DE602005027914D1 - Piezoelektrischer Aktor - Google Patents

Piezoelektrischer Aktor

Info

Publication number
DE602005027914D1
DE602005027914D1 DE602005027914T DE602005027914T DE602005027914D1 DE 602005027914 D1 DE602005027914 D1 DE 602005027914D1 DE 602005027914 T DE602005027914 T DE 602005027914T DE 602005027914 T DE602005027914 T DE 602005027914T DE 602005027914 D1 DE602005027914 D1 DE 602005027914D1
Authority
DE
Germany
Prior art keywords
internal electrodes
stack
piezoelectric material
actuator
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005027914T
Other languages
English (en)
Inventor
Russell Bosch
Michael Cooke
Christopher A Goat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Delphi Technologies Operations Luxembourg SARL
Original Assignee
Delphi Technologies Holding SARL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=35607292&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE602005027914(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Delphi Technologies Holding SARL filed Critical Delphi Technologies Holding SARL
Publication of DE602005027914D1 publication Critical patent/DE602005027914D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
DE602005027914T 2005-09-16 2005-09-16 Piezoelektrischer Aktor Active DE602005027914D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP05255752.7A EP1764844B2 (de) 2005-09-16 2005-09-16 Piezoelektrischer aktor
EP08103335A EP1944813B1 (de) 2005-09-16 2005-09-16 Piezoelektrischer Aktor

Publications (1)

Publication Number Publication Date
DE602005027914D1 true DE602005027914D1 (de) 2011-06-16

Family

ID=35607292

Family Applications (2)

Application Number Title Priority Date Filing Date
DE602005027914T Active DE602005027914D1 (de) 2005-09-16 2005-09-16 Piezoelektrischer Aktor
DE602005011970T Active DE602005011970D1 (de) 2005-09-16 2005-09-16 Piezoelektrischer Aktor

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE602005011970T Active DE602005011970D1 (de) 2005-09-16 2005-09-16 Piezoelektrischer Aktor

Country Status (7)

Country Link
US (1) US8358051B2 (de)
EP (3) EP1944814B1 (de)
JP (1) JP2009508349A (de)
AT (3) ATE533189T1 (de)
DE (2) DE602005027914D1 (de)
DK (2) DK1764844T3 (de)
WO (1) WO2007031700A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4775372B2 (ja) * 2005-02-15 2011-09-21 株式会社村田製作所 積層型圧電素子
US8378554B2 (en) * 2005-10-28 2013-02-19 Kyocera Corporation Multi-layer piezoelectric element and injection apparatus using the same
DE102006026644A1 (de) * 2006-06-08 2007-12-13 Robert Bosch Gmbh Piezoelektrischer Aktor
DE102007004874A1 (de) * 2006-10-02 2008-04-03 Robert Bosch Gmbh Piezoaktor, bestehend aus übereinander gestapelten, elektrisch kontaktierten Piezoelementen
WO2008047460A1 (en) * 2006-10-20 2008-04-24 Kyocera Corporation Piezoelectric actuator unit and method for manufacturing the same
WO2008053569A1 (en) * 2006-10-31 2008-05-08 Kyocera Corporation Multi-layer piezoelectric element and injection apparatus employing the same
DE102007005341A1 (de) 2007-02-02 2008-08-07 Epcos Ag Vielschichtbauelement sowie Verfahren zur Herstellung eines Vielschichtbauelements
JP4911066B2 (ja) 2007-02-26 2012-04-04 株式会社デンソー 積層型圧電素子
DE102007015446A1 (de) * 2007-03-30 2008-10-02 Siemens Ag Piezoelektrisches Bauteil mit Sicherheitsschicht und Infiltrationsbarriere und Verfahren zu dessen Herstellung
DE102007037500A1 (de) 2007-05-11 2008-11-13 Epcos Ag Piezoelektrisches Vielschichtbauelement
JP5205852B2 (ja) * 2007-08-03 2013-06-05 Ｔｄｋ株式会社 圧電装置
JP5076733B2 (ja) 2007-08-24 2012-11-21 株式会社デンソー 積層型圧電素子
DE102009000089A1 (de) * 2008-01-14 2009-07-16 Robert Bosch Gmbh Piezoelektrischer Aktor
JP5587793B2 (ja) * 2008-01-23 2014-09-10 エプコス アクチエンゲゼルシャフト 圧電多層構成要素
EP2232600B1 (de) 2008-01-23 2015-06-10 Epcos AG Piezoelektrisches vielschichtbauelement
JP5539902B2 (ja) * 2008-01-23 2014-07-02 エプコス アクチエンゲゼルシャフト 圧電多層構成要素
DE102008052914A1 (de) * 2008-08-01 2010-04-08 Epcos Ag Piezoaktor mit Sollbruchschicht
DE102009043000A1 (de) * 2009-05-29 2010-12-02 Epcos Ag Piezoelektrisches Vielschichtbauelement
DE102010006587A1 (de) * 2010-02-02 2011-08-04 Epcos Ag, 81669 Piezoelektrisches Bauelement
DE102010020192A1 (de) * 2010-05-11 2011-11-17 Epcos Ag Piezoelektrisches Vielschichtbauelement
US9190600B2 (en) 2012-06-13 2015-11-17 Purdue Research Foundation Large-deflection microactuators
JP6728260B2 (ja) * 2018-03-22 2020-07-22 株式会社東芝 積層型超音波トランスデューサ及び超音波検査装置

