JPS55146987A - Manufacture of tunnel junction type josephson element - Google Patents

Manufacture of tunnel junction type josephson element

Info

Publication number
JPS55146987A
JPS55146987A JP5540179A JP5540179A JPS55146987A JP S55146987 A JPS55146987 A JP S55146987A JP 5540179 A JP5540179 A JP 5540179A JP 5540179 A JP5540179 A JP 5540179A JP S55146987 A JPS55146987 A JP S55146987A
Authority
JP
Japan
Prior art keywords
electrode
substrate
mask
arrow
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5540179A
Other languages
Japanese (ja)
Inventor
Takeshi Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5540179A priority Critical patent/JPS55146987A/en
Publication of JPS55146987A publication Critical patent/JPS55146987A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To obtain the film thickness is accordance with an original design by using a mask, which has a tunnel junctioln forming part and finger-shaped conduction contact forming parts that extend in the directions different from each other, when an oxide film is put on the substrate on which the electrode-wiring part is previously provided. CONSTITUTION:The window 21 to form a tunnel junction and slot-shaped ones 221, 222 to form a conduction contact part for the electrode-wiring part are opened in the mask pattern to form Josephson element. Next, the mask is placed on the Al substrate 11 in which the electrode-wiring part has already been formed, a superconductive material is evaporated onto the substrate in the direction of the arrow a that is parallel to the window 221 and perpendicular to the window 222 in order to form the lower electrode 31 and the conduction contact part 311. After this, an oxide film is provided on it by high frequency plasma discharge oxidation while the mask is left as it is, and next the same treatment is given to the substrate in the direction of the arrow b that is perpendicular to the arrow a in order to form the upper electrode 32 on the oxide film.
JP5540179A 1979-05-07 1979-05-07 Manufacture of tunnel junction type josephson element Pending JPS55146987A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5540179A JPS55146987A (en) 1979-05-07 1979-05-07 Manufacture of tunnel junction type josephson element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5540179A JPS55146987A (en) 1979-05-07 1979-05-07 Manufacture of tunnel junction type josephson element

Publications (1)

Publication Number Publication Date
JPS55146987A true JPS55146987A (en) 1980-11-15

Family

ID=12997505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5540179A Pending JPS55146987A (en) 1979-05-07 1979-05-07 Manufacture of tunnel junction type josephson element

Country Status (1)

Country Link
JP (1) JPS55146987A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5683087A (en) * 1979-12-11 1981-07-07 Mitsubishi Electric Corp Manufacture of josephson element
JPS5687387A (en) * 1979-12-17 1981-07-15 Mitsubishi Electric Corp Manufacture of josephson element

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5683087A (en) * 1979-12-11 1981-07-07 Mitsubishi Electric Corp Manufacture of josephson element
JPS6156875B2 (en) * 1979-12-11 1986-12-04 Mitsubishi Electric Corp
JPS5687387A (en) * 1979-12-17 1981-07-15 Mitsubishi Electric Corp Manufacture of josephson element
JPS6156876B2 (en) * 1979-12-17 1986-12-04 Mitsubishi Electric Corp

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