JPS6417318A - Manufacture of superconducting thin film - Google Patents
Manufacture of superconducting thin filmInfo
- Publication number
- JPS6417318A JPS6417318A JP62170948A JP17094887A JPS6417318A JP S6417318 A JPS6417318 A JP S6417318A JP 62170948 A JP62170948 A JP 62170948A JP 17094887 A JP17094887 A JP 17094887A JP S6417318 A JPS6417318 A JP S6417318A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- film
- thin film
- superconducting thin
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010408 film Substances 0.000 abstract 7
- 229910052751 metal Inorganic materials 0.000 abstract 6
- 239000002184 metal Substances 0.000 abstract 4
- 230000001590 oxidative effect Effects 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910044991 metal oxide Inorganic materials 0.000 abstract 1
- 150000004706 metal oxides Chemical class 0.000 abstract 1
- 150000002739 metals Chemical class 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
PURPOSE:To improve the controllability and reproducibility of the composition by forming multiple metal laminated films on a substrate and heat-treating them in the oxidizing atmosphere to transform them into metal oxide films. CONSTITUTION:Laminated films of constituting metals (multiple kinds) 2-4 of an oxide superconductive material are formed on a substrate 1 then heated in the oxidizing atmosphere, thus causing the oxidation and diffusion reaction of the metal elements 2-4 to form an oxide superconducting thin film. The composition of the metal elements of the whole film can be correctly controlled by observing the thickness of each metal laminated film with a thickness monitor during the film formation, for example. Since the deposition of each metal element is continuously performed in series, the control of the film forming process is facilitated. The oxide superconducting thin film with high critical temperature can be thereby formed reproducibly, easily, and at a high speed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62170948A JPS6417318A (en) | 1987-07-10 | 1987-07-10 | Manufacture of superconducting thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62170948A JPS6417318A (en) | 1987-07-10 | 1987-07-10 | Manufacture of superconducting thin film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6417318A true JPS6417318A (en) | 1989-01-20 |
Family
ID=15914345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62170948A Pending JPS6417318A (en) | 1987-07-10 | 1987-07-10 | Manufacture of superconducting thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6417318A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0360405A (en) * | 1989-07-25 | 1991-03-15 | Sumitomo Cement Co Ltd | Production of oxide superconducting thin film |
| WO1991006128A1 (en) * | 1989-10-16 | 1991-05-02 | American Superconductor Corporation | Process for making electrical connections to high temperature superconductors using a metallic precursor and the product made thereby |
| US5318725A (en) * | 1991-04-03 | 1994-06-07 | American Superconductor Corporation | Electroceramics and process for making the same |
-
1987
- 1987-07-10 JP JP62170948A patent/JPS6417318A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0360405A (en) * | 1989-07-25 | 1991-03-15 | Sumitomo Cement Co Ltd | Production of oxide superconducting thin film |
| WO1991006128A1 (en) * | 1989-10-16 | 1991-05-02 | American Superconductor Corporation | Process for making electrical connections to high temperature superconductors using a metallic precursor and the product made thereby |
| US5116810A (en) * | 1989-10-16 | 1992-05-26 | American Superconductor Corporation | Process for making electrical connections to high temperature superconductors using a metallic precursor and the product made thereby |
| US5321003A (en) * | 1989-10-16 | 1994-06-14 | American Superconductor Corporation | Connection between high temperature superconductors and superconductor precursors |
| US5318725A (en) * | 1991-04-03 | 1994-06-07 | American Superconductor Corporation | Electroceramics and process for making the same |
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