JPS57126185A - Manufacture of josephson element - Google Patents

Manufacture of josephson element

Info

Publication number
JPS57126185A
JPS57126185A JP56011822A JP1182281A JPS57126185A JP S57126185 A JPS57126185 A JP S57126185A JP 56011822 A JP56011822 A JP 56011822A JP 1182281 A JP1182281 A JP 1182281A JP S57126185 A JPS57126185 A JP S57126185A
Authority
JP
Japan
Prior art keywords
layer
bapb1
over
oxide superconductor
high resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56011822A
Other languages
Japanese (ja)
Other versions
JPS6258554B2 (en
Inventor
Toshiaki Murakami
Yoichi Enomoto
Minoru Suzuki
Takashi Inukai
Takahiro Inamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP56011822A priority Critical patent/JPS57126185A/en
Publication of JPS57126185A publication Critical patent/JPS57126185A/en
Publication of JPS6258554B2 publication Critical patent/JPS6258554B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To obtain an element of good characteristics by a method wherein the first oxide superconductor layer of BaPb1-xBixO3 is formed on an insulating substrate, and an insulation layer is applied over it and by an opening provided, a region of the exposed superconductor layer is transformed into a high resistance layer by sputter etching process, and all over the surface including it the second oxide superconductor layer of BaPb1-yBiyO3 is provided. CONSTITUTION:On an insulating substrate 31 consisting of sapphire or the like the first oxide superconductor layer 33 of BaPb1-xBixO3 (0.05<=x<=0.3) is attached, and all over it an insulation layer 35 of Al2O3 or SiO2 or the like is formed. Subsequently a window 34 is bored at the center, and a sputter etching process is performed on a region of the exposed layer 33 in an atmosphere containing Ar and O2, and a high resistance layer 36 is formed here while the thickness of the layer 33 is decreased. Subsequently all over the surface including them the second oxide superconductor layer 37 of BaPb1-yBiyO3 (0.05<=y<=0.3) is applied again and covered with an insulation layer 38, and a superconductor layer 39 for control is provided on the insulation layer 38 in corespondence with the Josephson junction 8 consisting of the high resistance layer 36.
JP56011822A 1981-01-28 1981-01-28 Manufacture of josephson element Granted JPS57126185A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56011822A JPS57126185A (en) 1981-01-28 1981-01-28 Manufacture of josephson element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56011822A JPS57126185A (en) 1981-01-28 1981-01-28 Manufacture of josephson element

Publications (2)

Publication Number Publication Date
JPS57126185A true JPS57126185A (en) 1982-08-05
JPS6258554B2 JPS6258554B2 (en) 1987-12-07

Family

ID=11788465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56011822A Granted JPS57126185A (en) 1981-01-28 1981-01-28 Manufacture of josephson element

Country Status (1)

Country Link
JP (1) JPS57126185A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6430279A (en) * 1987-07-27 1989-02-01 Matsushita Electric Ind Co Ltd Superconducting device and manufacture thereof
JPH01199453A (en) * 1988-02-04 1989-08-10 Fujitsu Ltd Manufacture of superconductor element
JPH0269981A (en) * 1988-09-05 1990-03-08 Matsushita Electric Ind Co Ltd Josephson device and manufacture of it

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425641U (en) * 1990-06-20 1992-02-28

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6430279A (en) * 1987-07-27 1989-02-01 Matsushita Electric Ind Co Ltd Superconducting device and manufacture thereof
JPH01199453A (en) * 1988-02-04 1989-08-10 Fujitsu Ltd Manufacture of superconductor element
JPH0269981A (en) * 1988-09-05 1990-03-08 Matsushita Electric Ind Co Ltd Josephson device and manufacture of it

Also Published As

Publication number Publication date
JPS6258554B2 (en) 1987-12-07

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