JPS5472499A - Manufacture of transparent conductive film - Google Patents

Manufacture of transparent conductive film

Info

Publication number
JPS5472499A
JPS5472499A JP14022877A JP14022877A JPS5472499A JP S5472499 A JPS5472499 A JP S5472499A JP 14022877 A JP14022877 A JP 14022877A JP 14022877 A JP14022877 A JP 14022877A JP S5472499 A JPS5472499 A JP S5472499A
Authority
JP
Japan
Prior art keywords
base plate
plasma
conductive film
film
deposited film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14022877A
Other languages
Japanese (ja)
Inventor
Masahiro Hayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14022877A priority Critical patent/JPS5472499A/en
Publication of JPS5472499A publication Critical patent/JPS5472499A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04M—TELEPHONIC COMMUNICATION
    • H04M11/00—Telephonic communication systems specially adapted for combination with other electrical systems
    • H04M11/06—Simultaneous speech and data transmission, e.g. telegraphic transmission over the same conductors
    • H04M11/066—Telephone sets adapted for data transmision
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A30/00—Adapting or protecting infrastructure or their operation

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Signal Processing (AREA)
  • Manufacturing Of Electric Cables (AREA)

Abstract

PURPOSE:To obtain cheap, high performance transparent conductive film by oxidizing a specific deposited film, as, for example, of indium oxide, on a base plate in the plasma of oxygen gas. CONSTITUTION:A deposited film is formed on a base plate by using a metal oxide consisting of indium oxide or tin oxide and impurities, as an evaporation source. Then, the base plate is dipped in the plasma of oxygen gas to oxidize the deposited film by means of activated oxygen atom in the plasma, forming a highly transparent film. In this way, a conductive film of a good transparency can be manufactured at comparatively low temperature in very short time. For this reason, the selectivity of base plate becomes much wider without the heat resistance being restricted.
JP14022877A 1977-11-21 1977-11-21 Manufacture of transparent conductive film Pending JPS5472499A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14022877A JPS5472499A (en) 1977-11-21 1977-11-21 Manufacture of transparent conductive film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14022877A JPS5472499A (en) 1977-11-21 1977-11-21 Manufacture of transparent conductive film

Publications (1)

Publication Number Publication Date
JPS5472499A true JPS5472499A (en) 1979-06-09

Family

ID=15263877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14022877A Pending JPS5472499A (en) 1977-11-21 1977-11-21 Manufacture of transparent conductive film

Country Status (1)

Country Link
JP (1) JPS5472499A (en)

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