JPS6473780A - Manufacture of superconducting device - Google Patents

Manufacture of superconducting device

Info

Publication number
JPS6473780A
JPS6473780A JP62231888A JP23188887A JPS6473780A JP S6473780 A JPS6473780 A JP S6473780A JP 62231888 A JP62231888 A JP 62231888A JP 23188887 A JP23188887 A JP 23188887A JP S6473780 A JPS6473780 A JP S6473780A
Authority
JP
Japan
Prior art keywords
superconducting
region
superconductivity
deteriorating
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62231888A
Other languages
Japanese (ja)
Other versions
JPH0634419B2 (en
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP62223675A priority Critical patent/JPH0634418B2/en
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP62231888A priority patent/JPH0634419B2/en
Priority to CN88106594.3A priority patent/CN1013161B/en
Priority to CN91100272.3A priority patent/CN1020830C/en
Priority to EP88308384A priority patent/EP0307246A3/en
Publication of JPS6473780A publication Critical patent/JPS6473780A/en
Priority to US07/525,686 priority patent/US5051396A/en
Priority to US07/829,531 priority patent/US5401716A/en
Publication of JPH0634419B2 publication Critical patent/JPH0634419B2/en
Priority to US08/323,088 priority patent/US5512540A/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/10—Junction-based devices
    • H10N60/12—Josephson-effect devices
    • H10N60/124—Josephson-effect devices comprising high-Tc ceramic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
    • H10N60/0716—Passivating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0884—Treatment of superconductor layers by irradiation, e.g. ion-beam, electron-beam, laser beam or X-rays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices
    • H10N60/0941—Manufacture or treatment of Josephson-effect devices comprising high-Tc ceramic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/10—Junction-based devices
    • H10N60/128—Junction-based devices having three or more electrodes, e.g. transistor-like structures

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To form a conductor without deteriorating superconductivity of a superconducting region by adding additive which provides non-superconductivity by heat treatment through ion implantation to an oxide superconducting region. CONSTITUTION:Non-superconducting region 20 which becomes a separation region is formed without oxygen deficiency around superconducting regions 3, 5 and without deteriorating its superconducting properties by conducting ion implantation of additive which provides non-superconducting properties through heat treatment of Al and Mg around an oxide superconducting material thin film 30 of which main component is the same as the superconducting material of a substrate 1'' and is formed on a region 1' of non-superconducting properties. Similarly, partial oxide superconducting regions such as 8' and 9', and 8 and 9 are laminated and then an oxygen superconducting conductor is formed to an oxygen superconducting region without deteriorating superconductivity of a superconducting region.
JP62231888A 1987-04-15 1987-09-16 Superconducting device fabrication method Expired - Fee Related JPH0634419B2 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP62223675A JPH0634418B2 (en) 1987-09-07 1987-09-07 Method for manufacturing superconducting element
JP62231888A JPH0634419B2 (en) 1987-09-16 1987-09-16 Superconducting device fabrication method
CN88106594.3A CN1013161B (en) 1987-09-07 1988-09-07 Method of manufacturing super conducting patterns
CN91100272.3A CN1020830C (en) 1987-09-07 1988-09-07 Method of manufacturing superconducting patterns
EP88308384A EP0307246A3 (en) 1987-09-07 1988-09-07 Method of manufacturing superconducting devices
US07/525,686 US5051396A (en) 1987-09-07 1990-05-21 Method of manufacturing superconducting patterns by adding impurities
US07/829,531 US5401716A (en) 1987-04-15 1992-02-03 Method for manufacturing superconducting patterns
US08/323,088 US5512540A (en) 1987-04-15 1994-10-14 Method of manufacturing superconducting patterns

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62231888A JPH0634419B2 (en) 1987-09-16 1987-09-16 Superconducting device fabrication method

Publications (2)

Publication Number Publication Date
JPS6473780A true JPS6473780A (en) 1989-03-20
JPH0634419B2 JPH0634419B2 (en) 1994-05-02

Family

ID=16930604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62231888A Expired - Fee Related JPH0634419B2 (en) 1987-04-15 1987-09-16 Superconducting device fabrication method

Country Status (1)

Country Link
JP (1) JPH0634419B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02298086A (en) * 1989-05-12 1990-12-10 Matsushita Electric Ind Co Ltd Manufacture of superconductive device
US5229360A (en) * 1989-07-24 1993-07-20 The Furukawa Electric Co., Ltd. Method for forming a multilayer superconducting circuit

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS564290A (en) * 1979-06-25 1981-01-17 Nippon Telegr & Teleph Corp <Ntt> Superconductive element
JPS5873172A (en) * 1981-10-27 1983-05-02 Nippon Telegr & Teleph Corp <Ntt> Superconductive integrated circuit device
JPS60160675A (en) * 1984-02-01 1985-08-22 Hitachi Ltd Quasi-particle injection type superconducting element
JPS60223175A (en) * 1984-04-19 1985-11-07 Hitachi Ltd Superconductive switching device
JPS61206279A (en) * 1985-03-11 1986-09-12 Hitachi Ltd Superconductive element
JPS62238674A (en) * 1986-04-09 1987-10-19 Rikagaku Kenkyusho Manufacture of superconductor
JPS63263482A (en) * 1987-04-13 1988-10-31 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン Superconducting device and manufacture thereof

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS564290A (en) * 1979-06-25 1981-01-17 Nippon Telegr & Teleph Corp <Ntt> Superconductive element
JPS5873172A (en) * 1981-10-27 1983-05-02 Nippon Telegr & Teleph Corp <Ntt> Superconductive integrated circuit device
JPS60160675A (en) * 1984-02-01 1985-08-22 Hitachi Ltd Quasi-particle injection type superconducting element
JPS60223175A (en) * 1984-04-19 1985-11-07 Hitachi Ltd Superconductive switching device
JPS61206279A (en) * 1985-03-11 1986-09-12 Hitachi Ltd Superconductive element
JPS62238674A (en) * 1986-04-09 1987-10-19 Rikagaku Kenkyusho Manufacture of superconductor
JPS63263482A (en) * 1987-04-13 1988-10-31 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン Superconducting device and manufacture thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02298086A (en) * 1989-05-12 1990-12-10 Matsushita Electric Ind Co Ltd Manufacture of superconductive device
US5229360A (en) * 1989-07-24 1993-07-20 The Furukawa Electric Co., Ltd. Method for forming a multilayer superconducting circuit

Also Published As

Publication number Publication date
JPH0634419B2 (en) 1994-05-02

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