JPS53102881A - Manufacture of mold with transparent electrocoductive membrane - Google Patents

Manufacture of mold with transparent electrocoductive membrane

Info

Publication number
JPS53102881A
JPS53102881A JP1770177A JP1770177A JPS53102881A JP S53102881 A JPS53102881 A JP S53102881A JP 1770177 A JP1770177 A JP 1770177A JP 1770177 A JP1770177 A JP 1770177A JP S53102881 A JPS53102881 A JP S53102881A
Authority
JP
Japan
Prior art keywords
mold
manufacture
electrocoductive
membrane
transparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1770177A
Other languages
Japanese (ja)
Other versions
JPS6135268B2 (en
Inventor
Hitoshi Mikoshiba
Norio Takagi
Masato Sugiyama
Kunihiko Teranishi
Yuji Mitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JAPAN ELECTRONIC IND DEV ASSOC<JEIDA>
Teijin Ltd
Original Assignee
JAPAN ELECTRONIC IND DEV ASSOC<JEIDA>
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JAPAN ELECTRONIC IND DEV ASSOC<JEIDA>, Teijin Ltd filed Critical JAPAN ELECTRONIC IND DEV ASSOC<JEIDA>
Priority to JP1770177A priority Critical patent/JPS53102881A/en
Publication of JPS53102881A publication Critical patent/JPS53102881A/en
Publication of JPS6135268B2 publication Critical patent/JPS6135268B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5826—Treatment with charged particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/5853—Oxidation

Abstract

PURPOSE:To manufacture mold with uniform electroconductive film continuously by activating O2 atmosphere through electric discharge reaction in gas phase contg. O2 in the formation of film described in the title composed of metal (lower oxide) on the surface of a mold, and by contacting the atmosphere with the film on the mold.
JP1770177A 1977-02-22 1977-02-22 Manufacture of mold with transparent electrocoductive membrane Granted JPS53102881A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1770177A JPS53102881A (en) 1977-02-22 1977-02-22 Manufacture of mold with transparent electrocoductive membrane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1770177A JPS53102881A (en) 1977-02-22 1977-02-22 Manufacture of mold with transparent electrocoductive membrane

Publications (2)

Publication Number Publication Date
JPS53102881A true JPS53102881A (en) 1978-09-07
JPS6135268B2 JPS6135268B2 (en) 1986-08-12

Family

ID=11951081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1770177A Granted JPS53102881A (en) 1977-02-22 1977-02-22 Manufacture of mold with transparent electrocoductive membrane

Country Status (1)

Country Link
JP (1) JPS53102881A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07209501A (en) * 1983-05-23 1995-08-11 A O Inc Wear-resistant optical part for preventing charging and manufacture thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0473659U (en) * 1990-11-07 1992-06-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07209501A (en) * 1983-05-23 1995-08-11 A O Inc Wear-resistant optical part for preventing charging and manufacture thereof

Also Published As

Publication number Publication date
JPS6135268B2 (en) 1986-08-12

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