JPS56114388A - Manufacture of josephson element - Google Patents

Manufacture of josephson element

Info

Publication number
JPS56114388A
JPS56114388A JP1692380A JP1692380A JPS56114388A JP S56114388 A JPS56114388 A JP S56114388A JP 1692380 A JP1692380 A JP 1692380A JP 1692380 A JP1692380 A JP 1692380A JP S56114388 A JPS56114388 A JP S56114388A
Authority
JP
Japan
Prior art keywords
substrate
film
connecting part
eaves
depth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1692380A
Other languages
Japanese (ja)
Other versions
JPS605231B2 (en
Inventor
Yaichiro Watakabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP55016923A priority Critical patent/JPS605231B2/en
Publication of JPS56114388A publication Critical patent/JPS56114388A/en
Publication of JPS605231B2 publication Critical patent/JPS605231B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To obtain the element having a connecting part of high precision by a method wherein when the bridge type Josephson element is formed on an insulated subtrate, a step being formed on the substrate, a film projected in eaveslike being formed on the step and the eaves being partially removed to permit the connecting part of the element to be situated at the position where the eaves are partially removed. CONSTITUTION:A film 6 composed of metal, semiconductor insulator and the like is formed on the substrate 5 of glass, sapphire etc., unnecessary part thereof being removed by a phototype process and etching and molded. Then, the substrate 1 is side-etched by applying a dry etching in the use of CF4 gas containing a very small amount of O2 with the molded film to cause the step l of the order of 0.01mum to be formed on the substrate. Thereafter, a depth of cut W of about 1mum wide is formed in the center of the projected film 6 by the phototype process and laser and the like and superconductor films 7, 8 of Nb, Pb etc. are cover-attached extending over the film 6 to the substrate 5 to allow the connecting part 9 of the films 7, 8 to be formed at the position of the depth of cut W. Thus, the precision of the connecting part 9 is satisfied and the stabilized element can be obtained.
JP55016923A 1980-02-13 1980-02-13 Manufacturing method of Josephson device Expired JPS605231B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55016923A JPS605231B2 (en) 1980-02-13 1980-02-13 Manufacturing method of Josephson device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55016923A JPS605231B2 (en) 1980-02-13 1980-02-13 Manufacturing method of Josephson device

Publications (2)

Publication Number Publication Date
JPS56114388A true JPS56114388A (en) 1981-09-08
JPS605231B2 JPS605231B2 (en) 1985-02-08

Family

ID=11929641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55016923A Expired JPS605231B2 (en) 1980-02-13 1980-02-13 Manufacturing method of Josephson device

Country Status (1)

Country Link
JP (1) JPS605231B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4454522A (en) * 1981-11-05 1984-06-12 The Board Of Trustees Of The Leland Stanford Junior University Microbridge superconducting device having support with stepped parallel surfaces
JPS6043886A (en) * 1983-08-20 1985-03-08 Mitsubishi Electric Corp Manufacture of josephson element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4454522A (en) * 1981-11-05 1984-06-12 The Board Of Trustees Of The Leland Stanford Junior University Microbridge superconducting device having support with stepped parallel surfaces
JPS6043886A (en) * 1983-08-20 1985-03-08 Mitsubishi Electric Corp Manufacture of josephson element

Also Published As

Publication number Publication date
JPS605231B2 (en) 1985-02-08

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