ATE538502T1 - Mehrschichtiges piezoelektrisches bauelement - Google Patents
Mehrschichtiges piezoelektrisches bauelementInfo
- Publication number
- ATE538502T1 ATE538502T1 AT05820084T AT05820084T ATE538502T1 AT E538502 T1 ATE538502 T1 AT E538502T1 AT 05820084 T AT05820084 T AT 05820084T AT 05820084 T AT05820084 T AT 05820084T AT E538502 T1 ATE538502 T1 AT E538502T1
- Authority
- AT
- Austria
- Prior art keywords
- crack
- stack
- piezoelectric component
- layer piezoelectric
- piezoelectric element
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Ceramic Capacitors (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005038232 | 2005-02-15 | ||
PCT/JP2005/023651 WO2006087871A1 (ja) | 2005-02-15 | 2005-12-22 | 積層型圧電素子 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE538502T1 true ATE538502T1 (de) | 2012-01-15 |
Family
ID=36916282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05820084T ATE538502T1 (de) | 2005-02-15 | 2005-12-22 | Mehrschichtiges piezoelektrisches bauelement |
Country Status (5)
Country | Link |
---|---|
US (1) | US7598660B2 (de) |
EP (1) | EP1850403B1 (de) |
JP (1) | JP4775372B2 (de) |
AT (1) | ATE538502T1 (de) |
WO (1) | WO2006087871A1 (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10234787C1 (de) * | 2002-06-07 | 2003-10-30 | Pi Ceramic Gmbh Keramische Tec | Verfahren zur Herstellung eines monolithischen Vielschichtaktors, monolithischer Vielschichtaktor aus einem piezokeramischen oder elektrostriktiven Material |
ATE533189T1 (de) * | 2005-09-16 | 2011-11-15 | Delphi Tech Holding Sarl | Piezoelektrischer aktor |
CN101789486B (zh) * | 2005-09-29 | 2012-10-31 | 京瓷株式会社 | 层叠型压电元件及使用该层叠型压电元件的喷射装置 |
DE102006026644A1 (de) * | 2006-06-08 | 2007-12-13 | Robert Bosch Gmbh | Piezoelektrischer Aktor |
WO2008038683A1 (en) * | 2006-09-28 | 2008-04-03 | Kyocera Corporation | Laminated piezoelectric element, injection apparatus and fuel injection system using the laminated piezoelectric element, and method for manufacturing laminated piezoelectric element |
CN101563795B (zh) * | 2006-10-20 | 2011-03-23 | 京瓷株式会社 | 压电致动器装置及其制造方法 |
CN102290526B (zh) * | 2006-11-29 | 2014-04-16 | 京瓷株式会社 | 层叠型压电元件、具备其的喷射装置及燃料喷射系统 |
JPWO2008068975A1 (ja) * | 2006-12-06 | 2010-03-18 | 株式会社村田製作所 | 積層型圧電素子及びその製造方法 |
JP5084745B2 (ja) * | 2006-12-15 | 2012-11-28 | 京セラ株式会社 | 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム |
DE102006062076A1 (de) * | 2006-12-29 | 2008-07-10 | Siemens Ag | Piezokeramischer Vielschichtaktor und Verfahren zu seiner Herstellung |
ATE528802T1 (de) * | 2007-02-19 | 2011-10-15 | Siemens Ag | Piezokeramischer vielschichtaktor und herstellungsverfahren dafür |
EP1978567B1 (de) * | 2007-02-19 | 2014-06-25 | Continental Automotive GmbH | Piezokeramischer Mehrschichtaktor und Verfahren zur Herstellung eines piezokeramischen Mehrschichtaktors |
ATE535946T1 (de) * | 2007-02-19 | 2011-12-15 | Siemens Ag | Piezokeramischer mehrschichtaktor und verfahren zur herstellung eines piezokeramischen mehrschichtaktors |
DE102007008120A1 (de) * | 2007-02-19 | 2008-08-21 | Siemens Ag | Piezostapel und Verfahren zum Herstellen eines Piezostapels |
JP4930410B2 (ja) * | 2007-02-26 | 2012-05-16 | 株式会社デンソー | 積層型圧電素子 |
DE102007037500A1 (de) * | 2007-05-11 | 2008-11-13 | Epcos Ag | Piezoelektrisches Vielschichtbauelement |
JP2010536160A (ja) * | 2007-08-08 | 2010-11-25 | エプコス アクチエンゲゼルシャフト | 多層圧電素子 |
JP5076733B2 (ja) * | 2007-08-24 | 2012-11-21 | 株式会社デンソー | 積層型圧電素子 |
DE102007046077A1 (de) | 2007-09-26 | 2009-04-02 | Epcos Ag | Piezoelektrisches Vielschichtbauelement |
DE102008011414A1 (de) * | 2008-02-27 | 2009-09-10 | Continental Automotive Gmbh | Verfahren zum Polarisieren einer Piezokeramik |
DE102009043000A1 (de) * | 2009-05-29 | 2010-12-02 | Epcos Ag | Piezoelektrisches Vielschichtbauelement |
DE102010005403A1 (de) | 2010-01-22 | 2011-07-28 | Epcos Ag, 81669 | Verfahren zur Herstellung eines piezoelektrischen Vielschichtbauelements und piezoelektrisches Vielschichtbauelement |
