JPS63239740A - Manufacture for superconductive compound thin film - Google Patents
Manufacture for superconductive compound thin filmInfo
- Publication number
- JPS63239740A JPS63239740A JP62071694A JP7169487A JPS63239740A JP S63239740 A JPS63239740 A JP S63239740A JP 62071694 A JP62071694 A JP 62071694A JP 7169487 A JP7169487 A JP 7169487A JP S63239740 A JPS63239740 A JP S63239740A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- compound thin
- long
- stabilizing material
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 14
- 150000001875 compounds Chemical class 0.000 title claims abstract description 10
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 6
- 238000004544 sputter deposition Methods 0.000 claims abstract description 5
- 230000001590 oxidative effect Effects 0.000 claims abstract 2
- 238000000151 deposition Methods 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 9
- 230000000087 stabilizing effect Effects 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 4
- 238000007738 vacuum evaporation Methods 0.000 abstract description 2
- 229910002480 Cu-O Inorganic materials 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 230000005540 biological transmission Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000002887 superconductor Substances 0.000 description 2
- 229910014454 Ca-Cu Inorganic materials 0.000 description 1
- 229910009203 Y-Ba-Cu-O Inorganic materials 0.000 description 1
- 238000009770 conventional sintering Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の目的〕
（産業上の利用分野）
本発明は、超電導マグネット用及び超電導送電線用の超
電導化合物薄膜の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a method for producing a superconducting compound thin film for use in superconducting magnets and superconducting power transmission lines.
（従来の技術）
最近、Ｙ−Ｂａ−Ｃｕ−０で代表される（以下り−Ｍ−
Ｃｕ−０と記す）ＴｃｄｚｇＱＫ以上の酸化物超電導体
が開発されている。この材料は、従来超電導マグネット
に利用されてきたＮｂ５ｓｎ 、ＮｂＴｉに比べ、著し
く高いＴｃをもっているため冷却材として従来の高価な
Ｌ Ｈｅに代わシ安価な液体窒素を用、いることができ
、超電導マグネット、送電線に利用することができれば
、多大なメリッ、トを生む。(Prior art) Recently, Y-Ba-Cu-0 (hereinafter referred to as -M-
Oxide superconductors of TcdzgQK and higher (denoted as Cu-0) have been developed. This material has a significantly higher Tc than Nb5sn and NbTi, which have been conventionally used in superconducting magnets, so it is possible to use inexpensive liquid nitrogen as a coolant instead of the conventional expensive L He. If it can be used for power transmission lines, it will bring great benefits.
しかしながら、これまでこうした高いＴｃは、粉末を焼
いて固めた焼結法によるペレット状のものでしか報告さ
れていない。However, such a high Tc has so far only been reported in the form of pellets produced by a sintering method in which powder is baked and solidified.
他方、超電導マグネット、送電線には、超電導導体が長
いこと即ち長尺化が要求され、かつ大電流を流すため常
電導に転位した時も超電導導体の焼損を防ぐためのＣｕ
等の安定化材が必要になる。On the other hand, superconducting magnets and power transmission lines require long superconducting conductors, and in order to carry large currents, Cu is used to prevent burnout of the superconducting conductors even when they change to normal conductivity.
Stabilizing materials such as these are required.
こうした要求には、従来の焼結法によるのでは達成でき
なかった。These requirements could not be met using conventional sintering methods.
（発明が解決しようとする問題点）
すなわち、本発明は高いＴｃをもつＹ−Ｂａ−Ｃｕ−Ｏ
で代表されるＬ−Ｍ−Ｃｕ−０超電導体を安定化材のＣ
ｕも有する長尺可能な薄膜の製造方法を提供することを
目的としている。(Problems to be Solved by the Invention) That is, the present invention solves the problem of Y-Ba-Cu-O having a high Tc.
The stabilizing material C of the LM-Cu-0 superconductor represented by
It is an object of the present invention to provide a method for manufacturing a thin film that can be made into a long length and also has u.
