ATE508483T1 - Piezoelektrischer aktor - Google Patents
Piezoelektrischer aktorInfo
- Publication number
- ATE508483T1 ATE508483T1 AT08103335T AT08103335T ATE508483T1 AT E508483 T1 ATE508483 T1 AT E508483T1 AT 08103335 T AT08103335 T AT 08103335T AT 08103335 T AT08103335 T AT 08103335T AT E508483 T1 ATE508483 T1 AT E508483T1
- Authority
- AT
- Austria
- Prior art keywords
- internal electrodes
- stack
- piezoelectric material
- actuator
- piezoelectric
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05255752.7A EP1764844B2 (de) | 2005-09-16 | 2005-09-16 | Piezoelektrischer aktor |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE508483T1 true ATE508483T1 (de) | 2011-05-15 |
Family
ID=35607292
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT08103336T ATE533189T1 (de) | 2005-09-16 | 2005-09-16 | Piezoelektrischer aktor |
AT05255752T ATE418796T1 (de) | 2005-09-16 | 2005-09-16 | Piezoelektrischer aktor |
AT08103335T ATE508483T1 (de) | 2005-09-16 | 2005-09-16 | Piezoelektrischer aktor |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT08103336T ATE533189T1 (de) | 2005-09-16 | 2005-09-16 | Piezoelektrischer aktor |
AT05255752T ATE418796T1 (de) | 2005-09-16 | 2005-09-16 | Piezoelektrischer aktor |
Country Status (7)
Country | Link |
---|---|
US (1) | US8358051B2 (de) |
EP (3) | EP1944814B1 (de) |
JP (1) | JP2009508349A (de) |
AT (3) | ATE533189T1 (de) |
DE (2) | DE602005027914D1 (de) |
DK (2) | DK1764844T3 (de) |
WO (1) | WO2007031700A1 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006087871A1 (ja) * | 2005-02-15 | 2006-08-24 | Murata Manufacturing Co., Ltd. | 積層型圧電素子 |
CN101728479B (zh) * | 2005-10-28 | 2012-02-29 | 京瓷株式会社 | 层叠型压电元件及使用它的喷射装置 |
DE102006026644A1 (de) * | 2006-06-08 | 2007-12-13 | Robert Bosch Gmbh | Piezoelektrischer Aktor |
DE102007004874A1 (de) * | 2006-10-02 | 2008-04-03 | Robert Bosch Gmbh | Piezoaktor, bestehend aus übereinander gestapelten, elektrisch kontaktierten Piezoelementen |
JP5050164B2 (ja) * | 2006-10-20 | 2012-10-17 | 京セラ株式会社 | 圧電アクチュエータユニット及びその製造方法 |
WO2008053569A1 (en) * | 2006-10-31 | 2008-05-08 | Kyocera Corporation | Multi-layer piezoelectric element and injection apparatus employing the same |
DE102007005341A1 (de) * | 2007-02-02 | 2008-08-07 | Epcos Ag | Vielschichtbauelement sowie Verfahren zur Herstellung eines Vielschichtbauelements |
JP4911066B2 (ja) | 2007-02-26 | 2012-04-04 | 株式会社デンソー | 積層型圧電素子 |
DE102007015446A1 (de) * | 2007-03-30 | 2008-10-02 | Siemens Ag | Piezoelektrisches Bauteil mit Sicherheitsschicht und Infiltrationsbarriere und Verfahren zu dessen Herstellung |
DE102007037500A1 (de) * | 2007-05-11 | 2008-11-13 | Epcos Ag | Piezoelektrisches Vielschichtbauelement |
JP5205852B2 (ja) * | 2007-08-03 | 2013-06-05 | Tdk株式会社 | 圧電装置 |
JP5076733B2 (ja) * | 2007-08-24 | 2012-11-21 | 株式会社デンソー | 積層型圧電素子 |
DE102009000089A1 (de) * | 2008-01-14 | 2009-07-16 | Robert Bosch Gmbh | Piezoelektrischer Aktor |
EP2232599B1 (de) * | 2008-01-23 | 2014-12-24 | Epcos AG | Piezoelektrisches vielschichtbauelement |
JP2011510505A (ja) | 2008-01-23 | 2011-03-31 | エプコス アクチエンゲゼルシャフト | 圧電多層構成要素 |
JP5587793B2 (ja) * | 2008-01-23 | 2014-09-10 | エプコス アクチエンゲゼルシャフト | 圧電多層構成要素 |
DE102008052914A1 (de) | 2008-08-01 | 2010-04-08 | Epcos Ag | Piezoaktor mit Sollbruchschicht |
DE102009043000A1 (de) * | 2009-05-29 | 2010-12-02 | Epcos Ag | Piezoelektrisches Vielschichtbauelement |
DE102010006587A1 (de) * | 2010-02-02 | 2011-08-04 | Epcos Ag, 81669 | Piezoelektrisches Bauelement |
DE102010020192A1 (de) * | 2010-05-11 | 2011-11-17 | Epcos Ag | Piezoelektrisches Vielschichtbauelement |
US9190600B2 (en) | 2012-06-13 | 2015-11-17 | Purdue Research Foundation | Large-deflection microactuators |
JP6728260B2 (ja) * | 2018-03-22 | 2020-07-22 | 株式会社東芝 | 積層型超音波トランスデューサ及び超音波検査装置 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4932119A (en) * | 1989-03-28 | 1990-06-12 | Litton Systems, Inc. | Method of making standard electrodisplacive transducers for deformable mirrors |
