CN101856646B - 基板处理装置 - Google Patents

基板处理装置 Download PDF

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Publication number
CN101856646B
CN101856646B CN2010101495018A CN201010149501A CN101856646B CN 101856646 B CN101856646 B CN 101856646B CN 2010101495018 A CN2010101495018 A CN 2010101495018A CN 201010149501 A CN201010149501 A CN 201010149501A CN 101856646 B CN101856646 B CN 101856646B
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CN
China
Prior art keywords
nozzle
liquid
cleaning
substrate
roller
Prior art date
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Active
Application number
CN2010101495018A
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English (en)
Chinese (zh)
Other versions
CN101856646A (zh
Inventor
高木善则
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Publication of CN101856646A publication Critical patent/CN101856646A/zh
Application granted granted Critical
Publication of CN101856646B publication Critical patent/CN101856646B/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0204—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to the edges of essentially flat articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/023—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/40—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials
    • H10P76/408—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes
    • H10P76/4085—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes characterised by the processes involved to create the masks

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Environmental & Geological Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Materials For Photolithography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN2010101495018A 2009-04-03 2010-03-25 基板处理装置 Active CN101856646B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009090925A JP2010240550A (ja) 2009-04-03 2009-04-03 基板処理装置
JP2009-090925 2009-04-03

Publications (2)

Publication Number Publication Date
CN101856646A CN101856646A (zh) 2010-10-13
CN101856646B true CN101856646B (zh) 2013-08-07

Family

ID=42942939

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010101495018A Active CN101856646B (zh) 2009-04-03 2010-03-25 基板处理装置

Country Status (4)

Country Link
JP (1) JP2010240550A (https=)
KR (1) KR101202141B1 (https=)
CN (1) CN101856646B (https=)
TW (1) TWI399822B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107433240A (zh) * 2016-05-26 2017-12-05 株式会社斯库林集团 喷嘴清扫装置、涂覆装置及喷嘴清扫方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180033594A (ko) * 2014-03-10 2018-04-03 가부시키가이샤 스크린 홀딩스 기판 처리 시스템 및 배관 세정 방법
KR102250362B1 (ko) * 2014-07-08 2021-05-12 세메스 주식회사 예비 토출 유닛, 이를 가지는 기판 처리 장치 및 방법
JP6347708B2 (ja) * 2014-09-26 2018-06-27 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および洗浄方法
CN106427219B (zh) * 2016-11-18 2018-07-06 深圳华云数码有限公司 清洗机构、喷墨打印机以及清洗方法
JP6905830B2 (ja) * 2017-01-11 2021-07-21 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
CN108933092A (zh) * 2017-05-26 2018-12-04 弘塑科技股份有限公司 基板处理装置、喷头清洗装置和喷头清洗方法
TWI640369B (zh) * 2017-05-26 2018-11-11 弘塑科技股份有限公司 基板處理裝置、噴頭清洗裝置和噴頭清洗方法
JP7018323B2 (ja) * 2018-01-22 2022-02-10 Ｔｏｗａ株式会社 加工装置、及び製品の製造方法
JP6939627B2 (ja) * 2018-02-16 2021-09-22 株式会社アイシン 塗布装置
JP7279096B2 (ja) * 2021-02-26 2023-05-22 株式会社Ｓｃｒｅｅｎホールディングス ノズル洗浄装置、ノズル洗浄方法および塗布装置
CN113733274B (zh) * 2021-09-22 2022-04-26 淮阴工学院 一种工业设计用木工加工装置
KR102629496B1 (ko) * 2021-12-24 2024-01-29 세메스 주식회사 홈 포트 및 기판 처리 장치

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5677000A (en) * 1995-08-24 1997-10-14 Dainippon Screen Mfg. Co., Ltd. Substrate spin treating method and apparatus
CN1757441A (zh) * 2004-10-04 2006-04-12 大日本网目版制造株式会社 基板处理装置以及基板处理方法
CN1983516A (zh) * 2005-12-13 2007-06-20 大日本网目版制造株式会社 基板处理方法以及基板处理装置
CN1992158A (zh) * 2005-12-28 2007-07-04 大日本网目版制造株式会社 基板处理装置
CN101114573A (zh) * 2006-07-27 2008-01-30 芝浦机械电子株式会社 基板的处理装置

