CN102620727B - 振动陀螺传感器 - Google Patents
振动陀螺传感器 Download PDFInfo
- Publication number
- CN102620727B CN102620727B CN201210111827.0A CN201210111827A CN102620727B CN 102620727 B CN102620727 B CN 102620727B CN 201210111827 A CN201210111827 A CN 201210111827A CN 102620727 B CN102620727 B CN 102620727B
- Authority
- CN
- China
- Prior art keywords
- vibrating
- layer
- gyro sensor
- vibrator
- vibrating element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5663—Manufacturing; Trimming; Mounting; Housings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Manufacturing & Machinery (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005106718 | 2005-03-04 | ||
| JP2005-106718 | 2005-03-04 | ||
| JP2005063075 | 2005-03-07 | ||
| JP2005-063075 | 2005-03-07 | ||
| JP2005190234 | 2005-06-29 | ||
| JP2005-190234 | 2005-06-29 | ||
| JP2005-374326 | 2005-12-27 | ||
| JP2005374326A JP5037819B2 (ja) | 2005-03-04 | 2005-12-27 | 電子機器 |
| CN2006100793634A CN1837751B (zh) | 2005-03-04 | 2006-03-06 | 振动陀螺传感器 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006100793634A Division CN1837751B (zh) | 2005-03-04 | 2006-03-06 | 振动陀螺传感器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102620727A CN102620727A (zh) | 2012-08-01 |
| CN102620727B true CN102620727B (zh) | 2017-03-01 |
Family
ID=36571413
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210111827.0A Expired - Fee Related CN102620727B (zh) | 2005-03-04 | 2006-03-06 | 振动陀螺传感器 |
| CN2006100793634A Expired - Fee Related CN1837751B (zh) | 2005-03-04 | 2006-03-06 | 振动陀螺传感器 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006100793634A Expired - Fee Related CN1837751B (zh) | 2005-03-04 | 2006-03-06 | 振动陀螺传感器 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7400078B2 (https=) |
| EP (1) | EP1701132A3 (https=) |
| JP (1) | JP5037819B2 (https=) |
| KR (1) | KR20060096363A (https=) |
| CN (2) | CN102620727B (https=) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4386073B2 (ja) * | 2004-04-07 | 2009-12-16 | 株式会社村田製作所 | 角速度計測装置 |
| JP2006284551A (ja) * | 2005-02-23 | 2006-10-19 | Sony Corp | 振動型ジャイロセンサ |
| JP5135683B2 (ja) * | 2005-02-28 | 2013-02-06 | ソニー株式会社 | 振動型ジャイロセンサ及び振動素子の製造方法 |
| JP5037819B2 (ja) * | 2005-03-04 | 2012-10-03 | ソニー株式会社 | 電子機器 |
| JP2006250583A (ja) * | 2005-03-08 | 2006-09-21 | Sony Corp | 振動型ジャイロセンサ |
| JP2007292470A (ja) * | 2006-04-20 | 2007-11-08 | Fujitsu Media Device Kk | 角速度センサ |
| JP5112198B2 (ja) * | 2007-07-13 | 2013-01-09 | 日本航空電子工業株式会社 | 音叉型振動ジャイロ |
| DE102007038989A1 (de) * | 2007-08-17 | 2009-02-19 | Robert Bosch Gmbh | Hermetisch dichtes Gehäuse, insbesondere für elektronische Schaltungen |
| JP5208466B2 (ja) * | 2007-08-30 | 2013-06-12 | 日本航空電子工業株式会社 | 音叉型振動ジャイロ |
| JP2009092545A (ja) * | 2007-10-10 | 2009-04-30 | Panasonic Corp | 角速度および加速度検出用複合センサ |
| JP2009186213A (ja) * | 2008-02-04 | 2009-08-20 | Denso Corp | ジャイロセンサユニット |
| US9085152B2 (en) * | 2008-05-22 | 2015-07-21 | Fujifilm Corporation | Etching piezoelectric material |
| JP4640459B2 (ja) * | 2008-07-04 | 2011-03-02 | ソニー株式会社 | 角速度センサ |
| JP5266980B2 (ja) * | 2008-09-02 | 2013-08-21 | 株式会社村田製作所 | 角速度センサ |
| US8418554B2 (en) | 2009-06-01 | 2013-04-16 | The Boeing Company | Gyroscope packaging assembly |
| US20110001394A1 (en) * | 2009-07-02 | 2011-01-06 | Eta Sa | Piezoelectric thin-film tuning fork resonator |
| JP5423572B2 (ja) * | 2010-05-07 | 2014-02-19 | セイコーエプソン株式会社 | 配線基板、圧電発振器、ジャイロセンサー、配線基板の製造方法 |
| JP6044101B2 (ja) * | 2012-04-10 | 2016-12-14 | セイコーエプソン株式会社 | センサーデバイス、センサーデバイスの製造方法および電子機器 |
| JP2013253895A (ja) | 2012-06-08 | 2013-12-19 | Seiko Epson Corp | 電子デバイス、電子機器、移動体、および電子デバイスの製造方法 |
| CN107003129B (zh) * | 2014-12-01 | 2021-04-02 | 索尼公司 | 传感器装置、陀螺仪传感器和电子设备 |
| WO2016114173A1 (ja) * | 2015-01-13 | 2016-07-21 | 株式会社村田製作所 | 圧電デバイスの製造方法 |
