JPS5372463A - Electrolytic reaction unit - Google Patents
Electrolytic reaction unitInfo
- Publication number
- JPS5372463A JPS5372463A JP14804076A JP14804076A JPS5372463A JP S5372463 A JPS5372463 A JP S5372463A JP 14804076 A JP14804076 A JP 14804076A JP 14804076 A JP14804076 A JP 14804076A JP S5372463 A JPS5372463 A JP S5372463A
- Authority
- JP
- Japan
- Prior art keywords
- reaction unit
- electrolytic reaction
- electrolytic solution
- immersing
- uniform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To uniform the electric field applied to the wafer and to make uniformity the reaction on the entire wafer surface, by immersing the opposed electrode into the electrolytic solution at all times even with less quantity of flow of electrolytic solution.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14804076A JPS5372463A (en) | 1976-12-08 | 1976-12-08 | Electrolytic reaction unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14804076A JPS5372463A (en) | 1976-12-08 | 1976-12-08 | Electrolytic reaction unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5372463A true JPS5372463A (en) | 1978-06-27 |
Family
ID=15443771
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14804076A Pending JPS5372463A (en) | 1976-12-08 | 1976-12-08 | Electrolytic reaction unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5372463A (en) |
-
1976
- 1976-12-08 JP JP14804076A patent/JPS5372463A/en active Pending
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