JPS5372463A - Electrolytic reaction unit - Google Patents

Electrolytic reaction unit

Info

Publication number
JPS5372463A
JPS5372463A JP14804076A JP14804076A JPS5372463A JP S5372463 A JPS5372463 A JP S5372463A JP 14804076 A JP14804076 A JP 14804076A JP 14804076 A JP14804076 A JP 14804076A JP S5372463 A JPS5372463 A JP S5372463A
Authority
JP
Japan
Prior art keywords
reaction unit
electrolytic reaction
electrolytic solution
immersing
uniform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14804076A
Other languages
Japanese (ja)
Inventor
Kuniyuki Hamano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP14804076A priority Critical patent/JPS5372463A/en
Publication of JPS5372463A publication Critical patent/JPS5372463A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To uniform the electric field applied to the wafer and to make uniformity the reaction on the entire wafer surface, by immersing the opposed electrode into the electrolytic solution at all times even with less quantity of flow of electrolytic solution.
COPYRIGHT: (C)1978,JPO&Japio
JP14804076A 1976-12-08 1976-12-08 Electrolytic reaction unit Pending JPS5372463A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14804076A JPS5372463A (en) 1976-12-08 1976-12-08 Electrolytic reaction unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14804076A JPS5372463A (en) 1976-12-08 1976-12-08 Electrolytic reaction unit

Publications (1)

Publication Number Publication Date
JPS5372463A true JPS5372463A (en) 1978-06-27

Family

ID=15443771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14804076A Pending JPS5372463A (en) 1976-12-08 1976-12-08 Electrolytic reaction unit

Country Status (1)

Country Link
JP (1) JPS5372463A (en)

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