JPS648682A - Manufacture of ceramic superconductor device - Google Patents
Manufacture of ceramic superconductor deviceInfo
- Publication number
- JPS648682A JPS648682A JP62164484A JP16448487A JPS648682A JP S648682 A JPS648682 A JP S648682A JP 62164484 A JP62164484 A JP 62164484A JP 16448487 A JP16448487 A JP 16448487A JP S648682 A JPS648682 A JP S648682A
- Authority
- JP
- Japan
- Prior art keywords
- superconductor
- film
- thin
- ceramic superconductor
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002887 superconductor Substances 0.000 title abstract 9
- 239000000919 ceramic Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 230000005668 Josephson effect Effects 0.000 abstract 2
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 abstract 2
- 229910052786 argon Inorganic materials 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 229910052797 bismuth Inorganic materials 0.000 abstract 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 abstract 1
- 229910000416 bismuth oxide Inorganic materials 0.000 abstract 1
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910021521 yttrium barium copper oxide Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0408—Processes for depositing or forming copper oxide superconductor layers by sputtering
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
PURPOSE:To obtain a ceramic superconductor having uniform and stable characteristics by covering a surface, on which a ceramic superconductor Josephson effect device is formed, with an extremely thin bismuth film, and then oxidizing the thin Bi film as a stable extrathin insulating film in nm order. CONSTITUTION:A strontium titanate single crystalline substrate 1 is set in a small-sized sputtering device, sputtered by a target of YBa2Cu3O7 in an atmosphere of argon and oxygen mixture to form a striplike superconductor 2. A thin Bi film 3 is deposited on a center of the superconductor 2 with a mask, heated at 800-900 deg.C in the air for 10min to form a bismuth oxide film 3. Then, a striplike superconductor 4 is so formed by the same method as to perpendicularly cross the superconductor 2 on the Bi2O3 film. Gold electrodes 5 are deposited on the terminals of the superconductors 2, 4 to obtain a ceramic superconductor device 6 utilizing Josephson effect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62164484A JPS648682A (en) | 1987-06-30 | 1987-06-30 | Manufacture of ceramic superconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62164484A JPS648682A (en) | 1987-06-30 | 1987-06-30 | Manufacture of ceramic superconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS648682A true JPS648682A (en) | 1989-01-12 |
Family
ID=15794046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62164484A Pending JPS648682A (en) | 1987-06-30 | 1987-06-30 | Manufacture of ceramic superconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS648682A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01167222A (en) * | 1987-12-22 | 1989-06-30 | Sumitomo Electric Ind Ltd | Production of superconducting thin film |
| JPH01188665A (en) * | 1988-01-22 | 1989-07-27 | Sumitomo Electric Ind Ltd | Production of superconducting thin film |
| JPH01188663A (en) * | 1988-01-22 | 1989-07-27 | Sumitomo Electric Ind Ltd | Production of superconducting thin film |
| JPH02298087A (en) * | 1989-05-12 | 1990-12-10 | Matsushita Electric Ind Co Ltd | Manufacture of superconductive device |
| EP0440791A1 (en) * | 1987-09-29 | 1991-08-14 | Mitsubishi Materials Corporation | Structure of superconductor wiring and process for its production |
-
1987
- 1987-06-30 JP JP62164484A patent/JPS648682A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0440791A1 (en) * | 1987-09-29 | 1991-08-14 | Mitsubishi Materials Corporation | Structure of superconductor wiring and process for its production |
| JPH01167222A (en) * | 1987-12-22 | 1989-06-30 | Sumitomo Electric Ind Ltd | Production of superconducting thin film |
| JPH01188665A (en) * | 1988-01-22 | 1989-07-27 | Sumitomo Electric Ind Ltd | Production of superconducting thin film |
| JPH01188663A (en) * | 1988-01-22 | 1989-07-27 | Sumitomo Electric Ind Ltd | Production of superconducting thin film |
| JPH02298087A (en) * | 1989-05-12 | 1990-12-10 | Matsushita Electric Ind Co Ltd | Manufacture of superconductive device |
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