WO2009001650A1 - 弾性表面波装置およびその製造方法 - Google Patents

弾性表面波装置およびその製造方法 Download PDF

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Publication number
WO2009001650A1
WO2009001650A1 PCT/JP2008/060081 JP2008060081W WO2009001650A1 WO 2009001650 A1 WO2009001650 A1 WO 2009001650A1 JP 2008060081 W JP2008060081 W JP 2008060081W WO 2009001650 A1 WO2009001650 A1 WO 2009001650A1
Authority
WO
WIPO (PCT)
Prior art keywords
acoustic wave
wave device
surface acoustic
fabricating
same
Prior art date
Application number
PCT/JP2008/060081
Other languages
English (en)
French (fr)
Inventor
Toru Fukano
Junya Nishii
Original Assignee
Kyocera Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corporation filed Critical Kyocera Corporation
Priority to CN2008800197915A priority Critical patent/CN101682310B/zh
Priority to US12/667,008 priority patent/US8299678B2/en
Priority to JP2009520411A priority patent/JP5032572B2/ja
Publication of WO2009001650A1 publication Critical patent/WO2009001650A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
    • H03H9/1092—Mounting in enclosures for surface acoustic wave [SAW] devices the enclosure being defined by a cover cap mounted on an element forming part of the surface acoustic wave [SAW] device on the side of the IDT's
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/058—Holders; Supports for surface acoustic wave devices
    • H03H9/059—Holders; Supports for surface acoustic wave devices consisting of mounting pads or bumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/11—Manufacturing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161—Cap
    • H01L2924/162—Disposition
    • H01L2924/16235—Connecting to a semiconductor or solid-state bodies, i.e. cap-to-chip
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

特性劣化がなく、ウェハ工程にて一括に形成することができ、小型で低背な弾性表面波装置の製造方法を提供する。弾性表面波装置は、圧電基板１と、前記圧電基板１の一方主面の上に形成され、櫛歯状電極を少なくとも１つ備えるＩＤＴ２と、前記一方主面の上において前記ＩＤＴ２を覆うことによって前記一方主面とともに中空の収容空間７を形成する保護カバー６と、を備え、前記保護カバー６は、貫通穴１５を有し、少なくとも一部がフッ素を含む酸発生材を含有する光硬化性材料からなる。
PCT/JP2008/060081 2007-06-28 2008-05-30 弾性表面波装置およびその製造方法 WO2009001650A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2008800197915A CN101682310B (zh) 2007-06-28 2008-05-30 弹性表面波装置及其制造方法
US12/667,008 US8299678B2 (en) 2007-06-28 2008-05-30 Surface acoustic wave device and method for production of same
JP2009520411A JP5032572B2 (ja) 2007-06-28 2008-05-30 弾性表面波装置およびその製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-171013 2007-06-28
JP2007171013 2007-06-28

Publications (1)

Publication Number Publication Date
WO2009001650A1 true WO2009001650A1 (ja) 2008-12-31

Family

ID=40185472

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060081 WO2009001650A1 (ja) 2007-06-28 2008-05-30 弾性表面波装置およびその製造方法

Country Status (4)

Country Link
US (1) US8299678B2 (ja)
JP (2) JP5032572B2 (ja)
CN (1) CN101682310B (ja)
WO (1) WO2009001650A1 (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010213016A (ja) * 2009-03-10 2010-09-24 Murata Mfg Co Ltd 弾性表面波素子の製造方法及び弾性表面波素子
JP2010245829A (ja) * 2009-04-06 2010-10-28 Taiyo Yuden Co Ltd 電子デバイスおよびその製造方法
US7854050B2 (en) 2007-10-12 2010-12-21 Taiyo Yuden Co., Ltd. Method of manufacturing a surface acoustic wave device
JP2013132083A (ja) * 2013-03-22 2013-07-04 Panasonic Corp 弾性表面波デバイス
JP2014033467A (ja) * 2013-10-31 2014-02-20 Murata Mfg Co Ltd 弾性表面波素子
JP2014057124A (ja) * 2012-09-11 2014-03-27 Panasonic Corp 弾性表面波デバイスおよびその製造方法
WO2016103925A1 (ja) * 2014-12-25 2016-06-30 株式会社村田製作所 弾性波装置及びその製造方法
JP2017208417A (ja) * 2016-05-17 2017-11-24 住友ベークライト株式会社 中空構造体の製造方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2008081935A1 (ja) * 2006-12-28 2010-04-30 京セラ株式会社 弾性表面波装置およびその製造方法
JP5214627B2 (ja) * 2007-10-30 2013-06-19 京セラ株式会社 弾性波装置
US9711392B2 (en) * 2012-07-25 2017-07-18 Infineon Technologies Ag Field emission devices and methods of making thereof
CN103177717B (zh) * 2013-02-05 2015-06-17 长安大学 Rayleigh波与love波双模式声波产生器件
EP3007357B1 (en) * 2013-05-27 2019-05-01 Murata Manufacturing Co., Ltd. Surface acoustic wave device
JP5797356B2 (ja) * 2013-09-26 2015-10-21 京セラ株式会社 弾性波装置および弾性波モジュール
JP5880520B2 (ja) * 2013-10-30 2016-03-09 株式会社村田製作所 弾性波装置及びその製造方法
EP3339833B1 (de) * 2016-12-22 2021-11-10 Heraeus Nexensos GmbH Sensor, insbesondere russsensor, verfahren zur herstellung eines sensors, insbesondere eines russsensors, und verwendung

