JPS5687387A - Manufacture of josephson element - Google Patents

Manufacture of josephson element

Info

Publication number
JPS5687387A
JPS5687387A JP16444879A JP16444879A JPS5687387A JP S5687387 A JPS5687387 A JP S5687387A JP 16444879 A JP16444879 A JP 16444879A JP 16444879 A JP16444879 A JP 16444879A JP S5687387 A JPS5687387 A JP S5687387A
Authority
JP
Japan
Prior art keywords
film
evaporation
section
thickness
lift
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16444879A
Other languages
Japanese (ja)
Other versions
JPS6156876B2 (en
Inventor
Yaichiro Watakabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP16444879A priority Critical patent/JPS5687387A/en
Publication of JPS5687387A publication Critical patent/JPS5687387A/en
Publication of JPS6156876B2 publication Critical patent/JPS6156876B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To permit the control of the thickness of a junction section with good accuracy by thickening only conductive films after thinly forming and controlling the thickness of two superconductive films comstituting electrode sections and that of the junction section between the films by a vertical evaporation method. CONSTITUTION:A film 5 for lift off is formed on a substrate 4 and a resist film 6 is applied on the film 5 to form an opening section 61 after painting a desired Josephson element pattern. And a superconductor such as Nb or the like is evaporated on the opposite part of the opening section 51 at the bottom of a concave section 41 in a nearly vertical direction to the main surface of the substrate 4 and the first evaporation 7 is formed so that a part 71 becoming a junction section 3 may become desired thickness. Next, a superconductor having the same quality (heterogeneity) as the first evaporation film 7 is evaporated in a slant direction to the main surface of the substrate 4 to form an evaporation film 7a of about 1,000Angstrom in thickness uniting with the first evaporation film 7 except the section 71. Finally, the removal of etching is applied to the film 5 for lift off and the characteristics with stability will be obtained by lifting off the film 5 for lift off and the second evaporation film 7a on the film 5.
JP16444879A 1979-12-17 1979-12-17 Manufacture of josephson element Granted JPS5687387A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16444879A JPS5687387A (en) 1979-12-17 1979-12-17 Manufacture of josephson element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16444879A JPS5687387A (en) 1979-12-17 1979-12-17 Manufacture of josephson element

Publications (2)

Publication Number Publication Date
JPS5687387A true JPS5687387A (en) 1981-07-15
JPS6156876B2 JPS6156876B2 (en) 1986-12-04

Family

ID=15793353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16444879A Granted JPS5687387A (en) 1979-12-17 1979-12-17 Manufacture of josephson element

Country Status (1)

Country Link
JP (1) JPS5687387A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5313074A (en) * 1990-05-31 1994-05-17 Osaka Gas Company Limited Josephson device formed over a recess step with protective layer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146987A (en) * 1979-05-07 1980-11-15 Fujitsu Ltd Manufacture of tunnel junction type josephson element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146987A (en) * 1979-05-07 1980-11-15 Fujitsu Ltd Manufacture of tunnel junction type josephson element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5313074A (en) * 1990-05-31 1994-05-17 Osaka Gas Company Limited Josephson device formed over a recess step with protective layer
US5401530A (en) * 1990-05-31 1995-03-28 Osaka Gas Company, Ltd. Process for fabricating a Josephson device

Also Published As

Publication number Publication date
JPS6156876B2 (en) 1986-12-04

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