CN102770972B - 包括晶体氧化硅钝化薄膜的光伏电池以及用于制造该光伏电池的方法 - Google Patents

包括晶体氧化硅钝化薄膜的光伏电池以及用于制造该光伏电池的方法 Download PDF

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CN102770972B
CN102770972B CN201180007552.XA CN201180007552A CN102770972B CN 102770972 B CN102770972 B CN 102770972B CN 201180007552 A CN201180007552 A CN 201180007552A CN 102770972 B CN102770972 B CN 102770972B
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layer
amorphous
crystalline
silica film
substrate
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CN102770972A (zh
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P.穆尔
H.莫里塞厄
P-J.里贝农
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16—Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/164—Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells
    • H10F10/165—Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells the heterojunctions being Group IV-IV heterojunctions, e.g. Si/Ge, SiGe/Si or Si/SiC photovoltaic cells
    • H10F10/166—Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells the heterojunctions being Group IV-IV heterojunctions, e.g. Si/Ge, SiGe/Si or Si/SiC photovoltaic cells the Group IV-IV heterojunctions being heterojunctions of crystalline and amorphous materials, e.g. silicon heterojunction [SHJ] photovoltaic cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16—Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/164—Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells
    • H10F10/165—Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells the heterojunctions being Group IV-IV heterojunctions, e.g. Si/Ge, SiGe/Si or Si/SiC photovoltaic cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/129—Passivating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
    • H10F77/162—Non-monocrystalline materials, e.g. semiconductor particles embedded in insulating materials
    • H10F77/164—Polycrystalline semiconductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
    • H10F77/162—Non-monocrystalline materials, e.g. semiconductor particles embedded in insulating materials
    • H10F77/166—Amorphous semiconductors
    • H10F77/1662—Amorphous semiconductors including only Group IV materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/548—Amorphous silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Photovoltaic Devices (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Sustainable Energy (AREA)
  • Formation Of Insulating Films (AREA)
CN201180007552.XA 2010-01-27 2011-01-26 包括晶体氧化硅钝化薄膜的光伏电池以及用于制造该光伏电池的方法 Active CN102770972B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1000309A FR2955702B1 (fr) 2010-01-27 2010-01-27 Cellule photovoltaique comprenant un film mince de passivation en oxyde cristallin de silicium et procede de realisation
FR1000309 2010-01-27
PCT/FR2011/000050 WO2011092402A2 (fr) 2010-01-27 2011-01-26 Cellule photovoltaïque comprenant un film mince de passivation en oxyde cristallin de silicium et procédé de réalisation

Publications (2)

Publication Number Publication Date
CN102770972A CN102770972A (zh) 2012-11-07
CN102770972B true CN102770972B (zh) 2016-03-23

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US (1) US10276738B2 (enExample)
EP (1) EP2529416B1 (enExample)
JP (2) JP2013518426A (enExample)
KR (1) KR20120127613A (enExample)
CN (1) CN102770972B (enExample)
ES (1) ES2560216T3 (enExample)
FR (1) FR2955702B1 (enExample)
WO (1) WO2011092402A2 (enExample)

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FR2996059B1 (fr) * 2012-09-24 2015-06-26 Commissariat Energie Atomique Procede de realisation d'une cellule photovoltaique a heterojonction et cellule photovoltaique ainsi obtenue
KR101925929B1 (ko) * 2013-01-16 2018-12-06 엘지전자 주식회사 태양 전지 및 그의 제조 방법
KR101925928B1 (ko) * 2013-01-21 2018-12-06 엘지전자 주식회사 태양 전지 및 그의 제조 방법
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CN106024964B (zh) * 2016-07-13 2017-09-22 北京工业大学 一种n型背结双面太阳电池的制备方法
CN106252424A (zh) * 2016-08-24 2016-12-21 常州天合光能有限公司 热氧化改善钝化层界面的异质结电池及其制备方法
WO2018061769A1 (ja) * 2016-09-27 2018-04-05 パナソニックＩｐマネジメント株式会社 太陽電池セルおよび太陽電池セルの製造方法
KR102387611B1 (ko) * 2016-11-23 2022-04-15 엘지전자 주식회사 태양 전지 및 이의 제조 방법
WO2018134024A1 (en) * 2017-01-17 2018-07-26 Zf Friedrichshafen Ag Method of manufacturing an insulation layer on silicon carbide
KR101867969B1 (ko) * 2017-01-18 2018-06-15 엘지전자 주식회사 이종 접합 태양전지
KR102514785B1 (ko) * 2017-05-19 2023-03-29 상라오 징코 솔라 테크놀러지 디벨롭먼트 컴퍼니, 리미티드 태양 전지 및 이의 제조 방법
GB2565056A (en) * 2017-07-28 2019-02-06 Comptek Solutions Oy Semiconductor device and method of manufacture
CN108054219A (zh) * 2017-12-15 2018-05-18 浙江晶科能源有限公司 一种p型太阳能电池及其制作方法
KR101886818B1 (ko) * 2018-07-25 2018-08-08 충남대학교산학협력단 이종 접합 실리콘 태양 전지의 제조 방법
CN112151636B (zh) * 2020-08-21 2022-07-15 隆基绿能科技股份有限公司 硅基异质结太阳电池及其制备方法
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Also Published As

Publication number Publication date
FR2955702B1 (fr) 2012-01-27
EP2529416B1 (fr) 2015-10-21
CN102770972A (zh) 2012-11-07
US20120291861A1 (en) 2012-11-22
WO2011092402A2 (fr) 2011-08-04
JP2016006895A (ja) 2016-01-14
EP2529416A2 (fr) 2012-12-05
FR2955702A1 (fr) 2011-07-29
WO2011092402A3 (fr) 2012-08-30
US10276738B2 (en) 2019-04-30
ES2560216T3 (es) 2016-02-17
KR20120127613A (ko) 2012-11-22
JP2013518426A (ja) 2013-05-20

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