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4932119A (en) * 1989-03-28 1990-06-12 Litton Systems, Inc. Method of making standard electrodisplacive transducers for deformable mirrors
US4903166A (en) * 1989-06-09 1990-02-20 Avx Corporation Electrostrictive actuators
US5089739A (en) * 1990-03-19 1992-02-18 Brother Kogyo Kabushiki Kaisha Laminate type piezoelectric actuator element
JPH04214686A (ja) * 1990-10-05 1992-08-05 Nec Corp 電歪効果素子
DE4201937C2 (de) * 1991-01-25 1997-05-22 Murata Manufacturing Co Piezoelektrisches laminiertes Stellglied
DE19704389C2 (de) * 1997-02-06 1999-02-04 Fraunhofer Ges Forschung Aktor aus Einzelelementen
JPH10241993A (ja) * 1997-02-27 1998-09-11 Tokin Corp 積層セラミック電子部品
CZ2001665A3 (cs) * 1999-06-23 2002-01-16 Robert Bosch Gmbh Vícevrstvý piezoaktuátor pro dieselové vstřikovací zařízení s opatřením omezujícím tvoření prasklin a způsob jeho výroby
JP2001102646A (ja) * 1999-09-28 2001-04-13 Tokin Ceramics Corp 積層型圧電セラミックス
JP4658280B2 (ja) * 1999-11-29 2011-03-23 太平洋セメント株式会社 積層型圧電アクチュエータ
JP4854831B2 (ja) * 2000-03-17 2012-01-18 太平洋セメント株式会社 積層型圧電アクチュエータ
DE10152490A1 (de) * 2000-11-06 2002-05-08 Ceramtec Ag Außenelektroden an piezokeramischen Vielschichtaktoren
JP4214686B2 (ja) 2001-06-18 2009-01-28 日本ゼオン株式会社 樹脂積層体及びその製造方法
JP2003125569A (ja) 2001-08-08 2003-04-25 Matsushita Electric Ind Co Ltd ブラシレスモータ
DE10234787C1 (de) * 2002-06-07 2003-10-30 Pi Ceramic Gmbh Keramische Tec Verfahren zur Herstellung eines monolithischen Vielschichtaktors, monolithischer Vielschichtaktor aus einem piezokeramischen oder elektrostriktiven Material
DE10307825A1 (de) † 2003-02-24 2004-09-09 Epcos Ag Elektrisches Vielschichtbauelement und Schichtstapel
JP2004288794A (ja) * 2003-03-20 2004-10-14 Nec Tokin Corp 積層型圧電素子およびその製造方法
DE102004050803A1 (de) † 2004-10-19 2006-04-20 Robert Bosch Gmbh Piezoaktor
JP4843948B2 (ja) * 2005-01-21 2011-12-21 Ｔｄｋ株式会社 積層型圧電素子
JP4775372B2 (ja) * 2005-02-15 2011-09-21 株式会社村田製作所 積層型圧電素子
ATE528802T1 (de) * 2007-02-19 2011-10-15 Siemens Ag Piezokeramischer vielschichtaktor und herstellungsverfahren dafür

Also Published As

Publication number Publication date
US20100237751A1 (en) 2010-09-23
EP1764844A1 (de) 2007-03-21
EP1944813B1 (de) 2011-05-04
JP2009508349A (ja) 2009-02-26
EP1764844B1 (de) 2008-12-24
WO2007031700A1 (en) 2007-03-22
EP1944814B1 (de) 2011-11-09
DK1944813T3 (da) 2011-06-06
EP1944813A1 (de) 2008-07-16
US8358051B2 (en) 2013-01-22
EP1764844B2 (de) 2016-06-22
ATE418796T1 (de) 2009-01-15
ATE508483T1 (de) 2011-05-15
DK1764844T3 (da) 2009-04-20
ATE533189T1 (de) 2011-11-15
EP1944814A1 (de) 2008-07-16
DE602005011970D1 (de) 2009-02-05

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