JPS5379776A - Sputtering apparatus - Google Patents

Sputtering apparatus

Info

Publication number
JPS5379776A
JPS5379776A JP15499576A JP15499576A JPS5379776A JP S5379776 A JPS5379776 A JP S5379776A JP 15499576 A JP15499576 A JP 15499576A JP 15499576 A JP15499576 A JP 15499576A JP S5379776 A JPS5379776 A JP S5379776A
Authority
JP
Japan
Prior art keywords
filament
sputtering apparatus
increase
thermion
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15499576A
Other languages
Japanese (ja)
Other versions
JPS5540662B2 (en
Inventor
Kazuyuki Tsuruoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP15499576A priority Critical patent/JPS5379776A/en
Publication of JPS5379776A publication Critical patent/JPS5379776A/en
Publication of JPS5540662B2 publication Critical patent/JPS5540662B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3471—Introduction of auxiliary energy into the plasma
    • C23C14/3478—Introduction of auxiliary energy into the plasma using electrons, e.g. triode sputtering

Abstract

PURPOSE:To increase film coating speed remarkably by electric heating of filament set in a space within a treating chamber in order to produce thermion, and by increasing the ion density within the chamber around the filament so as to increase target current.
JP15499576A 1976-12-24 1976-12-24 Sputtering apparatus Granted JPS5379776A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15499576A JPS5379776A (en) 1976-12-24 1976-12-24 Sputtering apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15499576A JPS5379776A (en) 1976-12-24 1976-12-24 Sputtering apparatus

Publications (2)

Publication Number Publication Date
JPS5379776A true JPS5379776A (en) 1978-07-14
JPS5540662B2 JPS5540662B2 (en) 1980-10-20

Family

ID=15596398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15499576A Granted JPS5379776A (en) 1976-12-24 1976-12-24 Sputtering apparatus

Country Status (1)

Country Link
JP (1) JPS5379776A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59123768A (en) * 1982-12-28 1984-07-17 Toyota Central Res & Dev Lab Inc Method and device for simultaneous multi-element sputtering
JPH0519080U (en) * 1991-08-23 1993-03-09 株式会社福岡製作所 Bicycle parking equipment such as wheelchairs

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4838076A (en) * 1971-09-10 1973-06-05
JPS5023382A (en) * 1973-07-05 1975-03-13
JPS5186083A (en) * 1974-12-16 1976-07-28 Airco Inc

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4838076A (en) * 1971-09-10 1973-06-05
JPS5023382A (en) * 1973-07-05 1975-03-13
JPS5186083A (en) * 1974-12-16 1976-07-28 Airco Inc

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59123768A (en) * 1982-12-28 1984-07-17 Toyota Central Res & Dev Lab Inc Method and device for simultaneous multi-element sputtering
JPS626746B2 (en) * 1982-12-28 1987-02-13 Toyoda Chuo Kenkyusho Kk
JPH0519080U (en) * 1991-08-23 1993-03-09 株式会社福岡製作所 Bicycle parking equipment such as wheelchairs

Also Published As

Publication number Publication date
JPS5540662B2 (en) 1980-10-20

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