JPS6417318A - Manufacture of superconducting thin film - Google Patents

Manufacture of superconducting thin film

Info

Publication number
JPS6417318A
JPS6417318A JP62170948A JP17094887A JPS6417318A JP S6417318 A JPS6417318 A JP S6417318A JP 62170948 A JP62170948 A JP 62170948A JP 17094887 A JP17094887 A JP 17094887A JP S6417318 A JPS6417318 A JP S6417318A
Authority
JP
Japan
Prior art keywords
metal
film
thin film
superconducting thin
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62170948A
Other languages
Japanese (ja)
Inventor
Masaaki Futamoto
Yukio Honda
Teruaki Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62170948A priority Critical patent/JPS6417318A/en
Publication of JPS6417318A publication Critical patent/JPS6417318A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE:To improve the controllability and reproducibility of the composition by forming multiple metal laminated films on a substrate and heat-treating them in the oxidizing atmosphere to transform them into metal oxide films. CONSTITUTION:Laminated films of constituting metals (multiple kinds) 2-4 of an oxide superconductive material are formed on a substrate 1 then heated in the oxidizing atmosphere, thus causing the oxidation and diffusion reaction of the metal elements 2-4 to form an oxide superconducting thin film. The composition of the metal elements of the whole film can be correctly controlled by observing the thickness of each metal laminated film with a thickness monitor during the film formation, for example. Since the deposition of each metal element is continuously performed in series, the control of the film forming process is facilitated. The oxide superconducting thin film with high critical temperature can be thereby formed reproducibly, easily, and at a high speed.
JP62170948A 1987-07-10 1987-07-10 Manufacture of superconducting thin film Pending JPS6417318A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62170948A JPS6417318A (en) 1987-07-10 1987-07-10 Manufacture of superconducting thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62170948A JPS6417318A (en) 1987-07-10 1987-07-10 Manufacture of superconducting thin film

Publications (1)

Publication Number Publication Date
JPS6417318A true JPS6417318A (en) 1989-01-20

Family

ID=15914345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62170948A Pending JPS6417318A (en) 1987-07-10 1987-07-10 Manufacture of superconducting thin film

Country Status (1)

Country Link
JP (1) JPS6417318A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0360405A (en) * 1989-07-25 1991-03-15 Sumitomo Cement Co Ltd Production of oxide superconducting thin film
WO1991006128A1 (en) * 1989-10-16 1991-05-02 American Superconductor Corporation Process for making electrical connections to high temperature superconductors using a metallic precursor and the product made thereby
US5318725A (en) * 1991-04-03 1994-06-07 American Superconductor Corporation Electroceramics and process for making the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0360405A (en) * 1989-07-25 1991-03-15 Sumitomo Cement Co Ltd Production of oxide superconducting thin film
WO1991006128A1 (en) * 1989-10-16 1991-05-02 American Superconductor Corporation Process for making electrical connections to high temperature superconductors using a metallic precursor and the product made thereby
US5116810A (en) * 1989-10-16 1992-05-26 American Superconductor Corporation Process for making electrical connections to high temperature superconductors using a metallic precursor and the product made thereby
US5321003A (en) * 1989-10-16 1994-06-14 American Superconductor Corporation Connection between high temperature superconductors and superconductor precursors
US5318725A (en) * 1991-04-03 1994-06-07 American Superconductor Corporation Electroceramics and process for making the same

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