JPS6439783A - Manufacture of superconducting element - Google Patents

Manufacture of superconducting element

Info

Publication number
JPS6439783A
JPS6439783A JP62196727A JP19672787A JPS6439783A JP S6439783 A JPS6439783 A JP S6439783A JP 62196727 A JP62196727 A JP 62196727A JP 19672787 A JP19672787 A JP 19672787A JP S6439783 A JPS6439783 A JP S6439783A
Authority
JP
Japan
Prior art keywords
film
josephoson
completed
filming
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62196727A
Other languages
Japanese (ja)
Inventor
Takashi Hirao
Kentaro Setsune
Masatoshi Kitagawa
Kiyotaka Wasa
Takeshi Kamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62196727A priority Critical patent/JPS6439783A/en
Publication of JPS6439783A publication Critical patent/JPS6439783A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—Processes performed after copper oxide formation, e.g. patterning

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)

Abstract

PURPOSE:To form a Josephoson element including a tunnel junction in a structure to be highly integrated with excellent reproducibility by a method wherein ion current is irradiated with oxygen plasma stream during the filming process of Y-Ba-Cu-O to control the physical properties of the film. CONSTITUTION:A Y-Ba-Cu-O film 2, a tempered Y-Ba-Cu-O film 3 in different oxygen concentration and another Y-Ba-Cu-O film 4 similar to the film 2 can be formed on a substrate 1 by supplying current i1, i2 and i1 respectively at the filming start time, times t1-t2 and t2-t3. An element is completed after forming electrodes 5, 6 by etching process. In other words, a Josephoson junction layer comprising the superconducting thin films 2, 4 and the film 3 made of insulator or normal conduction part can be completed.
JP62196727A 1987-08-06 1987-08-06 Manufacture of superconducting element Pending JPS6439783A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62196727A JPS6439783A (en) 1987-08-06 1987-08-06 Manufacture of superconducting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62196727A JPS6439783A (en) 1987-08-06 1987-08-06 Manufacture of superconducting element

Publications (1)

Publication Number Publication Date
JPS6439783A true JPS6439783A (en) 1989-02-10

Family

ID=16362587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62196727A Pending JPS6439783A (en) 1987-08-06 1987-08-06 Manufacture of superconducting element

Country Status (1)

Country Link
JP (1) JPS6439783A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02248302A (en) * 1989-03-22 1990-10-04 Agency Of Ind Science & Technol Method and device for producing oxide superconductor
JPH02260674A (en) * 1989-03-31 1990-10-23 Sumitomo Electric Ind Ltd Tunnel type josephson element and manufacture thereof
JPH02311313A (en) * 1989-05-24 1990-12-26 Matsushita Electric Ind Co Ltd Production of thin film superconductor
JPH04184984A (en) * 1990-11-20 1992-07-01 Agency Of Ind Science & Technol Working method for yttrium oxide superconducting thin film
US5284824A (en) * 1988-03-16 1994-02-08 Kabushiki Kaisha Toshiba Method for manufacturing an oxide superconductor thin film

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5284824A (en) * 1988-03-16 1994-02-08 Kabushiki Kaisha Toshiba Method for manufacturing an oxide superconductor thin film
JPH02248302A (en) * 1989-03-22 1990-10-04 Agency Of Ind Science & Technol Method and device for producing oxide superconductor
JPH02260674A (en) * 1989-03-31 1990-10-23 Sumitomo Electric Ind Ltd Tunnel type josephson element and manufacture thereof
JPH02311313A (en) * 1989-05-24 1990-12-26 Matsushita Electric Ind Co Ltd Production of thin film superconductor
JPH04184984A (en) * 1990-11-20 1992-07-01 Agency Of Ind Science & Technol Working method for yttrium oxide superconducting thin film

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