JPS56120154A - Coil and its manufacture - Google Patents
Coil and its manufactureInfo
- Publication number
- JPS56120154A JPS56120154A JP2321980A JP2321980A JPS56120154A JP S56120154 A JPS56120154 A JP S56120154A JP 2321980 A JP2321980 A JP 2321980A JP 2321980 A JP2321980 A JP 2321980A JP S56120154 A JPS56120154 A JP S56120154A
- Authority
- JP
- Japan
- Prior art keywords
- metallic
- coil
- strip piece
- prepd
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000009413 insulation Methods 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000000465 moulding Methods 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/004—Printed inductances with the coil helically wound around an axis without a core
Abstract
PURPOSE:To obtain a coil by providing a metallic film pattern in an insulation film on the surface of a semiconductor and connecting the said pattern to a metallic film pattern formed through the intermediary of an insulation film. CONSTITUTION:An epitaxial layer 2 on a silicon substrate 1 is separated 12 and is coated with a silicon oxide film 3. An n-p-n transistor is prepd. in a region T and a metallic strip piece 4 is prepd. in a region L at the same time as an electrode 15 for the transistor. Next, an insulation film of desired thickness 5 is overlaid to set a prearranged coil cross-sectional area. Then an opening is made at the end of the strip piece 4 and a metallic strip piece 6 is prepd. through the coating/patterning of the strip piece with a metallic film. With this constitution, it is possible to form a coil easily, utilizing the molding process of a circuit element for an integrated circuit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2321980A JPS56120154A (en) | 1980-02-26 | 1980-02-26 | Coil and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2321980A JPS56120154A (en) | 1980-02-26 | 1980-02-26 | Coil and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56120154A true JPS56120154A (en) | 1981-09-21 |
Family
ID=12104537
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2321980A Pending JPS56120154A (en) | 1980-02-26 | 1980-02-26 | Coil and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56120154A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09219468A (en) * | 1996-12-09 | 1997-08-19 | Shinko Electric Ind Co Ltd | Electronic component base |
-
1980
- 1980-02-26 JP JP2321980A patent/JPS56120154A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09219468A (en) * | 1996-12-09 | 1997-08-19 | Shinko Electric Ind Co Ltd | Electronic component base |
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