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000109694A (ja) * 1998-08-04 2000-04-18 Jsr Corp 光硬化性樹脂組成物および硬化膜
JP2002261582A (ja) * 2000-10-04 2002-09-13 Matsushita Electric Ind Co Ltd 弾性表面波デバイスおよびその製造方法ならびにそれを用いた回路モジュール
JP2005123561A (ja) * 2003-09-25 2005-05-12 Kyocera Corp 微小電気機械式装置の封止構造および封止方法ならびに微小電気機械式装置
JP2006128930A (ja) * 2004-10-27 2006-05-18 Kyocera Corp 弾性表面波装置およびその製造方法ならびにその弾性表面波装置を備えた通信装置
JP2006333171A (ja) * 2005-05-27 2006-12-07 Kyocera Corp 弾性表面波共振器および弾性表面波装置並びに通信装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09172339A (ja) 1995-12-19 1997-06-30 Kokusai Electric Co Ltd 弾性表面波装置及びその製造方法
JPH10270975A (ja) 1996-03-08 1998-10-09 Matsushita Electric Ind Co Ltd 電子部品とその製造方法
JP3329175B2 (ja) 1996-03-11 2002-09-30 松下電器産業株式会社 弾性表面波デバイス及びその製造方法
TW482817B (en) 1998-06-18 2002-04-11 Jsr Corp Photosetting compositions and photoset articles
US6653762B2 (en) * 2000-04-19 2003-11-25 Murata Manufacturing Co., Ltd. Piezoelectric type electric acoustic converter
JP4404450B2 (ja) * 2000-06-30 2010-01-27 京セラ株式会社 弾性表面波装置及びその製造方法
US6710682B2 (en) 2000-10-04 2004-03-23 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave device, method for producing the same, and circuit module using the same
JP3832572B2 (ja) * 2001-10-09 2006-10-11 信越化学工業株式会社 光硬化性樹脂組成物、パターン形成方法及び基板保護用フィルム
JP4610244B2 (ja) * 2004-06-28 2011-01-12 京セラ株式会社 弾性表面波装置の製造方法
JP2006197554A (ja) * 2004-12-17 2006-07-27 Seiko Epson Corp 弾性表面波デバイス及びその製造方法、ｉｃカード、携帯用電子機器
US7504911B2 (en) 2005-05-27 2009-03-17 Kyocera Corporation Surface acoustic wave resonator, surface acoustic wave device, and communications equipment
JP2007019132A (ja) * 2005-07-06 2007-01-25 Seiko Epson Corp 圧電振動装置の製造方法
CN100546180C (zh) * 2005-08-24 2009-09-30 京瓷株式会社 表面声波装置及其制造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000109694A (ja) * 1998-08-04 2000-04-18 Jsr Corp 光硬化性樹脂組成物および硬化膜
JP2002261582A (ja) * 2000-10-04 2002-09-13 Matsushita Electric Ind Co Ltd 弾性表面波デバイスおよびその製造方法ならびにそれを用いた回路モジュール
JP2005123561A (ja) * 2003-09-25 2005-05-12 Kyocera Corp 微小電気機械式装置の封止構造および封止方法ならびに微小電気機械式装置
JP2006128930A (ja) * 2004-10-27 2006-05-18 Kyocera Corp 弾性表面波装置およびその製造方法ならびにその弾性表面波装置を備えた通信装置
JP2006333171A (ja) * 2005-05-27 2006-12-07 Kyocera Corp 弾性表面波共振器および弾性表面波装置並びに通信装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7854050B2 (en) 2007-10-12 2010-12-21 Taiyo Yuden Co., Ltd. Method of manufacturing a surface acoustic wave device
JP2010213016A (ja) * 2009-03-10 2010-09-24 Murata Mfg Co Ltd 弾性表面波素子の製造方法及び弾性表面波素子
JP2010245829A (ja) * 2009-04-06 2010-10-28 Taiyo Yuden Co Ltd 電子デバイスおよびその製造方法
JP2014057124A (ja) * 2012-09-11 2014-03-27 Panasonic Corp 弾性表面波デバイスおよびその製造方法
JP2013132083A (ja) * 2013-03-22 2013-07-04 Panasonic Corp 弾性表面波デバイス
JP2014033467A (ja) * 2013-10-31 2014-02-20 Murata Mfg Co Ltd 弾性表面波素子
WO2016103925A1 (ja) * 2014-12-25 2016-06-30 株式会社村田製作所 弾性波装置及びその製造方法
US10530333B2 (en) 2014-12-25 2020-01-07 Murata Manufacturing Co., Ltd. Acoustic wave device and manufacturing method for same
JP2017208417A (ja) * 2016-05-17 2017-11-24 住友ベークライト株式会社 中空構造体の製造方法

Also Published As

Publication number Publication date
US8299678B2 (en) 2012-10-30
CN101682310B (zh) 2012-11-28
US20100244625A1 (en) 2010-09-30
JP2012182854A (ja) 2012-09-20
JPWO2009001650A1 (ja) 2010-08-26
JP5430714B2 (ja) 2014-03-05
JP5032572B2 (ja) 2012-09-26
CN101682310A (zh) 2010-03-24

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