ATE538502T1 - Mehrschichtiges piezoelektrisches bauelement - Google Patents

Mehrschichtiges piezoelektrisches bauelement

Info

Publication number
ATE538502T1
ATE538502T1 AT05820084T AT05820084T ATE538502T1 AT E538502 T1 ATE538502 T1 AT E538502T1 AT 05820084 T AT05820084 T AT 05820084T AT 05820084 T AT05820084 T AT 05820084T AT E538502 T1 ATE538502 T1 AT E538502T1
Authority
AT
Austria
Prior art keywords
crack
stack
piezoelectric component
layer piezoelectric
piezoelectric element
Prior art date
Application number
AT05820084T
Other languages
English (en)
Inventor
Koichi Hayashi
Hiromitsu Hongo
Shozo Kobayashi
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Application granted granted Critical
Publication of ATE538502T1 publication Critical patent/ATE538502T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Ceramic Capacitors (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AT05820084T 2005-02-15 2005-12-22 Mehrschichtiges piezoelektrisches bauelement ATE538502T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005038232 2005-02-15
PCT/JP2005/023651 WO2006087871A1 (ja) 2005-02-15 2005-12-22 積層型圧電素子

Publications (1)

Publication Number Publication Date
ATE538502T1 true ATE538502T1 (de) 2012-01-15

Family

ID=36916282

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05820084T ATE538502T1 (de) 2005-02-15 2005-12-22 Mehrschichtiges piezoelektrisches bauelement

Country Status (5)

Country Link
US (1) US7598660B2 (de)
EP (1) EP1850403B1 (de)
JP (1) JP4775372B2 (de)
AT (1) ATE538502T1 (de)
WO (1) WO2006087871A1 (de)

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DE10234787C1 (de) * 2002-06-07 2003-10-30 Pi Ceramic Gmbh Keramische Tec Verfahren zur Herstellung eines monolithischen Vielschichtaktors, monolithischer Vielschichtaktor aus einem piezokeramischen oder elektrostriktiven Material
DE602005027914D1 (de) * 2005-09-16 2011-06-16 Delphi Tech Holding Sarl Piezoelektrischer Aktor
WO2007037377A1 (ja) * 2005-09-29 2007-04-05 Kyocera Corporation 積層型圧電素子およびこれを用いた噴射装置
DE102006026644A1 (de) * 2006-06-08 2007-12-13 Robert Bosch Gmbh Piezoelektrischer Aktor
US8104693B2 (en) 2006-09-28 2012-01-31 Kyocera Corporation Multilayer piezoelectric element, injection device and fuel injection system using the same, and method of manufacturing multilayer piezoelectric element
JP5050164B2 (ja) * 2006-10-20 2012-10-17 京セラ株式会社 圧電アクチュエータユニット及びその製造方法
JP5066098B2 (ja) * 2006-11-29 2012-11-07 京セラ株式会社 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム
JPWO2008068975A1 (ja) * 2006-12-06 2010-03-18 株式会社村田製作所 積層型圧電素子及びその製造方法
WO2008072768A1 (ja) * 2006-12-15 2008-06-19 Kyocera Corporation 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム
DE102006062076A1 (de) * 2006-12-29 2008-07-10 Siemens Ag Piezokeramischer Vielschichtaktor und Verfahren zu seiner Herstellung
DE102007008120A1 (de) * 2007-02-19 2008-08-21 Siemens Ag Piezostapel und Verfahren zum Herstellen eines Piezostapels
ATE528802T1 (de) * 2007-02-19 2011-10-15 Siemens Ag Piezokeramischer vielschichtaktor und herstellungsverfahren dafür
EP1978567B1 (de) * 2007-02-19 2014-06-25 Continental Automotive GmbH Piezokeramischer Mehrschichtaktor und Verfahren zur Herstellung eines piezokeramischen Mehrschichtaktors
ATE535946T1 (de) * 2007-02-19 2011-12-15 Siemens Ag Piezokeramischer mehrschichtaktor und verfahren zur herstellung eines piezokeramischen mehrschichtaktors
JP4930410B2 (ja) * 2007-02-26 2012-05-16 株式会社デンソー 積層型圧電素子
DE102007037500A1 (de) * 2007-05-11 2008-11-13 Epcos Ag Piezoelektrisches Vielschichtbauelement
JP2010536160A (ja) * 2007-08-08 2010-11-25 エプコス アクチエンゲゼルシャフト 多層圧電素子
JP5076733B2 (ja) * 2007-08-24 2012-11-21 株式会社デンソー 積層型圧電素子
DE102007046077A1 (de) * 2007-09-26 2009-04-02 Epcos Ag Piezoelektrisches Vielschichtbauelement
DE102008011414A1 (de) * 2008-02-27 2009-09-10 Continental Automotive Gmbh Verfahren zum Polarisieren einer Piezokeramik
DE102009043000A1 (de) * 2009-05-29 2010-12-02 Epcos Ag Piezoelektrisches Vielschichtbauelement
DE102010005403A1 (de) * 2010-01-22 2011-07-28 Epcos Ag, 81669 Verfahren zur Herstellung eines piezoelektrischen Vielschichtbauelements und piezoelektrisches Vielschichtbauelement
DE102010005906A1 (de) * 2010-01-27 2011-07-28 Epcos Ag, 81669 Piezoelektrisches Bauelement
DE102010033136A1 (de) * 2010-05-17 2011-11-17 Epcos Ag Piezoaktor
DE102010022911B4 (de) 2010-06-07 2017-01-19 Continental Automotive Gmbh Verfahren zum Herstellen eines Piezoaktors und Piezoaktor
CN102208526A (zh) * 2011-05-31 2011-10-05 广州市番禺奥迪威电子有限公司 一种多层压电元件及其电极连接方法
JP5963603B2 (ja) * 2012-08-03 2016-08-03 オリンパス株式会社 超音波振動デバイス、超音波振動デバイスの製造方法および超音波医療装置
DE102012107343B4 (de) * 2012-08-09 2018-11-22 Epcos Ag Verfahren zur Polung eines Vielschichtbauelements
JP7036604B2 (ja) * 2018-01-30 2022-03-15 太陽誘電株式会社 積層圧電セラミック部品及び圧電デバイス
US11309481B2 (en) * 2018-01-30 2022-04-19 Taiyo Yuden Co., Ltd Multi-layer piezoelectric ceramic component-mounted piezoelectric device
CN119764291B (zh) * 2025-03-06 2025-06-17 嘉善复旦研究院 半导体器件、半导体封装和半导体封装方法
CN119767688B (zh) * 2025-03-06 2025-06-17 嘉善复旦研究院 多层电极连接结构、片上电容器和多层电极连接方法