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* Cited by examiner, † Cited by third party
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JP2001310147A (ja) * 2000-05-02 2001-11-06 Tokyo Ohka Kogyo Co Ltd スリットコータの予備吐出装置および予備吐出方法
JP3940054B2 (ja) * 2002-10-07 2007-07-04 大日本スクリーン製造株式会社 ノズル清掃装置およびこのノズル清掃装置を備えた基板処理装置
JP2004175525A (ja) * 2002-11-27 2004-06-24 Showa Mfg Co Ltd 薄型パネルの起立装置
JP4315787B2 (ja) * 2003-11-18 2009-08-19 大日本スクリーン製造株式会社 基板処理装置、並びに被充填体における液体充填度および気体混入度判定構造
JP4490797B2 (ja) * 2004-01-23 2010-06-30 大日本スクリーン製造株式会社 基板処理装置
JP4455102B2 (ja) * 2004-03-10 2010-04-21 大日本スクリーン製造株式会社 基板処理装置
JP4451175B2 (ja) * 2004-03-19 2010-04-14 大日本スクリーン製造株式会社 ノズル洗浄装置および基板処理装置
JP4526288B2 (ja) * 2004-03-25 2010-08-18 東京応化工業株式会社 スリットノズル先端の調整装置及び調整方法
JP4417205B2 (ja) * 2004-08-27 2010-02-17 大日本スクリーン製造株式会社 基板処理装置
TWI263542B (en) * 2004-10-04 2006-10-11 Dainippon Screen Mfg Apparatus for and method of processing substrate
JP4725273B2 (ja) 2005-09-29 2011-07-13 凸版印刷株式会社 予備吐出部を有するスピンレスコート装置及びそれを用いたカラーフィルタの製造方法
JP4986490B2 (ja) 2006-03-31 2012-07-25 東京応化工業株式会社 予備吐出装置
JP2008114106A (ja) 2006-11-01 2008-05-22 Seiko Epson Corp 吐出方法及び液滴吐出装置
JP4717782B2 (ja) * 2006-11-13 2011-07-06 大日本スクリーン製造株式会社 基板処理装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5677000A (en) * 1995-08-24 1997-10-14 Dainippon Screen Mfg. Co., Ltd. Substrate spin treating method and apparatus
CN1757441A (zh) * 2004-10-04 2006-04-12 大日本网目版制造株式会社 基板处理装置以及基板处理方法
CN1983516A (zh) * 2005-12-13 2007-06-20 大日本网目版制造株式会社 基板处理方法以及基板处理装置
CN1992158A (zh) * 2005-12-28 2007-07-04 大日本网目版制造株式会社 基板处理装置
CN101114573A (zh) * 2006-07-27 2008-01-30 芝浦机械电子株式会社 基板的处理装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开2004-175525A 2004.06.24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107433240A (zh) * 2016-05-26 2017-12-05 株式会社斯库林集团 喷嘴清扫装置、涂覆装置及喷嘴清扫方法
CN107433240B (zh) * 2016-05-26 2020-04-14 株式会社斯库林集团 喷嘴清扫装置、涂覆装置及喷嘴清扫方法

Also Published As

Publication number Publication date
TW201041066A (en) 2010-11-16
TWI399822B (zh) 2013-06-21
KR20100110726A (ko) 2010-10-13
JP2010240550A (ja) 2010-10-28
KR101202141B1 (ko) 2012-11-15
CN101856646A (zh) 2010-10-13

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Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C56 Change in the name or address of the patentee

Owner name: SCREEN GROUP CO., LTD.

Free format text: FORMER NAME: DAINIPPON SCREEN MFG. CO., LTD.

CP01 Change in the name or title of a patent holder

Address after: Kyoto Japan

Patentee after: DAINIPPON SCREEN MFG

Address before: Kyoto Japan

Patentee before: Dainippon Screen Mfg. Co., Ltd.