JPS6414814A - Manufacture of oxide superconductive thin film - Google Patents

Manufacture of oxide superconductive thin film

Info

Publication number
JPS6414814A
JPS6414814A JP62152174A JP15217487A JPS6414814A JP S6414814 A JPS6414814 A JP S6414814A JP 62152174 A JP62152174 A JP 62152174A JP 15217487 A JP15217487 A JP 15217487A JP S6414814 A JPS6414814 A JP S6414814A
Authority
JP
Japan
Prior art keywords
thin film
manufacture
superconductive
temperature
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62152174A
Other languages
Japanese (ja)
Inventor
Toshiaki Murakami
Minoru Suzuki
Yoichi Enomoto
Kazuyuki Moriwaki
Yoshikazu Hidaka
Ken Oda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP62152174A priority Critical patent/JPS6414814A/en
Publication of JPS6414814A publication Critical patent/JPS6414814A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To provide an R-M-Cu oxide superconductive thin film on a heated perovskite monocrystal substrate by using an R-M-Cu oxide porcelain containing the preset metals R and M as a target and performing the high-frequency spattering in the inert gas containing the preset quantity of 02. CONSTITUTION:A porcelain made of (La1-xMalphax)2Cu1+zO4+z (M is Ba or Sr, alpha=1-3.5, z=1-0.3) or (Y1-xMalphax)Cu1+zO3+z (alpha=1-3.5, z=1-0.6) is used as a target, and the high-frequency spattering is performed in the inert gas containing 10-60% of O2. If a thin film is deposited on the surface (100) or (110) heated to 800 deg.C or higher of an SrTiO3 monocrystal substrate at the speed of about 1Angstrom /sec, a monocrystal thin film is obtained, if the substrate temperature is set to 600 deg.C, a polycrystal thin film is obtained. The thin film of a high- temperature superconductive material can be formed according to this constitution, and the superconductive thin film with a large critical current value is operated at the liquid nitrogen temperature.
JP62152174A 1987-03-19 1987-06-18 Manufacture of oxide superconductive thin film Pending JPS6414814A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62152174A JPS6414814A (en) 1987-03-19 1987-06-18 Manufacture of oxide superconductive thin film

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6528787 1987-03-19
JP62152174A JPS6414814A (en) 1987-03-19 1987-06-18 Manufacture of oxide superconductive thin film

Publications (1)

Publication Number Publication Date
JPS6414814A true JPS6414814A (en) 1989-01-19

Family

ID=26406424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62152174A Pending JPS6414814A (en) 1987-03-19 1987-06-18 Manufacture of oxide superconductive thin film

Country Status (1)

Country Link
JP (1) JPS6414814A (en)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63270395A (en) * 1987-04-30 1988-11-08 Chichibu Cement Co Ltd Substrate material for thin film superconductor
JPH01100022A (en) * 1987-05-31 1989-04-18 Sumitomo Electric Ind Ltd Preparation of superconducting thin film
JPH01164727A (en) * 1987-12-20 1989-06-28 Sumitomo Electric Ind Ltd Formation of superconducting thin film
JPH01166413A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Complex oxide superconductive thin film and its manufacture
JPH01167219A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01167220A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01166419A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Manufacture of superconductive membrane
JPH01166412A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Complex oxide superconductive thin film and its manufacture
JPH01167218A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01167223A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01167221A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01167217A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01188662A (en) * 1988-01-22 1989-07-27 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01188664A (en) * 1988-01-22 1989-07-27 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH03183654A (en) * 1989-12-08 1991-08-09 Agency Of Ind Science & Technol Production of oxide superconductor
JPH08239214A (en) * 1987-09-18 1996-09-17 Internatl Business Mach Corp <Ibm> Superconducting substance and superconducting material
JP2009215629A (en) * 2008-03-12 2009-09-24 Dowa Electronics Materials Co Ltd Target for laser vapor deposition and method for manufacturing the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917397B1 (en) * 1970-05-18 1974-04-30
JPS4917316B1 (en) * 1970-03-10 1974-04-30
JPS4918070Y1 (en) * 1970-04-30 1974-05-11

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917316B1 (en) * 1970-03-10 1974-04-30
JPS4918070Y1 (en) * 1970-04-30 1974-05-11
JPS4917397B1 (en) * 1970-05-18 1974-04-30

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63270395A (en) * 1987-04-30 1988-11-08 Chichibu Cement Co Ltd Substrate material for thin film superconductor
JPH01100022A (en) * 1987-05-31 1989-04-18 Sumitomo Electric Ind Ltd Preparation of superconducting thin film
JPH08239214A (en) * 1987-09-18 1996-09-17 Internatl Business Mach Corp <Ibm> Superconducting substance and superconducting material
JPH01164727A (en) * 1987-12-20 1989-06-28 Sumitomo Electric Ind Ltd Formation of superconducting thin film
JPH01167218A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01167220A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01166419A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Manufacture of superconductive membrane
JPH01166412A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Complex oxide superconductive thin film and its manufacture
JPH01167219A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01167223A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01167221A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01167217A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01166413A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Complex oxide superconductive thin film and its manufacture
JPH01188662A (en) * 1988-01-22 1989-07-27 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01188664A (en) * 1988-01-22 1989-07-27 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH03183654A (en) * 1989-12-08 1991-08-09 Agency Of Ind Science & Technol Production of oxide superconductor
JP2009215629A (en) * 2008-03-12 2009-09-24 Dowa Electronics Materials Co Ltd Target for laser vapor deposition and method for manufacturing the same

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