CN100414301C - 微电子接触件结构 - Google Patents

微电子接触件结构 Download PDF

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Publication number
CN100414301C
CN100414301C CNB2003801093003A CN200380109300A CN100414301C CN 100414301 C CN100414301 C CN 100414301C CN B2003801093003 A CNB2003801093003 A CN B2003801093003A CN 200380109300 A CN200380109300 A CN 200380109300A CN 100414301 C CN100414301 C CN 100414301C
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CN
China
Prior art keywords
layer
arms
contact
contact structure
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2003801093003A
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English (en)
Chinese (zh)
Other versions
CN1745306A (zh
Inventor
加里·W·格鲁贝
加埃唐·L·马蒂厄
亚历克·马德森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FormFactor Inc
Original Assignee
FormFactor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FormFactor Inc filed Critical FormFactor Inc
Publication of CN1745306A publication Critical patent/CN1745306A/zh
Application granted granted Critical
Publication of CN100414301C publication Critical patent/CN100414301C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/0675—Needle-like
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
CNB2003801093003A 2002-12-23 2003-12-18 微电子接触件结构 Expired - Fee Related CN100414301C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/328,083 US6945827B2 (en) 2002-12-23 2002-12-23 Microelectronic contact structure
US10/328,083 2002-12-23

Publications (2)

Publication Number Publication Date
CN1745306A CN1745306A (zh) 2006-03-08
CN100414301C true CN100414301C (zh) 2008-08-27

Family

ID=32594375

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2003801093003A Expired - Fee Related CN100414301C (zh) 2002-12-23 2003-12-18 微电子接触件结构

Country Status (7)

Country Link
US (2) US6945827B2 (enExample)
EP (1) EP1579225A2 (enExample)
JP (1) JP4486896B2 (enExample)
KR (1) KR101037305B1 (enExample)
CN (1) CN100414301C (enExample)
AU (1) AU2003299786A1 (enExample)
WO (1) WO2004059330A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI735164B (zh) * 2019-04-25 2021-08-01 日商歐姆龍股份有限公司 探針、檢查治具以及檢查單元

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US6945827B2 (en) 2005-09-20
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KR101037305B1 (ko) 2011-05-27
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