US4903166A (en) * | 1989-06-09 | 1990-02-20 | Avx Corporation | Electrostrictive actuators |
US5089739A (en) * | 1990-03-19 | 1992-02-18 | Brother Kogyo Kabushiki Kaisha | Laminate type piezoelectric actuator element |
JPH04214686A (ja) * | 1990-10-05 | 1992-08-05 | Nec Corp | 電歪効果素子 |
DE4201937C2 (de) * | 1991-01-25 | 1997-05-22 | Murata Manufacturing Co | Piezoelektrisches laminiertes Stellglied |
DE19704389C2 (de) * | 1997-02-06 | 1999-02-04 | Fraunhofer Ges Forschung | Aktor aus Einzelelementen |
JPH10241993A (ja) * | 1997-02-27 | 1998-09-11 | Tokin Corp | 積層セラミック電子部品 |
CN1314007A (zh) * | 1999-06-23 | 2001-09-19 | 罗伯特·博施有限公司 | 用于柴油喷射装置的带防裂设施的压电式多层致动器及制造它的方法 |
JP2001102646A (ja) * | 1999-09-28 | 2001-04-13 | Tokin Ceramics Corp | 積層型圧電セラミックス |
JP4658280B2 (ja) * | 1999-11-29 | 2011-03-23 | 太平洋セメント株式会社 | 積層型圧電アクチュエータ |
JP4854831B2 (ja) * | 2000-03-17 | 2012-01-18 | 太平洋セメント株式会社 | 積層型圧電アクチュエータ |
DE10152490A1 (de) * | 2000-11-06 | 2002-05-08 | Ceramtec Ag | Außenelektroden an piezokeramischen Vielschichtaktoren |
JP4214686B2 (ja) | 2001-06-18 | 2009-01-28 | 日本ゼオン株式会社 | 樹脂積層体及びその製造方法 |
JP2003125569A (ja) | 2001-08-08 | 2003-04-25 | Matsushita Electric Ind Co Ltd | ブラシレスモータ |
DE10234787C1 (de) * | 2002-06-07 | 2003-10-30 | Pi Ceramic Gmbh Keramische Tec | Verfahren zur Herstellung eines monolithischen Vielschichtaktors, monolithischer Vielschichtaktor aus einem piezokeramischen oder elektrostriktiven Material |
DE10307825A1 (de) * | 2003-02-24 | 2004-09-09 | Epcos Ag | Elektrisches Vielschichtbauelement und Schichtstapel |
JP2004288794A (ja) * | 2003-03-20 | 2004-10-14 | Nec Tokin Corp | 積層型圧電素子およびその製造方法 |
DE102004050803A1 (de) † | 2004-10-19 | 2006-04-20 | Robert Bosch Gmbh | Piezoaktor |
JP4843948B2 (ja) | 2005-01-21 | 2011-12-21 | Tdk株式会社 | 積層型圧電素子 |
WO2006087871A1 (ja) * | 2005-02-15 | 2006-08-24 | Murata Manufacturing Co., Ltd. | 積層型圧電素子 |
ATE528802T1 (de) * | 2007-02-19 | 2011-10-15 | Siemens Ag | Piezokeramischer vielschichtaktor und herstellungsverfahren dafür |
-
2005
- 2005-09-16 AT AT08103336T patent/ATE533189T1/de active
- 2005-09-16 DK DK05255752T patent/DK1764844T3/da active
- 2005-09-16 DK DK08103335.9T patent/DK1944813T3/da active
- 2005-09-16 AT AT05255752T patent/ATE418796T1/de active
- 2005-09-16 EP EP08103336A patent/EP1944814B1/de not_active Not-in-force
- 2005-09-16 DE DE602005027914T patent/DE602005027914D1/de active Active
- 2005-09-16 EP EP08103335A patent/EP1944813B1/de not_active Not-in-force
- 2005-09-16 DE DE602005011970T patent/DE602005011970D1/de active Active
- 2005-09-16 AT AT08103335T patent/ATE508483T1/de active
- 2005-09-16 EP EP05255752.7A patent/EP1764844B2/de not_active Not-in-force
-
2006
- 2006-07-07 US US11/991,894 patent/US8358051B2/en not_active Expired - Fee Related
- 2006-07-07 JP JP2008530592A patent/JP2009508349A/ja active Pending
- 2006-07-07 WO PCT/GB2006/002519 patent/WO2007031700A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
JP2009508349A (ja) | 2009-02-26 |
US8358051B2 (en) | 2013-01-22 |
DK1944813T3 (da) | 2011-06-06 |
EP1944813A1 (de) | 2008-07-16 |
EP1944814A1 (de) | 2008-07-16 |
ATE533189T1 (de) | 2011-11-15 |
DE602005011970D1 (de) | 2009-02-05 |
EP1764844B1 (de) | 2008-12-24 |
ATE418796T1 (de) | 2009-01-15 |
EP1944813B1 (de) | 2011-05-04 |
EP1764844A1 (de) | 2007-03-21 |
WO2007031700A1 (en) | 2007-03-22 |
EP1944814B1 (de) | 2011-11-09 |
DK1764844T3 (da) | 2009-04-20 |
EP1764844B2 (de) | 2016-06-22 |
US20100237751A1 (en) | 2010-09-23 |
DE602005027914D1 (de) | 2011-06-16 |
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Legal Events
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UEP | Publication of translation of european patent specification |
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