JPS6457521A - Manufacture of superconducting thin film - Google Patents

Manufacture of superconducting thin film

Info

Publication number
JPS6457521A
JPS6457521A JP62211410A JP21141087A JPS6457521A JP S6457521 A JPS6457521 A JP S6457521A JP 62211410 A JP62211410 A JP 62211410A JP 21141087 A JP21141087 A JP 21141087A JP S6457521 A JPS6457521 A JP S6457521A
Authority
JP
Japan
Prior art keywords
thin film
substrate
crystallized
constitution
high temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62211410A
Other languages
Japanese (ja)
Inventor
Yasutaka Tamura
Akira Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62211410A priority Critical patent/JPS6457521A/en
Publication of JPS6457521A publication Critical patent/JPS6457521A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Abstract

PURPOSE:To eliminate possible deterioration of devices caused by heat treatment at high temperature as well as to enable those such as superconducting devices, the relative wiring of semiconductor integrated circuits and the like to be formed by depositing a thin film whose composition ratio of a superconductor in an oxide series contains atoms on a substrate, and introducing oxygen onto said thin film after said film has been crystallized by means of short time annealing capable of selectively heating said thin film. CONSTITUTION:A thin film 2 formed by Y1Ba2Cu3Ox is deposited on a substrate (YSZ) 1 made of yttria stabilized zirconia, then, the thin film 2 is crystallized with CW-Ar laser beams scanned. In the second place, the thin film is put into a cylindrical plasma reactor 11 together with the substrate thereof so as to let a plasma treatment be processed with oxygen introduced. owing to this constitution, a heat conducting thin film constituted by Y1Ba2Cu3O7-delta can be formed with no heat treatment processed at high temperature.
JP62211410A 1987-08-27 1987-08-27 Manufacture of superconducting thin film Pending JPS6457521A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62211410A JPS6457521A (en) 1987-08-27 1987-08-27 Manufacture of superconducting thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62211410A JPS6457521A (en) 1987-08-27 1987-08-27 Manufacture of superconducting thin film

Publications (1)

Publication Number Publication Date
JPS6457521A true JPS6457521A (en) 1989-03-03

Family

ID=16605495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62211410A Pending JPS6457521A (en) 1987-08-27 1987-08-27 Manufacture of superconducting thin film

Country Status (1)

Country Link
JP (1) JPS6457521A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6489572A (en) * 1987-09-30 1989-04-04 Nec Corp Manufacture of high temperature superconducting thin film
US5173474A (en) * 1990-04-18 1992-12-22 Xerox Corporation Silicon substrate having an epitaxial superconducting layer thereon and method of making same
US5358925A (en) * 1990-04-18 1994-10-25 Board Of Trustees Of The Leland Stanford Junior University Silicon substrate having YSZ epitaxial barrier layer and an epitaxial superconducting layer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6489572A (en) * 1987-09-30 1989-04-04 Nec Corp Manufacture of high temperature superconducting thin film
US5173474A (en) * 1990-04-18 1992-12-22 Xerox Corporation Silicon substrate having an epitaxial superconducting layer thereon and method of making same
US5358925A (en) * 1990-04-18 1994-10-25 Board Of Trustees Of The Leland Stanford Junior University Silicon substrate having YSZ epitaxial barrier layer and an epitaxial superconducting layer

Similar Documents

Publication Publication Date Title
JPS6486574A (en) Superconducting device
JPS6414814A (en) Manufacture of oxide superconductive thin film
JPS6451685A (en) Formation of superconducting circuit
JPS6457521A (en) Manufacture of superconducting thin film
JPS6411378A (en) Formation of josephson element
JPS6412585A (en) Josephson junction device
JPS6463215A (en) High temperature superconductive material
JPS646322A (en) Thin film superconductor
JPS648682A (en) Manufacture of ceramic superconductor device
JPS6417314A (en) Thin film superconductor
JPS6417318A (en) Manufacture of superconducting thin film
JPS6455846A (en) Semiconductor device
EP0334374A3 (en) Process of forming a superconductive wiring strip in low temperature ambient
JPS6455880A (en) Manufacture of device having superconductive thin film
JPS6414822A (en) Manufacture of oxide superconductor film
JPS648615A (en) Manufacture of semiconductor device
JPS6465718A (en) Manufacture of ceramic superconductive wire
JPH0297421A (en) Production of high temperature superconducting thin film
JPS6412428A (en) Manufacture of superconducting film
JPS6473780A (en) Manufacture of superconducting device
JPS6469063A (en) Manufacture of oxide superconducting line
JPS642220A (en) Manufacture of ceramic superconductive wire material
JPS6411380A (en) Manufacture of josephson element
JPS6466956A (en) Semiconductor device
JPS6448473A (en) Method of patterning high temperature oxide superconducting material