JPS6464276A - Superconducting device - Google Patents
Superconducting deviceInfo
- Publication number
- JPS6464276A JPS6464276A JP62220126A JP22012687A JPS6464276A JP S6464276 A JPS6464276 A JP S6464276A JP 62220126 A JP62220126 A JP 62220126A JP 22012687 A JP22012687 A JP 22012687A JP S6464276 A JPS6464276 A JP S6464276A
- Authority
- JP
- Japan
- Prior art keywords
- deposited
- oxide superconductor
- lattice
- thin film
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
PURPOSE:To realize the high density integration, by forming a planar lattice defect on a lattice face of a part of crystal lattice of an oxide superconductor. CONSTITUTION:On a substrate 1, an insulating film 2 is deposited by sputtering method, and successively a thin film type oxide superconductor 3 of YBa2Cu3 O7-z is deposited by molecular beam evaporation method. Then a thin film of Ag or the like is deposited, and an oxide superconductor 5 composed of YBa2Cu3O7-z is again deposited. By heating this at a temperature of about 900 deg.C in an atmosphere of pure oxygen, lattice defect 4 is formed, and superconductivity is decreased at this part. As a result, a superconducting weak coupled element can be formed. After this is processed by chemical etching method, an insulating film 6 composed of SiO2 is formed by chemical vapor growth method, and successively processed by reactive plasma etching method using CF4 gas. Finally, lead-out electrodes 7 are formed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62220126A JPS6464276A (en) | 1987-09-04 | 1987-09-04 | Superconducting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62220126A JPS6464276A (en) | 1987-09-04 | 1987-09-04 | Superconducting device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6464276A true JPS6464276A (en) | 1989-03-10 |
Family
ID=16746317
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62220126A Pending JPS6464276A (en) | 1987-09-04 | 1987-09-04 | Superconducting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6464276A (en) |
-
1987
- 1987-09-04 JP JP62220126A patent/JPS6464276A/en active Pending
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