JPS56109824A - Manufacture of oxide superconductive thin film - Google Patents

Manufacture of oxide superconductive thin film

Info

Publication number
JPS56109824A
JPS56109824A JP1202780A JP1202780A JPS56109824A JP S56109824 A JPS56109824 A JP S56109824A JP 1202780 A JP1202780 A JP 1202780A JP 1202780 A JP1202780 A JP 1202780A JP S56109824 A JPS56109824 A JP S56109824A
Authority
JP
Japan
Prior art keywords
thin film
manufacture
oxide
film
oxide superconductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1202780A
Other languages
Japanese (ja)
Other versions
JPS6161556B2 (en
Inventor
Minoru Suzuki
Toshiaki Murakami
Takahiro Inamura
Takashi Inukai
Yoichi Enomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP1202780A priority Critical patent/JPS56109824A/en
Priority to US06/202,640 priority patent/US4316785A/en
Priority to FR8023545A priority patent/FR2469005A1/en
Publication of JPS56109824A publication Critical patent/JPS56109824A/en
Publication of JPS6161556B2 publication Critical patent/JPS6161556B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE: To manufacture the titled uniform, flat thin film by heat treating a thin film formed by high-frequency sputtering using a porcelain target made of oxide having a specified composition contg. Pb, Bi and Ba.
CONSTITUTION: A thin film of the compound of formula I (where x=0.05W0.35) is formed by high-frequency sputtering using porcelain of formula I as a target in an Ar-O2 mixed atmosphere contg. 10W50% O2 under 4×10×10-2 Torr atmospheric pressure while applying 1W2kV anode voltage. The thin film is then heat- treated at 500W550°C in an oxidizing atmosphere to manufacture an oxide superconductive thin oxide film. This film is uniform and flat and enables the manufacture of a Josephson device or other device having a minute structure.
COPYRIGHT: (C)1981,JPO&Japio
JP1202780A 1979-11-05 1980-02-05 Manufacture of oxide superconductive thin film Granted JPS56109824A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1202780A JPS56109824A (en) 1980-02-05 1980-02-05 Manufacture of oxide superconductive thin film
US06/202,640 US4316785A (en) 1979-11-05 1980-10-31 Oxide superconductor Josephson junction and fabrication method therefor
FR8023545A FR2469005A1 (en) 1979-11-05 1980-11-04 JOSEPHSON JUNCTION OF OXIDE-BASED SUPRACONDUCTORS AND ITS MANUFACTURING PROCESS

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1202780A JPS56109824A (en) 1980-02-05 1980-02-05 Manufacture of oxide superconductive thin film

Publications (2)

Publication Number Publication Date
JPS56109824A true JPS56109824A (en) 1981-08-31
JPS6161556B2 JPS6161556B2 (en) 1986-12-26

Family

ID=11794114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1202780A Granted JPS56109824A (en) 1979-11-05 1980-02-05 Manufacture of oxide superconductive thin film

Country Status (1)

Country Link
JP (1) JPS56109824A (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61168530A (en) * 1985-01-21 1986-07-30 Nippon Telegr & Teleph Corp <Ntt> Superconductive oxide material and production thereof
JPS6460925A (en) * 1987-08-31 1989-03-08 Semiconductor Energy Lab Fabricating method for superconductive material
JPS6465003A (en) * 1987-01-30 1989-03-10 Agency Ind Science Techn Superconductive material and production thereof
JPS6467823A (en) * 1987-09-07 1989-03-14 Semiconductor Energy Lab Formation of oxide superconducting film
JPS6467824A (en) * 1987-09-07 1989-03-14 Semiconductor Energy Lab Forming device for oxide superconducting material
JPS6476903A (en) * 1987-09-16 1989-03-23 Semiconductor Energy Lab Apparatus for producing oxide superconducting material
US4892862A (en) * 1987-04-13 1990-01-09 Hitachi, Ltd. Process for producing superconducting material
US4996185A (en) * 1987-05-31 1991-02-26 Sumitomo Electric Industries, Ltd. Ceramic superconducting thin film
US5057201A (en) * 1987-03-14 1991-10-15 Sumitomo Electric Industries, Ltd. Process for depositing a superconducting thin film
US5126315A (en) * 1987-02-27 1992-06-30 Hitachi, Ltd. High tc superconducting device with weak link between two superconducting electrodes
US5478800A (en) * 1987-02-05 1995-12-26 Sumitomo Electric Industries, Ltd. Process for preparing a superconducting thin film
US5814583A (en) * 1987-07-06 1998-09-29 Sumitomo Electric Industries, Ltd. Superconducting thin film and a method for preparing the same

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61168530A (en) * 1985-01-21 1986-07-30 Nippon Telegr & Teleph Corp <Ntt> Superconductive oxide material and production thereof
JPH0476324B2 (en) * 1987-01-30 1992-12-03 Kogyo Gijutsuin
JPS6465003A (en) * 1987-01-30 1989-03-10 Agency Ind Science Techn Superconductive material and production thereof
US5478800A (en) * 1987-02-05 1995-12-26 Sumitomo Electric Industries, Ltd. Process for preparing a superconducting thin film
US5126315A (en) * 1987-02-27 1992-06-30 Hitachi, Ltd. High tc superconducting device with weak link between two superconducting electrodes
US6069369A (en) * 1987-02-27 2000-05-30 Hitachi, Ltd. Superconducting device
US5552375A (en) * 1987-02-27 1996-09-03 Hitachi, Ltd. Method for forming high Tc superconducting devices
US5057201A (en) * 1987-03-14 1991-10-15 Sumitomo Electric Industries, Ltd. Process for depositing a superconducting thin film
US4892862A (en) * 1987-04-13 1990-01-09 Hitachi, Ltd. Process for producing superconducting material
US4996185A (en) * 1987-05-31 1991-02-26 Sumitomo Electric Industries, Ltd. Ceramic superconducting thin film
US5814583A (en) * 1987-07-06 1998-09-29 Sumitomo Electric Industries, Ltd. Superconducting thin film and a method for preparing the same
US6121630A (en) * 1987-07-06 2000-09-19 Sumitomo Electric Industries, Ltd. Superconducting thin film and a method for preparing the same
JPH0559041B2 (en) * 1987-08-31 1993-08-30 Handotai Energy Kenkyusho
JPS6460925A (en) * 1987-08-31 1989-03-08 Semiconductor Energy Lab Fabricating method for superconductive material
JPS6467824A (en) * 1987-09-07 1989-03-14 Semiconductor Energy Lab Forming device for oxide superconducting material
JPS6467823A (en) * 1987-09-07 1989-03-14 Semiconductor Energy Lab Formation of oxide superconducting film
JPH0556282B2 (en) * 1987-09-07 1993-08-19 Handotai Energy Kenkyusho
JPH0556281B2 (en) * 1987-09-07 1993-08-19 Handotai Energy Kenkyusho
JPH0556283B2 (en) * 1987-09-16 1993-08-19 Handotai Energy Kenkyusho
JPS6476903A (en) * 1987-09-16 1989-03-23 Semiconductor Energy Lab Apparatus for producing oxide superconducting material

Also Published As

Publication number Publication date
JPS6161556B2 (en) 1986-12-26

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