（問題点を解決するための手段）
本発明においては、まず安定化材となる長尺のＣｕ基板
を熱酸化させ表面にＣｕＯを作成し、その後連続スパッ
タ装置及び真空蒸着装置によシこのＣｕ０Ｏ上にＬ（：
Ｙ又はＳｃ ）及びＭ（＝Ｂａ。(Means for Solving the Problems) In the present invention, first, a long Cu substrate serving as a stabilizing material is thermally oxidized to create CuO on the surface, and then a continuous sputtering device and a vacuum evaporation device are used to deposit Cu0O. L on top (:
Y or Sc ) and M (=Ba.
Ｓｒ、Ｃａ）又はその酸化物を蒸着して熱処理して長尺
にわた＃）Ｃｕ安定化材を有するＬ−Ｍ−Ｃｕ−０超電
導化合物薄膜を形成させるものである。Sr, Ca) or their oxides are deposited and heat treated to form a long LM-Cu-0 superconducting compound thin film having a Cu stabilizing material.
（作用）
本発明によれば、長尺のＬ−Ｍ−Ｃｕ−０超電導化合物
薄膜が可能であり、Ｃｕ安定化材も有しているため、超
電導マグネット、送電線に利用した場合も大電流通電時
の常電導転に際しても焼損することがない。(Function) According to the present invention, it is possible to form a long LM-Cu-0 superconducting compound thin film, and since it also has a Cu stabilizing material, it can handle large currents even when used in superconducting magnets and power transmission lines. It will not burn out even during normal conduction when energized.
（実施例）
長さ１０ｍのＣｕのテープを空気中で７００℃で熱処理
し、表面に異色のＣｕＯの膜をテープ上に形成した。こ
のテープ９を第１図に示す連続スパッタ装置にセットし
、送シ出し２巻き取りリール１０．１１により長尺にわ
たｆｉＹターゲット１２、Ｂａターゲット１３によｐＹ
、Ｂａを蒸着した。この雰囲気はＡｒ−５０４０鵞、
５Ｘ１０−２Ｔｏｒｒである。(Example) A Cu tape having a length of 10 m was heat-treated at 700° C. in air to form a different-colored CuO film on the surface of the tape. This tape 9 is set in the continuous sputtering apparatus shown in FIG.
, Ba was deposited. This atmosphere is Ar-5040,
It is 5×10 −2 Torr.
しかる後これを９００℃で１日熱処理した。この試料の
抵抗の温度変化を測定した所、抵抗は９５Ｋからおちは
じめ、８２にで完全にＯになった。すなわち、液体窒素
温度でも使える長尺のＹ−Ｂ、ａ−Ｃｕ−０の超電導の
薄膜を得ることができた。Thereafter, this was heat-treated at 900°C for one day. When the temperature change in the resistance of this sample was measured, the resistance began to drop at 95K and completely reached 0 at 82K. That is, it was possible to obtain a long Y-B, a-Cu-0 superconducting thin film that can be used even at liquid nitrogen temperatures.
その他 Ｙ−Ｃａ−Ｃｕ−０，Ｙ−８ｒ−Ｃｕ −０８
ｃ−Ｂａ−Ｃｕ−０，５ｃ−８ｒ−Ｃｕ−０゜５ｃ−Ｃ
ａ−Ｃｕ −０
Ｌａ−Ｂａ−Ｃｕ−０，Ｃａ−８ｒ−Ｃｕ−０゜Ｌａ−
Ｃａ−Ｃｕ −０
の各基でも同様な効果があった。Others Y-Ca-Cu-0, Y-8r-Cu -08
c-Ba-Cu-0,5c-8r-Cu-0゜5c-C
a-Cu -0 La-Ba-Cu-0, Ca-8r-Cu-0゜La-
Similar effects were obtained with each group of Ca-Cu −0 .
また、本実施例は、Ｃｕ基板がテープの場合について述
べたが、Ｃｕ基板がパイプ状、線状であっても同様な結
果が得られる。Furthermore, although this embodiment has been described with reference to the case where the Cu substrate is a tape, similar results can be obtained even if the Cu substrate is pipe-shaped or linear.
以上の如く、本発明によれば超電導マグネット。 As described above, the present invention provides a superconducting magnet.
送電線に利用できる長尺かつ安定化材付の超電導化合物
薄膜ができる。A long superconducting compound thin film with a stabilizing material can be produced that can be used in power transmission lines.