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EP0094078B1 (de) * 1982-05-11 1988-11-02 Nec Corporation Elektrostriktives Vielschichtelement welches wiederholter Pulsanwendung widersteht
JPS61124183A (ja) * 1984-11-20 1986-06-11 Nippon Soken Inc 積層型圧電体
JP2567046B2 (ja) * 1987-09-25 1996-12-25 日立金属株式会社 積層型変位素子
JPH03270085A (ja) * 1990-03-19 1991-12-02 Brother Ind Ltd 積層圧電アクチュエータ素子
JPH04299588A (ja) * 1991-03-28 1992-10-22 Nec Corp 電歪効果素子
JPH065794A (ja) 1992-06-19 1994-01-14 Hitachi Ltd 高周波増幅装置
JP3358669B2 (ja) * 1992-12-25 2002-12-24 エヌイーシートーキン株式会社 積層型圧電セラミックアクチュエータ
JPH08274381A (ja) * 1995-03-31 1996-10-18 Chichibu Onoda Cement Corp 積層型圧電アクチュエータ及びその製造方法
JPH11121820A (ja) 1997-10-09 1999-04-30 Hitachi Ltd 積層型圧電アクチュエータ
DE19802302A1 (de) * 1998-01-22 1999-07-29 Bosch Gmbh Robert Piezoelektrischer Aktor
JP2000133851A (ja) 1998-10-28 2000-05-12 Hitachi Ltd 積層型圧電素子
JP3551089B2 (ja) * 1999-07-05 2004-08-04 松下電器産業株式会社 積層型圧電トランスとこれを用いた電子機器
JP2001102646A (ja) 1999-09-28 2001-04-13 Tokin Ceramics Corp 積層型圧電セラミックス
JP4854831B2 (ja) * 2000-03-17 2012-01-18 太平洋セメント株式会社 積層型圧電アクチュエータ
US20010033125A1 (en) * 2000-04-20 2001-10-25 Tokin Corporation Multilayer piezoelectric actuator device having a conductive member attached to an external electrode thereof
DE10307825A1 (de) * 2003-02-24 2004-09-09 Epcos Ag Elektrisches Vielschichtbauelement und Schichtstapel
JP2004288794A (ja) * 2003-03-20 2004-10-14 Nec Tokin Corp 積層型圧電素子およびその製造方法
WO2005002049A1 (ja) * 2003-06-26 2005-01-06 Murata Manufacturing Co., Ltd. 弾性表面波素子
JP4802445B2 (ja) * 2003-09-29 2011-10-26 株式会社村田製作所 積層型圧電素子とその製造方法
JP4931334B2 (ja) * 2004-05-27 2012-05-16 京セラ株式会社 噴射装置
DE102004031402A1 (de) 2004-06-29 2006-02-09 Siemens Ag Piezoelektrisches Bauteil mit Sollbruchstelle, Verfahren zum Herstellen des Bauteils und Verwendung des Bauteils
DE102004050803A1 (de) * 2004-10-19 2006-04-20 Robert Bosch Gmbh Piezoaktor
JP4876467B2 (ja) * 2004-12-06 2012-02-15 株式会社デンソー 積層型圧電素子
DE602005027914D1 (de) * 2005-09-16 2011-06-16 Delphi Tech Holding Sarl Piezoelektrischer Aktor
US7679273B2 (en) * 2006-07-31 2010-03-16 Delphi Technologies, Inc. Strain tolerant metal electrode design

Also Published As

Publication number Publication date
US20070269667A1 (en) 2007-11-22
JP4775372B2 (ja) 2011-09-21
WO2006087871A1 (ja) 2006-08-24
EP1850403B1 (de) 2011-12-21
EP1850403A1 (de) 2007-10-31
US7598660B2 (en) 2009-10-06
JPWO2006087871A1 (ja) 2008-07-03
EP1850403A4 (de) 2010-08-11

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