JPS5353972A - Anodic treatment method - Google Patents

Anodic treatment method

Info

Publication number
JPS5353972A
JPS5353972A JP12907176A JP12907176A JPS5353972A JP S5353972 A JPS5353972 A JP S5353972A JP 12907176 A JP12907176 A JP 12907176A JP 12907176 A JP12907176 A JP 12907176A JP S5353972 A JPS5353972 A JP S5353972A
Authority
JP
Japan
Prior art keywords
treatment method
anodic treatment
immersing
electrolyte
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12907176A
Other languages
Japanese (ja)
Other versions
JPS5751927B2 (en
Inventor
Kazutoshi Nagano
Kosei Kajiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12907176A priority Critical patent/JPS5353972A/en
Publication of JPS5353972A publication Critical patent/JPS5353972A/en
Publication of JPS5751927B2 publication Critical patent/JPS5751927B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To make porous Si of a uniform film thickness on Si substrate surfaces with good controllability by immersing the substrates in electrolyte and limiting the current passage between first, second electrodes with a third electrode.
COPYRIGHT: (C)1978,JPO&Japio
JP12907176A 1976-10-26 1976-10-26 Anodic treatment method Granted JPS5353972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12907176A JPS5353972A (en) 1976-10-26 1976-10-26 Anodic treatment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12907176A JPS5353972A (en) 1976-10-26 1976-10-26 Anodic treatment method

Publications (2)

Publication Number Publication Date
JPS5353972A true JPS5353972A (en) 1978-05-16
JPS5751927B2 JPS5751927B2 (en) 1982-11-05

Family

ID=15000352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12907176A Granted JPS5353972A (en) 1976-10-26 1976-10-26 Anodic treatment method

Country Status (1)

Country Link
JP (1) JPS5353972A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160061338A (en) * 2013-09-27 2016-05-31 선파워 코포레이션 Enhanced porosification

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160061338A (en) * 2013-09-27 2016-05-31 선파워 코포레이션 Enhanced porosification
JP2016533647A (en) * 2013-09-27 2016-10-27 サンパワー コーポレイション Enhancement of porosity

Also Published As

Publication number Publication date
JPS5751927B2 (en) 1982-11-05

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