DE102010005906A1 (de) * | 2010-01-27 | 2011-07-28 | Epcos Ag, 81669 | Piezoelektrisches Bauelement |
DE102010033136A1 (de) * | 2010-05-17 | 2011-11-17 | Epcos Ag | Piezoaktor |
DE102010022911B4 (de) * | 2010-06-07 | 2017-01-19 | Continental Automotive Gmbh | Verfahren zum Herstellen eines Piezoaktors und Piezoaktor |
CN102208526A (zh) * | 2011-05-31 | 2011-10-05 | 广州市番禺奥迪威电子有限公司 | 一种多层压电元件及其电极连接方法 |
JP5963603B2 (ja) * | 2012-08-03 | 2016-08-03 | オリンパス株式会社 | 超音波振動デバイス、超音波振動デバイスの製造方法および超音波医療装置 |
DE102012107343B4 (de) * | 2012-08-09 | 2018-11-22 | Epcos Ag | Verfahren zur Polung eines Vielschichtbauelements |
JP7036604B2 (ja) | 2018-01-30 | 2022-03-15 | 太陽誘電株式会社 | 積層圧電セラミック部品及び圧電デバイス |
US11309481B2 (en) * | 2018-01-30 | 2022-04-19 | Taiyo Yuden Co., Ltd | Multi-layer piezoelectric ceramic component-mounted piezoelectric device |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0094078B1 (de) | 1982-05-11 | 1988-11-02 | Nec Corporation | Elektrostriktives Vielschichtelement welches wiederholter Pulsanwendung widersteht |
JPS61124183A (ja) * | 1984-11-20 | 1986-06-11 | Nippon Soken Inc | 積層型圧電体 |
JP2567046B2 (ja) | 1987-09-25 | 1996-12-25 | 日立金属株式会社 | 積層型変位素子 |
JPH03270085A (ja) * | 1990-03-19 | 1991-12-02 | Brother Ind Ltd | 積層圧電アクチュエータ素子 |
JPH04299588A (ja) * | 1991-03-28 | 1992-10-22 | Nec Corp | 電歪効果素子 |
JPH065794A (ja) | 1992-06-19 | 1994-01-14 | Hitachi Ltd | 高周波増幅装置 |
JP3358669B2 (ja) * | 1992-12-25 | 2002-12-24 | エヌイーシートーキン株式会社 | 積層型圧電セラミックアクチュエータ |
JPH08274381A (ja) * | 1995-03-31 | 1996-10-18 | Chichibu Onoda Cement Corp | 積層型圧電アクチュエータ及びその製造方法 |
JPH11121820A (ja) | 1997-10-09 | 1999-04-30 | Hitachi Ltd | 積層型圧電アクチュエータ |
DE19802302A1 (de) * | 1998-01-22 | 1999-07-29 | Bosch Gmbh Robert | Piezoelektrischer Aktor |
JP2000133851A (ja) | 1998-10-28 | 2000-05-12 | Hitachi Ltd | 積層型圧電素子 |
JP3551089B2 (ja) * | 1999-07-05 | 2004-08-04 | 松下電器産業株式会社 | 積層型圧電トランスとこれを用いた電子機器 |
JP2001102646A (ja) | 1999-09-28 | 2001-04-13 | Tokin Ceramics Corp | 積層型圧電セラミックス |
JP4854831B2 (ja) * | 2000-03-17 | 2012-01-18 | 太平洋セメント株式会社 | 積層型圧電アクチュエータ |
US20010033125A1 (en) * | 2000-04-20 | 2001-10-25 | Tokin Corporation | Multilayer piezoelectric actuator device having a conductive member attached to an external electrode thereof |
DE10307825A1 (de) * | 2003-02-24 | 2004-09-09 | Epcos Ag | Elektrisches Vielschichtbauelement und Schichtstapel |
JP2004288794A (ja) * | 2003-03-20 | 2004-10-14 | Nec Tokin Corp | 積層型圧電素子およびその製造方法 |
JP4341622B2 (ja) * | 2003-06-26 | 2009-10-07 | 株式会社村田製作所 | 弾性表面波装置 |
JP4802445B2 (ja) * | 2003-09-29 | 2011-10-26 | 株式会社村田製作所 | 積層型圧電素子とその製造方法 |
JP4931334B2 (ja) * | 2004-05-27 | 2012-05-16 | 京セラ株式会社 | 噴射装置 |
DE102004031402A1 (de) | 2004-06-29 | 2006-02-09 | Siemens Ag | Piezoelektrisches Bauteil mit Sollbruchstelle, Verfahren zum Herstellen des Bauteils und Verwendung des Bauteils |
DE102004050803A1 (de) * | 2004-10-19 | 2006-04-20 | Robert Bosch Gmbh | Piezoaktor |
JP4876467B2 (ja) * | 2004-12-06 | 2012-02-15 | 株式会社デンソー | 積層型圧電素子 |
ATE533189T1 (de) * | 2005-09-16 | 2011-11-15 | Delphi Tech Holding Sarl | Piezoelektrischer aktor |
US7679273B2 (en) * | 2006-07-31 | 2010-03-16 | Delphi Technologies, Inc. | Strain tolerant metal electrode design |
-
2005
- 2005-12-22 AT AT05820084T patent/ATE538502T1/de active
- 2005-12-22 WO PCT/JP2005/023651 patent/WO2006087871A1/ja active Application Filing
- 2005-12-22 EP EP20050820084 patent/EP1850403B1/de not_active Not-in-force
- 2005-12-22 JP JP2007503589A patent/JP4775372B2/ja not_active Expired - Fee Related
-
2007
- 2007-08-10 US US11/837,000 patent/US7598660B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US7598660B2 (en) | 2009-10-06 |
EP1850403A4 (de) | 2010-08-11 |
JP4775372B2 (ja) | 2011-09-21 |
US20070269667A1 (en) | 2007-11-22 |
EP1850403A1 (de) | 2007-10-31 |
EP1850403B1 (de) | 2011-12-21 |
JPWO2006087871A1 (ja) | 2008-07-03 |
WO2006087871A1 (ja) | 2006-08-24 |
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