JPS5353972A - Anodic treatment method - Google Patents
Anodic treatment methodInfo
- Publication number
- JPS5353972A JPS5353972A JP12907176A JP12907176A JPS5353972A JP S5353972 A JPS5353972 A JP S5353972A JP 12907176 A JP12907176 A JP 12907176A JP 12907176 A JP12907176 A JP 12907176A JP S5353972 A JPS5353972 A JP S5353972A
- Authority
- JP
- Japan
- Prior art keywords
- treatment method
- anodic treatment
- immersing
- electrolyte
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To make porous Si of a uniform film thickness on Si substrate surfaces with good controllability by immersing the substrates in electrolyte and limiting the current passage between first, second electrodes with a third electrode.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12907176A JPS5353972A (en) | 1976-10-26 | 1976-10-26 | Anodic treatment method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12907176A JPS5353972A (en) | 1976-10-26 | 1976-10-26 | Anodic treatment method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5353972A true JPS5353972A (en) | 1978-05-16 |
JPS5751927B2 JPS5751927B2 (en) | 1982-11-05 |
Family
ID=15000352
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12907176A Granted JPS5353972A (en) | 1976-10-26 | 1976-10-26 | Anodic treatment method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5353972A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160061338A (en) * | 2013-09-27 | 2016-05-31 | 선파워 코포레이션 | Enhanced porosification |
-
1976
- 1976-10-26 JP JP12907176A patent/JPS5353972A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160061338A (en) * | 2013-09-27 | 2016-05-31 | 선파워 코포레이션 | Enhanced porosification |
JP2016533647A (en) * | 2013-09-27 | 2016-10-27 | サンパワー コーポレイション | Enhancement of porosity |
Also Published As
Publication number | Publication date |
---|---|
JPS5751927B2 (en) | 1982-11-05 |
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