of oxygen, consisting of a metal oxide laminated on the surface of the first transparent layer. CONSTITUTION:The first transparent conductive layer 2 is formed by covering the surface of a high polymer film which consists of polyethylene terephthalate film with indium oxide or the like in the spattering in a vacuum condition. The second transparent conductive layer 3 which consists of mainly indium oxide formed over the surface of the first transparent conductive layer 2 is formed to include the oxygen of the amount more than the first transparent conductive layer 2. Since the layer including more oxygen amount is formed at the surface, the mechanical durability can be improved, and since the heat treatment is not required after the membrane is formed, a transparent conductive membrane not damaging the substrate can be obtained.
JP62203916A 1987-07-31 1987-08-17 Transparent conductive membrane and its manufacture Pending JPS6438907A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62203916A JPS6438907A (en) 1987-07-31 1987-08-17 Transparent conductive membrane and its manufacture

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19212287 1987-07-31
JP62203916A JPS6438907A (en) 1987-07-31 1987-08-17 Transparent conductive membrane and its manufacture

Publications (1)

Publication Number Publication Date
JPS6438907A true JPS6438907A (en) 1989-02-09

Family

ID=26507121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62203916A Pending JPS6438907A (en) 1987-07-31 1987-08-17 Transparent conductive membrane and its manufacture

Country Status (1)

Country Link
JP (1) JPS6438907A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009199812A (en) * 2008-02-20 2009-09-03 Oike Ind Co Ltd Base board with transparent conductive film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009199812A (en) * 2008-02-20 2009-09-03 Oike Ind Co Ltd Base board with transparent conductive film

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