JP2006511804A5 - - Google Patents

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Publication number
JP2006511804A5
JP2006511804A5 JP2004563896A JP2004563896A JP2006511804A5 JP 2006511804 A5 JP2006511804 A5 JP 2006511804A5 JP 2004563896 A JP2004563896 A JP 2004563896A JP 2004563896 A JP2004563896 A JP 2004563896A JP 2006511804 A5 JP2006511804 A5 JP 2006511804A5
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JP
Japan
Prior art keywords
contact
layer
arms
base portion
micro
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JP2004563896A
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English (en)
Japanese (ja)
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JP2006511804A (ja
JP4486896B2 (ja
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Priority claimed from US10/328,083 external-priority patent/US6945827B2/en
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Publication of JP2006511804A5 publication Critical patent/JP2006511804A5/ja
Application granted granted Critical
Publication of JP4486896B2 publication Critical patent/JP4486896B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004563896A 2002-12-23 2003-12-18 微小電子接触構造体 Expired - Lifetime JP4486896B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/328,083 US6945827B2 (en) 2002-12-23 2002-12-23 Microelectronic contact structure
PCT/US2003/040829 WO2004059330A2 (en) 2002-12-23 2003-12-18 Microelectronic contact structure

Publications (3)

Publication Number Publication Date
JP2006511804A JP2006511804A (ja) 2006-04-06
JP2006511804A5 true JP2006511804A5 (enExample) 2009-02-19
JP4486896B2 JP4486896B2 (ja) 2010-06-23

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004563896A Expired - Lifetime JP4486896B2 (ja) 2002-12-23 2003-12-18 微小電子接触構造体

Country Status (7)

Country Link
US (2) US6945827B2 (enExample)
EP (1) EP1579225A2 (enExample)
JP (1) JP4486896B2 (enExample)
KR (1) KR101037305B1 (enExample)
CN (1) CN100414301C (enExample)
AU (1) AU2003299786A1 (enExample)
WO (1) WO2004059330A2 (enExample)

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