第１図は、本発明の実施例に使用するスパッタ装置の１
例を示す概略図、第２図は本発明の実施例によって製造
された薄膜のＴｃを示す特性図である。
９・・・ＣｕＯ膜のテープ、１０・・・送９出しリール
、１１・・・巻き取りリール、１２・・・Ｙターゲット
、１３・・・Ｂａ ターゲット。
代理人 弁理士 則 近 憲 佑
同 竹 花 喜久男
第１図
第２図FIG. 1 shows one of the sputtering apparatuses used in the embodiments of the present invention.
FIG. 2 is a schematic diagram showing an example, and FIG. 2 is a characteristic diagram showing Tc of a thin film manufactured according to an embodiment of the present invention. 9... CuO film tape, 10... Delivery reel, 11... Take-up reel, 12... Y target, 13... Ba target. Agent Patent Attorney Noriyuki Chika Yudo Kikuo Takehana Figure 1 Figure 2
Claims (3)
酸化して、ＣｕＯ酸化物層を形成した後、この上にＬ、
Ｍ元素（Ｌ＝Ｙ、Ｓｃ；Ｍ＝Ｓｒ、Ｂａ、Ｃａ）又はそ
の酸化物を蒸着させて、最後に熱処理して作製されたこ
とを特徴とする超電導化合物薄膜の製造方法。(1) After thermally oxidizing a tape-shaped, pipe-shaped, or linear Cu substrate to form a CuO oxide layer, L,
1. A method for producing a superconducting compound thin film, characterized in that it is produced by vapor-depositing M element (L=Y, Sc; M=Sr, Ba, Ca) or an oxide thereof, and finally heat-treating.
されたことを特徴とする特許請求の範囲第１項記載の超
電導化合物薄膜の製造方法。(2) The method for producing a superconducting compound thin film according to claim 1, wherein the layer of L and M elements or their oxides is produced by sputtering.
ことを特徴とする特許請求の範囲第１項記載の超電導化
合物薄膜の製造方法。(3) The method for producing a superconducting compound thin film according to claim 1, wherein the layer of L and M elements or their oxides is formed by vacuum deposition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62071694A JPS63239740A (en) | 1987-03-27 | 1987-03-27 | Manufacture for superconductive compound thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62071694A JPS63239740A (en) | 1987-03-27 | 1987-03-27 | Manufacture for superconductive compound thin film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63239740A true JPS63239740A (en) | 1988-10-05 |
Family
ID=13467907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62071694A Pending JPS63239740A (en) | 1987-03-27 | 1987-03-27 | Manufacture for superconductive compound thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63239740A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63264814A (en) * | 1987-04-22 | 1988-11-01 | Sumitomo Electric Ind Ltd | Plexible superconductive material |
| JPS6472426A (en) * | 1987-09-12 | 1989-03-17 | Univ Tokai | Manufacture of superconducting material |
| JPS6472425A (en) * | 1987-09-12 | 1989-03-17 | Univ Tokai | Manufacture of superconducting material |
| CN112941556A (en) * | 2021-01-27 | 2021-06-11 | 国家纳米科学中心 | Copper-based solid material and preparation method and application thereof |
-
1987
- 1987-03-27 JP JP62071694A patent/JPS63239740A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63264814A (en) * | 1987-04-22 | 1988-11-01 | Sumitomo Electric Ind Ltd | Plexible superconductive material |
| JPS6472426A (en) * | 1987-09-12 | 1989-03-17 | Univ Tokai | Manufacture of superconducting material |
| JPS6472425A (en) * | 1987-09-12 | 1989-03-17 | Univ Tokai | Manufacture of superconducting material |
| JPH0453820B2 (en) * | 1987-09-12 | 1992-08-27 | Tokai Daigaku | |
| JPH0453819B2 (en) * | 1987-09-12 | 1992-08-27 | Tokai Daigaku | |
| CN112941556A (en) * | 2021-01-27 | 2021-06-11 | 国家纳米科学中心 | Copper-based solid material and preparation method and application thereof |
| CN112941556B (en) * | 2021-01-27 | 2023-09-15 | 国家纳米科学中心 | Copper-based solid material and preparation method and application thereof |
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