JPS5688384A - Manufacture of josephson junction element - Google Patents

Manufacture of josephson junction element

Info

Publication number
JPS5688384A
JPS5688384A JP16475979A JP16475979A JPS5688384A JP S5688384 A JPS5688384 A JP S5688384A JP 16475979 A JP16475979 A JP 16475979A JP 16475979 A JP16475979 A JP 16475979A JP S5688384 A JPS5688384 A JP S5688384A
Authority
JP
Japan
Prior art keywords
pattern
electrode
film
photosensitive resin
evaporated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16475979A
Other languages
Japanese (ja)
Other versions
JPS6257114B2 (en
Inventor
Koji Yamada
Yoshinobu Taruya
Junji Shigeta
Ushio Kawabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP16475979A priority Critical patent/JPS5688384A/en
Publication of JPS5688384A publication Critical patent/JPS5688384A/en
Publication of JPS6257114B2 publication Critical patent/JPS6257114B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Abstract

PURPOSE:To reduce the irregularity of tunnel resistor as low as possible in a Josephson junction element by evaporating it at room temperature and forming it without any step. CONSTITUTION:A thin film 2' formed of superconductive material becoming a lower electrode like Au-In-Pb of 2, 8 and 90wt% is evaporated on the entire surface of a substrate 1 at room temperature, and a photosensitive resin pattern 6 is formed on the film 2'. With the pattern 6 as a mask the film 2' is formed as a lower electrode, an SiO thin film 5 is evaporated in the same height as the thickness of the film of the electrode 2 while the photosensitive resin on the electrode 2 is retained, the resin is removed, and the photosensitive resin pattern 7 is formed on the flat surface. With the pattern 7 as a mask the exposed surface of the electrode 2 is polished, is thinly oxidized, and an insulating film is formed thereon. Thereafter, thin films 4, 4' becoming upper electrode formed of several % of Au and the residue of Pb are evaporated on the surfaces of the pattern 7, the SiO, and the photosensitive resin is dissolved and removed. Thus, it can reduce the irregularity in the tunner resistor.
JP16475979A 1979-12-20 1979-12-20 Manufacture of josephson junction element Granted JPS5688384A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16475979A JPS5688384A (en) 1979-12-20 1979-12-20 Manufacture of josephson junction element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16475979A JPS5688384A (en) 1979-12-20 1979-12-20 Manufacture of josephson junction element

Publications (2)

Publication Number Publication Date
JPS5688384A true JPS5688384A (en) 1981-07-17
JPS6257114B2 JPS6257114B2 (en) 1987-11-30

Family

ID=15799378

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16475979A Granted JPS5688384A (en) 1979-12-20 1979-12-20 Manufacture of josephson junction element

Country Status (1)

Country Link
JP (1) JPS5688384A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0090612A2 (en) * 1982-03-26 1983-10-05 Unisys Corporation Method of making Josephson junction devices
JPS58209184A (en) * 1982-05-31 1983-12-06 Nec Corp Manufacture of josephson junction element

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102542504B1 (en) * 2021-03-04 2023-06-12 한양대학교 에리카산학협력단 Device for Converting Energy

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0090612A2 (en) * 1982-03-26 1983-10-05 Unisys Corporation Method of making Josephson junction devices
JPS58171877A (en) * 1982-03-26 1983-10-08 スペリ−・コ−ポレ−シヨン Method of producing flatted josephson junction element
JPH0376597B2 (en) * 1982-03-26 1991-12-05 Unisys Corp
JPS58209184A (en) * 1982-05-31 1983-12-06 Nec Corp Manufacture of josephson junction element
JPH0479152B2 (en) * 1982-05-31 1992-12-15 Nippon Electric Co

Also Published As

Publication number Publication date
JPS6257114B2 (en) 1987-11-30

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