AU2003299786A1 - Microelectronic contact structure - Google Patents

Microelectronic contact structure

Info

Publication number
AU2003299786A1
AU2003299786A1 AU2003299786A AU2003299786A AU2003299786A1 AU 2003299786 A1 AU2003299786 A1 AU 2003299786A1 AU 2003299786 A AU2003299786 A AU 2003299786A AU 2003299786 A AU2003299786 A AU 2003299786A AU 2003299786 A1 AU2003299786 A1 AU 2003299786A1
Authority
AU
Australia
Prior art keywords
contact structure
microelectronic contact
microelectronic
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003299786A
Other languages
English (en)
Inventor
Gary W. Grube
Alec Madsen
Gaetan L. Mathieu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FormFactor Inc
Original Assignee
FormFactor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FormFactor Inc filed Critical FormFactor Inc
Publication of AU2003299786A1 publication Critical patent/AU2003299786A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/0675—Needle-like
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
AU2003299786A 2002-12-23 2003-12-18 Microelectronic contact structure Abandoned AU2003299786A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/328,083 US6945827B2 (en) 2002-12-23 2002-12-23 Microelectronic contact structure
US10/328,083 2002-12-23
PCT/US2003/040829 WO2004059330A2 (en) 2002-12-23 2003-12-18 Microelectronic contact structure

Publications (1)

Publication Number Publication Date
AU2003299786A1 true AU2003299786A1 (en) 2004-07-22

Family

ID=32594375

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003299786A Abandoned AU2003299786A1 (en) 2002-12-23 2003-12-18 Microelectronic contact structure

Country Status (7)

Country Link
US (2) US6945827B2 (enExample)
EP (1) EP1579225A2 (enExample)
JP (1) JP4486896B2 (enExample)
KR (1) KR101037305B1 (enExample)
CN (1) CN100414301C (enExample)
AU (1) AU2003299786A1 (enExample)
WO (1) WO2004059330A2 (enExample)

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US20040121627A1 (en) 2004-06-24
WO2004059330A3 (en) 2004-11-18
WO2004059330A2 (en) 2004-07-15
EP1579225A2 (en) 2005-09-28
CN1745306A (zh) 2006-03-08
JP2006511804A (ja) 2006-04-06
US7731546B2 (en) 2010-06-08
US6945827B2 (en) 2005-09-20
US20070270041A1 (en) 2007-11-22
KR20050094412A (ko) 2005-09-27
KR101037305B1 (ko) 2011-05-27
JP4486896B2 (ja) 2010-06-23
CN100414301C (zh) 2008-08-27

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