| JP6791174B2 (ja) | 2018-01-12 | 2020-11-25 | オムロン株式会社 | 環境複合センサ装置 |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5493166A (en) * | 1988-08-12 | 1996-02-20 | Murata Manufacturing Co., Ltd. | Vibrator and vibrating gyroscope using the same |
| JPH04188684A (ja) * | 1990-11-19 | 1992-07-07 | Canon Inc | 薄膜バイモルフ型圧電素子の形成方法 |
| JPH06294654A (ja) * | 1993-04-08 | 1994-10-21 | Towa Electron Kk | 振動ジャイロ |
| US5396144A (en) * | 1993-08-02 | 1995-03-07 | New S.D., Inc. | Rotation rate sensor with center mounted tuning fork |
| US5802684A (en) * | 1993-09-14 | 1998-09-08 | Nikon Corporation | Process for producing a vibration angular-velocity sensor |
| JPH07190783A (ja) | 1993-12-27 | 1995-07-28 | Nikon Corp | 振動角速度計 |
| JP3418245B2 (ja) * | 1994-04-27 | 2003-06-16 | エヌイーシートーキン株式会社 | 圧電振動ジャイロ |
| DE19544338A1 (de) * | 1994-11-28 | 1996-05-30 | Nippon Denso Co | Winkelgeschwindigkeitssensor |
| GB9507930D0 (en) * | 1995-04-19 | 1995-06-14 | Smiths Industries Plc | Inertial sensor assemblies |
| JP3307200B2 (ja) * | 1995-11-01 | 2002-07-24 | 株式会社村田製作所 | 角速度センサ |
| JPH102741A (ja) * | 1996-06-17 | 1998-01-06 | Murata Mfg Co Ltd | 圧電振動子の製造方法 |
| US6578420B1 (en) * | 1997-01-28 | 2003-06-17 | Microsensors, Inc. | Multi-axis micro gyro structure |
| JPH10239064A (ja) * | 1997-02-27 | 1998-09-11 | Matsushita Electric Ind Co Ltd | 角速度と加速度の複合センサ |
| US5987987A (en) * | 1997-04-14 | 1999-11-23 | Denso Corporation | Angular velocity sensor, related method for manufacturing the sensor, and piezoelectric vibrator element used in this sensor |
| JP3610762B2 (ja) * | 1997-04-15 | 2005-01-19 | 株式会社村田製作所 | 圧電振動体の支持構造及びこの圧電振動体の支持構造を有する圧電トランス、ジャイロ並びに積層圧電体部品 |
| US6250158B1 (en) * | 1997-05-09 | 2001-06-26 | Litton Systems, Inc. | Monolithic vibrating beam angular velocity sensor |
| JP3911838B2 (ja) * | 1998-03-17 | 2007-05-09 | 株式会社大真空 | 圧電振動子の製造方法 |
| JP2001183162A (ja) * | 1999-12-24 | 2001-07-06 | Tokin Corp | 姿勢角度検出装置 |
| US6462530B1 (en) * | 2001-01-25 | 2002-10-08 | Bei Technologies, Inc. | Redundant rate sensor and method |
| JP2002257548A (ja) * | 2001-02-27 | 2002-09-11 | Ngk Insulators Ltd | 角速度測定装置 |
| JP3972790B2 (ja) * | 2001-11-27 | 2007-09-05 | 松下電器産業株式会社 | 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ |
| JP4852216B2 (ja) * | 2002-01-30 | 2012-01-11 | セイコーエプソン株式会社 | 振動型ジャイロスコープ |
| JP4144495B2 (ja) * | 2003-09-25 | 2008-09-03 | 株式会社村田製作所 | 角速度センサ |
| JP4037394B2 (ja) * | 2004-09-16 | 2008-01-23 | 株式会社東芝 | マイクロメカニカルデバイス |
| JP2006145420A (ja) * | 2004-11-22 | 2006-06-08 | Nissin Kogyo Co Ltd | 角速度検出装置 |
| JP2006145429A (ja) | 2004-11-22 | 2006-06-08 | Hitachi Sci Syst Ltd | 臨床検査システム |
| JP5037819B2 (ja) * | 2005-03-04 | 2012-10-03 | ソニー株式会社 | 電子機器 |
| JP2007043054A (ja) * | 2005-03-04 | 2007-02-15 | Sony Corp | 圧電素子及びその製造方法 |
| JP4751085B2 (ja) * | 2005-03-31 | 2011-08-17 | 東京計器株式会社 | センサの組立方法 |
| JP2008020716A (ja) * | 2006-07-13 | 2008-01-31 | Pentax Corp | 像ぶれ補正装置 |
-
2005
- 2005-12-27 JP JP2005374326A patent/JP5037819B2/ja not_active Expired - Fee Related
-
2006
- 2006-03-03 KR KR20060020441A patent/KR20060096363A/ko not_active Ceased
- 2006-03-03 US US11/368,144 patent/US7400078B2/en active Active
- 2006-03-03 EP EP20060004373 patent/EP1701132A3/en not_active Withdrawn
- 2006-03-06 CN CN201210111827.0A patent/CN102620727B/zh not_active Expired - Fee Related
- 2006-03-06 CN CN2006100793634A patent/CN1837751B/zh not_active Expired - Fee Related
-
2008
- 2008-05-07 US US12/116,646 patent/US7723905B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CN1837751B (zh) | 2012-06-20 |
| EP1701132A3 (en) | 2012-11-28 |
| US7723905B2 (en) | 2010-05-25 |
| JP5037819B2 (ja) | 2012-10-03 |
| EP1701132A2 (en) | 2006-09-13 |
| KR20060096363A (ko) | 2006-09-11 |
| JP2007040961A (ja) | 2007-02-15 |
| US20060197414A1 (en) | 2006-09-07 |
| CN1837751A (zh) | 2006-09-27 |
| US7400078B2 (en) | 2008-07-15 |
| CN102620727A (zh) | 2012-08-01 |
| US20090174292A1 (en) | 2009-07-09 |
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